Window deposition apparatus
US-2024307909-A1 · Sep 19, 2024 · US
Imc evaporator boat-thermal insulation cartridge assembly
US2016208374A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016208374-A1 |
| Application number | US-201514600471-A |
| Country | US |
| Kind code | A1 |
| Filing date | Jan 20, 2015 |
| Priority date | Jan 20, 2015 |
| Publication date | Jul 21, 2016 |
| Grant date | — |
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- Title
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- Abstract
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Abstract
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An IMC evaporator boat-thermal insulation cartridge assembly that includes an IMC evaporator boat and a thermal insulation cartridge, which has a container containing a thermal insulation body containing a cavity. The IMC evaporator boat is received within the cavity so as to define an air space between the IMC evaporator boat and the thermal insulation body. A heater is contained within the air space.
First claim
Opening claim text (preview).
What is claimed is: 1 . An IMC evaporator boat-thermal insulation cartridge assembly comprising: an IMC evaporator boat; a thermal insulation cartridge comprising a container containing a thermal insulation body containing a cavity; the IMC evaporator boat being received within the cavity so as to define an air space between the IMC evaporator boat and the thermal insulation body; and a heater ( 90 ) contained within the air space. 2 . The IMC evaporator boat-thermal insulation cartridge assembly according to claim 1 wherein the IMC evaporator boat having a top surface that contains a pool, and the IMC evaporator boat having side walls and a bottom surface. 3 . The IMC evaporator boat-thermal insulation cartridge assembly according to claim 2 wherein a cavity surface defines the cavity, and the cavity surface comprising a frusto-conical cavity section and an arcuate cavity section. 4 . The IMC evaporator boat-thermal insulation cartridge assembly according to claim 3 wherein the IMC evaporator boat is received within the cavity, the side walls of the IMC evaporator boat contact the frusto-conical cavity section of the cavity surface, and the air space being defined between the bottom surface of the IMC evaporator boat and the arcuate cavity section of the cavity surface. 5 . The IMC evaporator boat-thermal insulation cartridge assembly according to claim 1 wherein a thermocouple is positioned within the air space. 6 . The IMC evaporator boat-thermal insulation cartridge assembly according to claim 1 wherein the IMC evaporator boat having a top surface that contains a pool, and the IMC evaporator boat having side walls, a bottom surface, and end walls. 7 . The IMC evaporator boat-thermal insulation cartridge assembly according to claim 6 wherein a cavity surface defines the cavity, and the cavity surface comprising a frusto-conical cavity section, an arcuate cavity section, and end cavity surfaces. 8 . The IMC evaporator boat-thermal insulation cartridge assembly according to claim 7 wherein the IMC evaporator boat is received within the cavity, the side walls of the IMC evaporator boat contact the frusto-conical cavity section of the cavity surface and the end walls of the IMC evaporator boat contact the end cavity surfaces of the cavity, and the air space being defined between the bottom surface of the IMC evaporator boat and the arcuate cavity section of the cavity surface. 9 . The IMC evaporator boat-thermal insulation cartridge assembly according to claim 1 wherein the IMC evaporator boat comprises one of the following intermetallic composites selected from the following group: BN—TiB 2 or BN—AlN—TiB 2 . 10 . The IMC evaporator boat-thermal insulation cartridge assembly according to claim 1 wherein the thermal insulation body comprises one of the materials selected from the following group: alumina-silica fibers or alumina fibers. 11 . The IMC evaporator boat-thermal insulation cartridge assembly according to claim 1 wherein the IMC evaporator boat comprises one of the following intermetallic composites selected from the following group: BN—TiB 2 or BN—AlN—TiB 2 , and the thermal insulation body comprises one of the materials selected from the following group: alumina-silica fibers or alumina fibers. 12 . The IMC evaporator boat-thermal insulation cartridge assembly according to claim 1 wherein the heater comprises one of the materials selected from the group comprising molybdenum disilicide or tungsten or an intermetallic composite or silicon carbide
Assignees
Inventors
Classifications
- C23C14/243Primary
Crucibles for source material (C23C14/28, C23C14/30 take precedence) · CPC title
- C23C14/24Primary
Vacuum evaporation · CPC title
by resistance or inductive heating of the source · CPC title
- C23C14/0021Primary
Reactive sputtering or evaporation · CPC title
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- What does patent US2016208374A1 cover?
- An IMC evaporator boat-thermal insulation cartridge assembly that includes an IMC evaporator boat and a thermal insulation cartridge, which has a container containing a thermal insulation body containing a cavity. The IMC evaporator boat is received within the cavity so as to define an air space between the IMC evaporator boat and the thermal insulation body. A heater is contained within the ai…
- Who is the assignee on this patent?
- Kennametal Inc
- What technology area does this patent fall under?
- Primary CPC classification C23C14/243. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Thu Jul 21 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).