System for Detecting a Gas and Method Therefor

Patent metadata

Field	Value
Publication number	US-2016202225-A1
Application number	US-201614993064-A
Country	US
Kind code	A1
Filing date	Jan 11, 2016
Priority date	Jan 9, 2015
Publication date	Jul 14, 2016
Grant date	—

Abstract

An apparatus and method for detecting a gas with high sensitivity, high SNR, and low cost is disclosed. Embodiments of the present invention include sensor nodes that communicate with a common controller, where each sensor node includes a resonant sensor that comprises a resonator having a selectively chemisorptive layer disposed upon it. The chemisorptive layer is a nanoparticle-based layer that improves the trapping probability for target-gas molecules, thereby improving the correspondence of the resonance frequency of the resonator to the gas concentration in the atmosphere in which it resides, and improving the sensitivity of the resonant sensor as compared to prior-art resonant mass sensors. Measurement of an electrical parameter of the chemisorption layer can also be used as a secondary detection mode. By employing the chemisorptive layer as an efficient and selective mass-collection layer affords embodiments of the present invention improved noise immunity.

First claim

What is claimed is:

1 . An apparatus comprising a first sensor that includes:
a first resonator; and a first layer disposed on the first resonator, the first layer comprising a plurality of nanoparticles that collectively enable selective chemisorption of a first gas; wherein a first resonance frequency of the first resonator is based on the mass of the first layer; and wherein the first sensor is operative for providing a first signal that is indicative of a first concentration of the first gas at a first location.

2 . The apparatus of claim 1 further comprising:
a mirror;
a membrane that is movable with respect to the mirror, the first resonator including the membrane, wherein the membrane and first mirror collectively define an optically resonant cavity having a cavity length;
a light source operative for providing a first light signal to the optically resonant cavity;
a spectrometer that is operative for monitoring a plurality of spectral components in a second light signal, wherein the spectrometer is arranged to receive the second light signal from the optically resonant cavity, the second light signal being based on the first light signal and a second gas that is resident in the optically resonant cavity.

3 . The apparatus of claim 1 further comprising a second sensor that includes:
a second resonator; and
a second layer disposed on the second resonator, the second layer comprising a plurality of nanoparticles that collectively enable selective chemisorption of a second gas;
wherein a second resonance frequency of the second resonator is based on the mass of the second layer; and
wherein the second sensor is operative for providing a second signal that is indicative of a second concentration of the second gas at a second location.

4 . The apparatus of claim 3 wherein the second gas is the same as the first gas.

5 . The apparatus of claim 4 further comprising a controller that is operative for (1) receiving the first signal from the first sensor, the first signal being indicative of the concentration of the first gas at a first location, (2) receiving the second signal from the second sensor, the second signal being indicative of the concentration of the first gas at a second location, and (3) generating a spatial map of first-gas concentration based on the first signal and the second signal.

6 . The apparatus of claim 1 wherein the first resonator comprises silicon carbide.

7 . The apparatus of claim 1 further comprising:
a first electrode; and
a second electrode;
wherein the first and second electrodes are operatively coupled with the first layer such that a first electrical parameter measured between the first and second electrodes is based on the chemisorption of the first gas by the first layer.

8 . The apparatus of claim 1 wherein the first sensor further comprises:
a feedback oscillator operative for driving the resonator into resonance; and
a read-out circuit comprising a phase-locked loop.

9 . An apparatus comprising:
a first sensor node that includes:
a first gas sensor having a first resonance frequency that is based on the selective chemisorption of a first gas by a first layer;
a first electronic module operative for determining the first resonance frequency; and
a first transceiver for providing a first output signal to a controller, the first output signal being based on the first resonance frequency; and
the controller, wherein the controller is operative for generating an estimate of a first concentration of the first gas at a first location based on the first output signal.

10 . The apparatus of claim 9 further comprising a second sensor node that includes:
a second gas sensor having a second resonance frequency that is based on the chemisorption of a second gas by a second layer;
a second electronic module operative for determining the second resonance frequency; and
a second transceiver for providing a second output signal to the controller, the second output signal being based on the second resonance frequency;
wherein the controller is further operative for generating a second estimate of a second concentration of the second gas at a second location based on the second output signal.

11 . The apparatus of claim 10 wherein the second gas is the same as the first gas, and wherein the controller is further operative for generating a spatial map of the concentration of the first gas based on the first output signal and the second output signal.

12 . The apparatus of claim 9 wherein the first gas sensor includes a first resonator and the first layer, the first layer being disposed on the first resonator, and the first layer comprising a plurality of nanoparticles that collectively enable selective chemisorption of a first gas.

13 . The apparatus of claim 9 wherein the first sensor node is dimensioned and arranged to be movable relative to the controller, and wherein the first transceiver is a wireless transceiver.

14 . A method comprising:
providing a first layer disposed on a first resonator, the first layer comprising a plurality of nanoparticles that collectively enable selective chemisorption of a first gas; determining a first resonance frequency of the first resonator, the first resonance frequency being based on the mass of the first layer at a first location; and estimating a first concentration of the first gas at the first location based on the first resonance frequency.

15 . The method of claim 14 further comprising:
providing a second layer disposed on a second resonator, the second layer being selectively chemisorptive for a second gas;
determining a second resonance frequency of the second resonator, the second resonance frequency being based on the mass of the second layer at a second location; and
estimating a second concentration of the second gas at the second location based on the second resonance frequency.

16 . The method of claim 15 wherein the second layer is provided such that the second gas is the same as the first gas.

17 . The method of claim 16 further comprising generating a spatial map of the concentration based on the first concentration, first location, second concentration, and second location.

18 . The method of claim 14 further comprising:
determining a second resonance frequency of the first resonator, the second resonance frequency being based on the mass of the first layer at a second location; and
estimating a second concentration of the first gas at the second location based on the second resonance frequency.

19 . The method of claim 14 further comprising:
providing the first resonator such that it defines one surface of an optically resonant cavity having a cavity length that is based on the position of the membrane with respect to a first mirror;
interrogating the optically resonant cavity with a first light signal;
monitoring a plurality of wavelength signals in a second light signal received from the optically resonant cavity, the second light signal being based on the first light signal; and
estimating the concentration of the first gas in the optically resonant cavity based on the plurality of wavelength signals.

20 . The method of claim 19 further comprising:
measuring a first electrical parameter of the first layer;
estimating a second concentration of the first gas at the first location based on the first electrical parameter; and
establishing a third concentration of the first gas at the first location based on the first conce

Assignees

• Univ Case Western Reserve

Inventors

• Feng Philip X L
• Wang Zenghui
• Lee Jaesung

Classifications

• G01N27/4166

  measuring a particular property of an electrolyte · CPC title

• G01N33/0032 Primary

  using two or more different physical functioning modes · CPC title

• G01N21/31

  Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry {(G01N21/72 takes precedence)} · CPC title

• G01N2201/06113

  Coherent sources; lasers · CPC title

• G01N27/4072

  characterized by the diffusion barrier · CPC title