Piezoelectric element, piezoelectric actuator, and head suspension

Patent metadata

Field	Value
Publication number	US-2016196842-A1
Application number	US-201615071676-A
Country	US
Kind code	A1
Filing date	Mar 16, 2016
Priority date	Jan 7, 2011
Publication date	Jul 7, 2016
Grant date	—

Abstract

A piezoelectric element easily and surely forms polymer coatings on peripheral end faces of the piezoelectric element without deteriorating a yield of the piezoelectric element. The piezoelectric element is manufactured by a method including steps of cutting a piezoelectric element out from a base piezoelectric material plate so that peripheral end faces are formed to define a peripheral shape of the piezoelectric element, and forming polymer coatings on at least objective areas of the peripheral end faces of the piezoelectric element by vapor deposition polymerization, respectively.

First claim

1 .- 12 . (canceled)

13 . A piezoelectric element, comprising:
an element body configured to deform, so as to elongate and contract along a deformation direction, in response to a voltage applied thereto; electrodes formed on opposite sides of the element body; peripheral end faces defining a peripheral shape of the element body; and polymer coatings continuously extending from at least opposite end faces of the peripheral end faces of the element body in an orthogonal direction relative to the deformation direction to side portions of one of the electrodes in said orthogonal direction by vapor deposition polymerization so that said one of the electrodes has an exposed portion exposing outside at a middle portion defined in said orthogonal direction between the said portions that are covered with the polymer coatings.

14 . A piezoelectric actuator including the piezoelectric element of claim 13 and displacing a driven part with respect to a base according to the deformation of the piezoelectric element, the piezoelectric actuator comprising:
an actuator base arranged between the base and the driven part;
an opening formed on the actuator base to accommodate the piezoelectric element; and
an adhesive adhering each peripheral end face along the direction orthogonal to the deformation direction of the piezoelectric element to inner faces of the opening facing the peripheral end face.

15 . A head suspension including the piezoelectric actuator of claim 14 , comprising:
a base plate and a load beam supported with the base plate; a read/write head supported with the load beam; and the base plate serving as the base and the load beam serving as the driven part.

Assignees

• Nhk Spring Co Ltd

Inventors

• Nojima Akira

Classifications

• G11B5/4873

  the arm comprising piezoelectric or other actuators for adjustment of the arm · CPC title

• C08G73/1082

  wholly aromatic in the tetracarboxylic moiety · CPC title

• C08G59/72

  Complexes of boron halides · CPC title

• G11B5/483 Primary

  Piezoelectric devices between head and arm, e.g. for fine adjustment · CPC title

• Y10T29/42

  Piezoelectric device making · CPC title