Thin film transistor having germanium thin film and manufacturing method thereof, array substrate, display device
US-9704891-B2 · Jul 11, 2017 · US
US2016189880A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016189880-A1 |
| Application number | US-201514785772-A |
| Country | US |
| Kind code | A1 |
| Filing date | May 29, 2015 |
| Priority date | Dec 3, 2014 |
| Publication date | Jun 30, 2016 |
| Grant date | — |
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An electrode plate, a manufacturing method thereof, and an energy storage device are disclosed. The method for manufacturing an electrode plate includes: forming a germanium film on a metal substrate; carrying out a topology treatment on the germanium film by using a functionalization element, to obtain the electrode plate with a topological semiconductor characteristic. The electrode plate prepared by the above method has a high conductivity and a low internal resistance.
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1 . A method for manufacturing an electrode plate, comprising: forming a germanium film on a metal substrate; carrying out a topology treatment on the germanium film by using a functionalization element, to obtain the electrode plate with a topological semiconductor characteristic. 2 . The method according to claim 1 , wherein, the germanium film is formed by using an atomic layer deposition method; or the germanium film is formed by using a chemical vapor deposition method; or the germanium film is formed by using a mechanical exfoliation transferring method; or the germanium film is formed by using a magnetron sputtering method; or the germanium film is formed by using a pulsed laser deposition method. 3 . The method according to claim 1 , wherein the functionalization element comprises at least one selected from the group consisting of fluorine, chlorine, bromine, or iodine. 4 . The method according to claim 3 , wherein, carrying out topology treatment on the germanium film using the functionalization element to obtain the electrode plate with the topological semiconductor characteristic comprises: carrying out halogenation treatment on the germanium film by using fluorine, chlorine, bromine, or iodine, to obtain a germanium halide film. 5 . The method according to claim 4 , wherein, the halogenation treatment on the germanium film is carried out by using a gas phase method; or the halogenation treatment on the germanium film is carried out by using a liquid phase method; or the halogenation treatment on the germanium film is carried out by using a surface modification method; or the halogenation treatment on the germanium film is carried out by using a plasma treatment method. 6 . The method according to claim 5 , wherein, in the case where the halogenation treatment on the germanium film is carried out by using a liquid phase method, the halogenation treatment on the germanium film comprises: carrying out the halogenation treatment on the germanium film in a liquid bromine environment with a concentration of the liquid bromine being 1%-10% and a treatment temperature being 40-80 Celsius degree, to form a germanium bromide film. 7 . The method according to claim 5 , wherein, in the case where the halogenation treatment on the germanium film is carried out by using a gas phase method, the halogenation treatment on the germanium film comprises: carrying out the halogenation treatment on the germanium film under a iodine gas atmosphere with a gas pressure being 1-10 Pa and a treatment temperature being 60-100 Celsius degree, to form a germanium iodide film; or carrying out the halogenation treatment on the germanium film under a bromine gas atmosphere with the gas pressure being 1-10 Pa and the treatment temperature being 50-400 Celsius degree, to form a germanium bromide film; or carrying out annealing on the germanium film under a chlorine atmosphere at a treatment temperature of 50-400 Celsius degree for 10 minutes, to form a germanium chloride film. 8 . The method according to claim 5 , wherein, in the case where the halogenation treatment on the germanium film is carried out by using a gas phase method, the halogenation treatment on the germanium film comprises: carrying out the halogenation treatment on the germanium film under a BCl 3 gas atmosphere with a gas pressure being 1-10 Pa and a treatment temperature being 250-350 Celsius degree, and carrying out annealing at 90-130 Celsius degree under halogen gas atmosphere, to form a germanium chloride film. 9 . The method according to claim 5 , wherein, in the case where the halogenation treatment on the germanium film is carried out by using a surface modification method, the halogenation treatment on the germanium film comprises: coating an organic colloidal material comprising a halogen onto a substrate; laminating the substrate on the germanium film via a side of the substrate coated with the organic colloidal material, to make halogen atoms in the organic colloidal material transferred to the germanium film, to achieve the halogenation of the germanium film. 10 . The method according to claim 5 , wherein, in the case where the halogenation treatment on the germanium film is carried out by using a plasma treatment method, the halogenation treatment on the germanium film comprises: bombing a surface of the germanium film by using a halogen plasma in a inductively coupled plasma or a reactive ion etching device, to make the halogen plasma adsorbed in the germanium film, to achieve the halogenation treatment on the germanium film. 11 . The method according to claim 1 , wherein the functionalization element comprises at least one selected from the group consisting of hydrogen, nitrogen, boron, and sulfur. 12 . The method according to claim 1 , further comprising, before forming the germanium film on the metal substrate, washing the metal substrate. 13 . An electrode plate, comprising a metal substrate and a film comprising germanium being disposed on the metal substrate and having a topological semiconductor characteristic. 14 . The electrode plate according to claim 13 , wherein the film comprises a germanium halide film formed by carrying out halogenation treatment on a germanium film with at least one selected from the group consisting of fluorine, chlorine, bromine, and iodine. 15 . The electrode plate according to claim 14 , wherein, the germanium halide film is a single-atom-layer germanium halide film; or the germanium halide film is a double-atom-layer germanium halide film; or the germanium halide film is a multiple-atom-layer germanium halide film. 16 . The electrode plate according to claim 13 , wherein, the film comprises a topological semiconductor film formed by carrying out topology treatment on a germanium film with at least one selected from the group consisting of hydrogen, nitrogen, boron, and sulfur. 17 . The electrode plate according to claim 13 , wherein the metal substrate comprises at least one selected from the group consisting of a gold foil, an aluminum foil, a platinum foil, a copper foil, and a nickel foil. 18 . An energy storage device, comprising the electrode plate according to claim 13 . 19 . The energy storage device according to claim 18 , wherein the energy storage device comprises a battery or a capacitor. 20 . The energy storage device according to claim 18 , wherein the film comprises a germanium halide film formed by carrying out halogenation treatment on a germanium film with at least one selected from the group consisting of fluorine, chlorine, bromine, and iodine.
characterised by structural features of the materials making up or comprised in the electrodes, e.g. form, surface area or porosity; characterised by the structural features of powders or particles used therefor · CPC title
Li-accumulators · CPC title
Metal or alloys, e.g. alloy coatings (H01M4/669 take precedence) · CPC title
by coating on electrode collectors · CPC title
Physical vapour deposition · CPC title
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