Cooling structure for electromagnetic coil, and electromagnetic actuator

Patent metadata

Field	Value
Publication number	US-2016189845-A1
Application number	US-201615061857-A
Country	US
Kind code	A1
Filing date	Mar 4, 2016
Priority date	Sep 4, 2013
Publication date	Jun 30, 2016
Grant date	—

Abstract

A cooling structure for a first electromagnetic coil includes the first electromagnetic coil having a space extending in the direction of a predetermined axis Z; a cooling member attached to an end surface, with respect to the direction of the predetermined axis Z, of the first electromagnetic coil and having a flow path for fluid internally formed; and an inlet pipe and an outlet pipe connected, within the space, to an inlet and outlet, respectively, of the flow path of the cooling member and extending through the space to a region outside the electromagnetic coil.

First claim

What is claimed is:

1 . A cooling structure for an electromagnetic coil comprising:
an electromagnetic coil which has a space extending in a direction of a predetermined axis; a cooling member attached to an end surface, with respect to the direction of the predetermined axis, of the electromagnetic coil and having a flow path for fluid internally formed ; and an inlet pipe and an outlet pipe connected, within the space, to an inlet and outlet, respectively, of the flow path of the cooling member and extending through the space to a region outside the electromagnetic coil.

2 . A cooling structure for an electromagnetic coil comprising:
a plurality of electromagnetic coils each of which has a space extending in a direction of a predetermined axis and which are disposed with their predetermined axes juxtaposed in parallel; a cooling member attached to end surfaces, with respect to the direction of the predetermined axes, of the plurality of electromagnetic coils and having a flow path for fluid internally formed; an inlet pipe connected, within the space of any one of the electromagnetic coils, to an inlet of the flow path of the cooling member and extending through the space to a region outside the electromagnetic coil; and an outlet pipe connected, within the space of any one of the electromagnetic coils, to an outlet of the flow path of the cooling member and extending through the space to a region outside the electromagnetic coil.

3 . The cooling structure for an electromagnetic coil according to claim 2 , wherein the inlet pipe and the outlet pipe are connected to the inlet and the outlet, respectively, within the same space of the electromagnetic coil.

4 . A cooling structure for an electromagnetic coil comprising:
a first electromagnetic coil and a second electromagnetic coil each of which has a space extending in a direction of a predetermined axis and which are aligned with the direction of the predetermined axis; a first cooling member attached to an end surface, located opposite the second electromagnetic coil with respect to the direction of the predetermined axis, of the first electromagnetic coil and having a flow path for fluid internally formed; a second cooling member attached to an end surface, located toward the second electromagnetic coil with respect to the direction of the predetermined axis, of the first electromagnetic coil and to an end surface, located toward the first electromagnetic coil with respect to the direction of the predetermined axis, of the second electromagnetic coil and having a flow path for fluid internally formed; and a first inlet pipe and a first outlet pipe connected, within the space of the first electromagnetic coil, to an inlet and an outlet, respectively, of the flow path of the first cooling member and extending through the space of the first electromagnetic coil, through the second cooling member, and through the space of the second electromagnetic coil to a region outside the second electromagnetic coil.

5 . The cooling structure for an electromagnetic coil according to claim 4 , further comprising a second inlet pipe and a second outlet pipe connected, within the space of the second electromagnetic coil, to an inlet and an outlet, respectively, of the second cooling member and extending through the space of the second electromagnetic coil to a region outside the second electromagnetic coil.

6 . A cooling structure for an electromagnetic coil comprising:
a plurality of first electromagnetic coils each of which has a space extending in a direction of a predetermined axis and which are disposed with their predetermined axes juxtaposed in parallel; a plurality of second electromagnetic coils each of which has a space extending in the direction of the predetermined axis and which are aligned with the respective first electromagnetic coils in the direction of the predetermined axes; a first cooling member attached to end surfaces, located opposite the second electromagnetic coils with respect to the direction of the predetermined axes, of the plurality of first electromagnetic coils and having a flow path for fluid internally formed; a second cooling member attached to end surfaces, located toward the second electromagnetic coils with respect to the direction of the predetermined axes, of the plurality of first electromagnetic coils and to end surfaces, located toward the first electromagnetic coils with respect to the direction of the predetermined axes, of the plurality of second electromagnetic coils and having a flow path for fluid internally formed; a first inlet pipe connected, within the space of any one of the first electromagnetic coils, to an inlet of the flow path of the first cooling member and extending through the space of the first electromagnetic coil, through the second cooling member, and through the space of the second electromagnetic coil to a region outside the second electromagnetic coil; and a first outlet pipe connected, within the space of any one of the first electromagnetic coils, to an outlet of the flow path of the first cooling member and extending through the space of the first electromagnetic coil, through the second cooling member, and through the space of the second electromagnetic coil to a region outside the second electromagnetic coil.

7 . The cooling structure for an electromagnetic coil according to claim 6 , wherein the first inlet pipe and the first outlet pipe are connected to the inlet and the outlet, respectively, within the same space of the first electromagnetic coil.

8 . The cooling structure for an electromagnetic coil according to claim 6 , further comprising:
a second inlet pipe connected, within the space of any one of the plurality of second electromagnetic coils, to an inlet of the flow path of the second cooling member and extending through the space of the second electromagnetic coil to a region outside the second electromagnetic coil; and a second outlet pipe connected, within the space of any one of the plurality of second electromagnetic coils, to an outlet of the flow path of the second cooling member and extending through the space of the second electromagnetic coil to a region outside the second electromagnetic coil.

9 . The cooling structure for an electromagnetic coil according to claim 8 , wherein the second inlet pipe and the second outlet pipe are connected to the inlet and the outlet, respectively, within the same space of the second electromagnetic coil.

10 . The cooling structure for an electromagnetic coil according to claim 1 , wherein
a junction pipe is connected, by means of a first seal member, to an outer circumference of an end portion, located opposite the cooling member, of the pipe, and the junction pipe is supported, by means of a second seal member, at an outer circumference of an end portion thereof located opposite the cooling member.

11 . The cooling structure for an electromagnetic coil according to claim 1 , wherein
the cooling member is formed of alumina; the pipe is formed of titanium; and the pipe is connected to the cooling member by silver-soldering by means of a metal layer diffusion-formed on a surface of the cooling member.

12 . The cooling structure for an electromagnetic coil according to claim 1 , wherein
the electromagnetic coil comprises a conductor winding formed by winding a strip conductor by a plurality of turns around the predetermined axis, and the cooling member is attached to an end surface, with respect to the direction of the predetermined axis, of the conductor winding.

13 . The electromagnetic actuator comprising a cooling structure for an electromagnet

Assignees

• Ckd Corp
• Nikon Corp

Inventors

• Ito Akihiro
• Kouketsu Masayuki
• Morimoto Shigeru
• Yoshimoto Hiromitsu
• Tanaka Koji

Classifications

• H02K9/22

  by solid heat conducting material embedded in, or arranged in contact with, the stator or rotor, e.g. heat bridges · CPC title

• H01F7/06

  Electromagnets; Actuators including electromagnets {(electric coils H01F5/00; devices for holding workpieces using electric force B23Q3/15; load-engaging elements for lifting articles electromagnetically B66C1/06; electromagnetic couplings F16D27/00; magnetic brakes F16D63/002; electromagnetically operated valves F16K11/24, F16K31/00; analysing materials by magnetic means G01N27/72, G01N27/80; electromagnets for winding mechanical clocks G04C1/02; electromagnetic relays H01H51/00; windings for salient poles of dynamo-electric machines H02K3/18; electromagnets for telegraphic communication H04L; for arc lamps H05B31/28)} · CPC title

• H01F7/08 Primary

  with armatures · CPC title

• H02K9/227 Primary

  Heat sinks · CPC title

• H01F27/16 Primary

  Water cooling · CPC title