Coating compositions for use with an overcoated photoresist

Patent metadata

Field	Value
Publication number	US-2016187778-A1
Application number	US-201514980222-A
Country	US
Kind code	A1
Filing date	Dec 28, 2015
Priority date	Dec 30, 2014
Publication date	Jun 30, 2016
Grant date	—

Abstract

Organic coating compositions, particularly antireflective coating compositions for use with an overcoated photoresist, are provided that comprise that comprise a surface agent of the Formula (I).

where A and B are each independently hydrogen, optionally substituted alkyl or optionally substituted aryl; X and Y are each independently hydrogen, optionally substituted alkyl or optionally substituted carbocyclic aryl; and n is a positive integer. Preferred coating compositions can provide improved pattern collapse margin of an overcoated photoresist layer.

First claim

What is claimed is:

1 . A method for forming a photoresist relief image, comprising:
a) applying on a substrate a layer of a coating composition comprising 1) a matrix polymer; and 2) a surface energy control agent; b) applying a layer of a photoresist composition above the coating composition layer,
wherein the surface energy control agent comprises a structure corresponding to the following Formula (I):

wherein A and B are each independently hydrogen, optionally substituted alkyl or optionally substituted aryl; X and Y are each independently hydrogen, optionally substituted alkyl or optionally substituted carbocyclic aryl; and n is a positive integer.

2 . The method of claim 1 wherein the photoresist composition is imaged with activating radiation and the imaged photoresist composition layer is developed to provide a photoresist relief image.

3 . The method of claim 2 wherein a developer is applied to the imaged photoresist composition layer and unexposed portions of the photoresist layer are removed by the developer.

4 . The method of claim 1 wherein the surface control agent has a number average molecular weight of 300 to 5,000.

5 . The method of claim 1 wherein the coating composition comprises the surface agent in an amount of 1 weight percent to 10 weight percent based on total solid content of the coating composition.

6 . The method of claim 1 wherein the coating composition layer is thermally treated before applying the photoresist composition layer.

7 . A coated substrate comprising:
a substrate having thereon: 1) a coating composition comprising a) a matrix polymer; and b) a surface energy control agent; and 2) a layer of a photoresist composition above the coating composition layer, wherein the surface energy control agent comprises a structure corresponding to the following Formula (I):

wherein A and B are each independently hydrogen, optionally substituted alkyl or optionally substituted aryl;
X and Y are each independently hydrogen, optionally substituted alkyl or optionally substituted carbocyclic aryl; and
n is a positive integer.

8 . A coating composition for use with an overcoated photoresist composition layer, the coating composition comprising:
1) a matrix polymer; 2) a surface energy control agent which is distinct from the matrix polymer and comprising a structure corresponding to the following Formula (I):

wherein A and B are each independently hydrogen, optionally substituted alkyl or optionally substituted aryl;
X and Y are each independently hydrogen, optionally substituted alkyl or optionally substituted carbocyclic aryl; and
n is a positive integer.

9 . The coating composition of claim 8 further comprising a crosslinking agent.

10 . The coating composition of claim 8 wherein the coating composition is formulated with a solvent carrier.

Assignees

• Rohm & Haas Elect Mat

Inventors

• Lee Sun-Jung
• Kang Jihoon
• Hong Dong-Je

Classifications

• A45F4/00

  Travelling or camp articles which may be converted into {other} articles {or into objects} for other use; Sacks or packs carried on the body and convertible into other articles {or into objects for other use} · CPC title

• A41D3/04

  Raincoats · CPC title

• A41D27/22

  Loops or hooks for hanging-up (with locking devices E05B69/00) · CPC title

• G03F7/002 Primary

  using materials containing microcapsules; Preparing or processing such materials, e.g. by pressure; Devices or apparatus specially designed therefor · CPC title

• G03F7/11

  having cover layers or intermediate layers, e.g. subbing layers {(G03F7/091 - G03F7/093, B41N3/03 take precedence)} · CPC title