Aerostatic bearing
US-9739305-B2 · Aug 22, 2017 · US
US2016186804A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016186804-A1 |
| Application number | US-201414582648-A |
| Country | US |
| Kind code | A1 |
| Filing date | Dec 24, 2014 |
| Priority date | Dec 24, 2014 |
| Publication date | Jun 30, 2016 |
| Grant date | — |
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An example method includes: for a component supported by an air bearing, detecting a speed of movement of the component relative to a predefined location, the air bearing generating an air flow to elevate the component relative to a ground plane; and controlling the air bearing based, at least in part, on the speed detected.
Opening claim text (preview).
What is claimed is: 1 . A method comprising: for a component supported by an air bearing, detecting a speed of movement of the component relative to a predefined location, the air bearing generating an air flow to elevate the component relative to a ground plane; and controlling the air bearing based, at least in part, on the speed detected. 2 . The method of claim 1 , further comprising: determining that the speed of movement of the component is greater than a threshold; and determining that the component is within a geographic area associated with the predefined location; wherein controlling the air bearing comprises reducing an air flow of the air bearing so as to reduce the speed of movement of the component. 3 . The method of claim 2 , further comprising restricting a rate at which the air flow is reduced. 4 . The method of claim 1 , further comprising: determining that the speed of movement of the component is less than a threshold; and determining that the component is within a geographic area associated with the predefined location; wherein controlling the air bearing comprises maintaining an air flow of the air bearing so as to maintain the speed of movement of the component. 5 . The method of claim 1 , further comprising: determining that the speed of movement of the component is greater than a threshold; and determining that the component is within a geographic area associated with the predefined location; wherein controlling the air bearing comprises maintaining an air flow of the air bearing so as to maintain the speed of movement of the component. 6 . The method of claim 1 , further comprising: detecting a position of the component relative to the predefined location; and controlling the air bearing based also on the position. 7 . The method of claim 6 , wherein the position is detected relative to a mat having position markers. 8 . The method of claim 7 , wherein the position markers comprise concentric shapes having pitches that decrease at increasing distances from a center. 9 . The method of claim 7 , wherein the position markers are detected optically. 10 . The method of claim 6 , wherein the position is detected using radio frequency detection, where a transmitter is at the component and a receiver is at the location or where a receiver is at the component and a transmitter is at the location. 11 . The method of claim 6 , wherein the position is detected using ultrasound. 12 . The method of claim 6 , wherein the position is detected using a tether and a potentiometer, or tethers and potentiometers, the tether or tethers being connected to the component and being configured to move with the component; wherein a length of the tether corresponds to resistance measured by the potentiometer, the position being based on the length of the tether, or wherein lengths of the tethers correspond to resistances measured by the potentiometers, the position being based on the lengths of the tethers. 13 . The method of claim 6 , wherein the position is detected using a global positioning system. 14 . A system comprising: a component; an air bearing supporting the component, the air bearing being configured to generate an air flow to elevate the component relative to a ground plane; a detector to detect a speed of movement of the component on the air bearing; and a controller to output signals for controlling the air bearing based, at least in part, on the speed detected. 15 . The system of claim 14 , wherein the controller is configured to perform operations comprising: determining that the speed of movement of the component is greater than a threshold; and determining that the component is within a geographic area associated with the predefined location; wherein controlling the air bearing comprises reducing an air flow of the air bearing so as to reduce the speed of movement of the component. 16 . The system of claim 15 , wherein controlling the air bearing comprises restricting a rate at which the air flow is reduced. 17 . The system of claim 14 , wherein the controller is configured to perform operations comprising: determining that the speed of movement of the component is less than a threshold; and determining that the component is within a geographic area associated with the predefined location; wherein controlling the air bearing comprises modulating air flow of the air bearing so as to reduce the speed of movement of the component by allowing a braking surface to contact the supporting surface. 18 . The system of claim 14 , wherein the controller is configured to perform operations comprising: determining that the speed of movement of the component is greater than a threshold; and determining that the component is within a geographic area associated with the predefined location; wherein controlling the air bearing comprises modulating air flow of the air bearing so as to reduce the speed of movement of the component by allowing a braking surface to contact the supporting surface. 19 . The system of claim 14 , wherein the controller is configured to perform operations comprising: detecting a position of the component relative to the predefined location; and controlling the air bearing based also on the position. 20 . The system of claim 19 , wherein the position is detected relative to a mat having position markers. 21 . The system of claim 19 , wherein the position markers comprise concentric shapes having pitches that decrease at increasing distances from a center. 22 . The system of claim 19 , wherein the detector comprises an optical detector to detect the position markers optically. 23 . The system of claim 19 , wherein the detector comprises a radio frequency detector to detect a position using radio frequency detection, where a transmitter is at the component and a receiver is at the location or where a receiver is at the component and a transmitter is at the location. 24 . The system of claim 19 , wherein the detector comprises an ultrasound detector. 25 . The system of claim 19 , wherein the detector comprises a tether and a potentiometer, or tethers and potentiometers, the tether or tethers being connected to the component and being configured to move with the component; wherein a length of the tether corresponds to resistance measured by the potentiometer, the position being based on the length of the tether, or wherein lengths of the tethers correspond to resistances measured by the potentiometers, the position being based on the lengths of the tethers. 26 . The system of claim 19 , wherein the detector comprises a global positioning system. 27 . An apparatus comprising: a test head manipulator configured to hold a test head; and an air bearing mounted to a bottom of the test head manipulator adjacent to a ground plane, the air bearing being configured to generate air flow towards the ground plane resulting in force that causes the test head manipulator to lift off of the ground plane and to maintain an elevation relative to the ground plane; wherein the elevation of the test head manipulator relative to the ground plane enables movement of the test head manipulator relative to, and above, the ground plane. 28 . The apparatus of claim 27 , wherein the test head manipulator is configured to mate the test head to a prober or t
Devices characterised by the use of mechanical means · CPC title
using optical means, i.e. using infrared, visible, or ultraviolet light (G01P3/80 takes precedence {; by reflection of waves G01S17/58}) · CPC title
using electric or magnetic means (G01P3/80 takes precedence; measuring short time intervals G04F8/00, G04F10/00) · CPC title
the gas being supplied under pressure, e.g. aerostatic bearings · CPC title
delivered by photo-electric detectors · CPC title
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