Imprint method, and imprint apparatus for implementing the same

Patent metadata

Field	Value
Publication number	US-2016185019-A1
Application number	US-201615063909-A
Country	US
Kind code	A1
Filing date	Mar 8, 2016
Priority date	Mar 29, 2011
Publication date	Jun 30, 2016
Grant date	—

Abstract

An imprint method includes, in the peeling step of peeling a mold off the material layer to be transferred, a region-of-contact recognition operation of recognizing and determining a region of contact of the mold with the material layer to be transferred, a center-of-gravity locating operation of determining a center of gravity of a morphology of the thus recognized region of contact on the basis of that morphology, and a peeling operation of determining a point of force for applying peeling force to the mold or the imprinting substrate in relation to the center of gravity determined by the center-of-gravity locating operation, thereby acting the peeling force on the point of force.

First claim

What is claimed is:

1 . An imprint apparatus, comprising:
a mold holder for holding a mold in place, a substrate holder for holding an imprinting substrate in place, a region-of-contact measuring instrument for recognizing and determining a region of contact with said mold of a material or material layer to be transferred that is interposed between a surface of the mold having an concavo-convex structure region and the imprinting substrate, and a data processing unit operable to execute computation and command tasks for controlling a state of the mold being peeled off the material layer to be transferred, wherein: said data processing unit comprises a center-of-gravity computation portion for determining a center of gravity of a region of contact recognized by said region-of-contact measuring instrument, and a point-of-force computation portion for determining a point of force for applying peeling force to the mold or the imprinting substrate.

2 . An imprint apparatus as recited in claim 1 , wherein said mold holder or said substrate holder includes a peeler, wherein said peeler is operable to apply the peeling force to said point of force.

Assignees

• Dainippon Printing Co Ltd

Inventors

• Aritsuka Yuki
• Nakata Naoko

Classifications

• B29C43/58 Primary

  Measuring, controlling or regulating {(for bank adjustment in calendering B29C43/245)} · CPC title

• B29C2043/5833

  movement of moulds or mould parts, e.g. opening or closing, actuating · CPC title

• G03F7/0002 Primary

  Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping · CPC title

• B05D3/12

  by mechanical means · CPC title

• G03F7/027

  Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds (G03F7/075 takes precedence) · CPC title