Command data generation method, positioning apparatus, lithography apparatus, and article manufacturing method
US-2015378342-A1 · Dec 31, 2015 · US
US2016179079A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016179079-A1 |
| Application number | US-201514975126-A |
| Country | US |
| Kind code | A1 |
| Filing date | Dec 18, 2015 |
| Priority date | Dec 22, 2014 |
| Publication date | Jun 23, 2016 |
| Grant date | — |
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A method for operating a technical system, an apparatus and method for determining a movement profile, control apparatus and the actual technical system that includes at least one drive to move at least one axis, wherein at least one optimized movement profile of the axis is calculated with the aid of an optimization method that calculates an optimized movement profile with reference to preset points of a movement profile and/or preset regions of the movement profile, where for simplified and particularly understandable use, the optimization method includes physical boundary conditions from the start of the optimization method, where the use and initialization of the technical system by the user is made more understandable, for example, and where the optimized movement profile is used to control the at least one drive of the technical system.
Opening claim text (preview).
What is claimed is: 1 . A method for operating a technical system comprising at least one drive to move at least one movable axis, the method comprising: calculating at least one optimized movement profile of the at least one movable axis via the optimization method, the optimization method including physical boundary conditions and calculating the optimized movement profile with reference to at least one of preset points of a movement profile and preset regions of the movement profile; and controlling the at least one drive of the technical system via the optimized movement profile. 2 . The method as claimed in claim 1 , wherein the optimization method is configured to at least one of (i) minimize energy consumption of the at least one electric drive, (ii) minimize a time for one pass of the movement profile, and (iii) reduce vibrations in the technical system. 3 . The method as claimed in claim 1 , wherein the technical system comprises at least one second drive to move at least one second movable axis. 4 . The method as claimed in claim 2 , wherein the technical system comprises at least one second drive to move at least one second movable axis. 5 . The method as claimed in claim 3 , wherein the second movable axis is moved in accordance with a second movement profile; and wherein the first movement profile and the second movement profile are interlinked. 6 . The method as claimed in claim 1 , wherein at least one of (i) the movement profile and (ii) the optimized movement profile comprises a cam function. 7 . The method as claimed in claim 3 , wherein an optimized movement profile is calculated for both the movable axis and the at least one second movable axis of the technical system. 8 . The method as claimed in claim 1 , wherein the optimization method calculates an optimized movement profile in a plurality of passes from at least one of (i) preset points and (ii) preset regions of a movement profile; and wherein, after each pass of the optimization method, the movement profile is displayed by a visualization mechanism of the technical system. 9 . The method as claimed in claim 2 , wherein construction-related loss parameters of the drive are included as boundary conditions to calculate an optimized movement profile with reference to the minimization of the energy consumption. 10 . The method as claimed in claim 8 , wherein the loss parameters are depicted on the visualization mechanism. 11 . The method as claimed in claim 1 , wherein the optimization method comprises at least one of a Newton method, an Sequential quadratic programming method, a Lagrange-Newton method, a Runge-Kutta method and a simplex method. 12 . An apparatus for determining a movement profile or a plurality of interlinked movement profiles, the apparatus comprising: a computing unit; a visualization mechanism; and at least one of (i) at least one interface for connection to at least one drive and (ii) an interface to connect the apparatus to a technical system; wherein the apparatus is configured to: calculate at least one optimized movement profile of at least one movable axis via an optimization method, the optimization method including physical boundary conditions and calculating the optimized movement profile with reference to at least one of preset points of a movement profile and preset regions of the movement profile; and control the at least one drive of the technical system via the optimized movement profile. 13 . A control apparatus for a technical system, said control apparatus calculating at least one optimized movement profile for one of (i) a movable axis and (ii) a plurality of interlinked optimized movement profiles, and a plurality of movable axes, the control apparatus comprising: at least one optimization method which calculates the at least one optimized movement profile with reference to at least one of (i) preset points of a movement profile and (ii) preset regions of the movement profile; wherein physical boundary conditions are included in the optimization method; and wherein the at least one optimized movement profile sets movement of at least one drive in a technical system. 14 . The control apparatus as claimed in claim 12 , wherein the optimization method for optimizing the movement profile at least one of (i) minimizes energy consumption of at least one electric drive of the technical system, (ii) minimizes a time for a pass of the movement profile and (iii) reduces vibrations in the technical system. 15 . A technical system comprising: at least one of: (i) an apparatus for determining a movement profile or a plurality of interlinked movement profiles, comprising: a computing unit; a visualization mechanism; and at least one of (i) at least one interface for connection to a at least one drive and (ii) an interface; wherein the apparatus is configured to: calculate at least one optimized movement profile of at least one movable axis via an optimization method, the optimization method including physical boundary conditions and calculating an optimized movement profile with reference to at least one of preset points of a movement profile and preset regions of the movement profile; and control the at least one drive via the optimized movement profile; and (ii) a control apparatus which calculates the at least one optimized movement profile for one of (i) the movable axis and (ii) the plurality of interlinked optimized movement profiles, and a plurality of movable axes, the control apparatus comprising: at least one optimization method which calculates the at least one optimized movement profile with reference to at least one of (i) the preset points of the movement profile and (ii) the preset regions of the movement profile; wherein physical boundary conditions are included in the optimization method of the control apparatus; and wherein the at least one optimized movement profile sets movement of at least one drive. 16 . A non-transitory computer program product encoded with a computer program executed by a computing unit which operates a technical system comprising at least one drive to move at least one axis, the computer program comprising: program code for calculating at least one optimized movement profile of the at least one axis via the optimization method, the optimization method including physical boundary conditions and calculating the optimized movement profile with reference to at least one of preset points of a movement profile and preset regions of the movement profile; and program code for controlling the at least one drive of the technical system via the optimized movement profile. 17 . The control apparatus of claim 12 , wherein the movement profile comprises a cam function. 18 . The apparatus of claim 11 , wherein the movement profile comprises a cam function. 19 . The technical system of claim 12 , wherein the movement profile comprises a cam function.
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characterised by control of velocity, acceleration or deceleration (G05B19/19 takes precedence) · CPC title
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characterised by using design data to control NC machines, e.g. CAD/CAM (G05B19/4093 takes precedence) · CPC title
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