Method of forming a multi-layered structure of alternating conducting and non-conducting layers

Patent metadata

Field	Value
Publication number	US-2016177432-A1
Application number	US-201615056205-A
Country	US
Kind code	A1
Filing date	Feb 29, 2016
Priority date	Oct 23, 2012
Publication date	Jun 23, 2016
Grant date	—

Abstract

One aspect relates to a method for producing a layered structure, comprising at least the following steps: Providing a substrate, applying a first liquid onto at least part of the substrate, drying the first liquid forming a first layer, applying a second liquid onto at least part of the first layer, drying the second liquid forming a second layer, whereby either the substrate and the second layer are electrically conductive and the first layer is insulating or whereby the substrate and the second layer are insulating and the first layer is electrically conductive.

First claim

What is claimed is:

1 . A method for producing a layered structure comprising:
providing a substrate; applying a first liquid onto at least part of the substrate; drying the first liquid forming a first layer; applying a second liquid onto at least part of the first layer; drying the second liquid forming a second layer; wherein the substrate and the second layer are electrically conductive and the first layer is insulating or the substrate and the second layer are insulating and the first layer is electrically conductive.

2 . The method of claim 1 , wherein steps applying a first liquid, drying the first liquid, applying a second liquid and drying the second liquid are repeated at least once.

3 . The method of claim 1 , wherein the ratio of the surface areas of second layer to first layer is less than one.

4 . The method of claim 1 , wherein the at least one insulating layer comprises at least one compound selected from a group consisting of TiO 2 , SiO 2 , TiO 2 , SiO 2 , Ta 2 O 5 , ZrO 2 , Al 2 O 3 or a mixture of at least two of these.

5 . The method of claim 1 , wherein the at least one electrically conductive layer comprises at least one compound selected from the group consisting of indium-tin oxide, antimony-tin oxide, aluminum-zinc oxide, a metal and a metal alloy or a mixture of at least two of these.

6 . The method of claim 1 , wherein the substrate is selected from a group consisting of glass, TiO 2 , SiO 2 , Ti 2 O 3 , Ta 2 O 5 , ZrO 2 , a steel, a CoCr alloy, a NiCoCrMo alloy, Pt, Au, Ag, W, Ir, Ti, Nb, Ta, a NiTi alloy or a mixture of at least two of these.

7 . The method of claim 1 , wherein the drying of the first liquid or second liquid or both liquids is carried out, in each case, at a temperature from 50 to 500° C.

8 . The method of claim 1 , further comprising providing the substrate with a sheet resistance of less than 10 kΩ.

9 . The method of claim 1 , wherein the drying of the first liquid or second liquid or both liquids is carried out such that the thickness of at least one of the layers after drying is in a range from 0.05 to 10 μm.

10 . The method of claim 1 , wherein producing the layered structure includes applying only biocompatible materials as the substrate and the first liquid or second liquid.

11 . The method of claim 1 further comprising coupling a sensor to the substrate and to the second layer and measuring a change of the electrical potential between the substrate and the second layer.

12 . A method for producing a layered structure comprising:
providing a cylindrical tube substrate; applying a first liquid onto the substrate; drying the first liquid forming a first layer; applying a second liquid onto the first layer; drying the second liquid forming a second layer; wherein the substrate and the second layer are electrically conductive and the first layer is insulating or the substrate and the second layer are insulating and the first layer is electrically conductive.

13 . The method of claim 12 , wherein the first and second liquids are applied such that the first layer completely separates the second layer from the substrate.

14 . The method of claim 13 further comprising coupling a sensor to the substrate and to the second layer and measuring a change of the electrical potential between the substrate and the second layer.

15 . The method of claim 12 , wherein applying the first liquid onto the substrate comprises immersing the substrate partly in an immersion bath comprising the first liquid.

16 . The method of claim 15 , wherein the immersion rate is at least 2 mm/s, the immersion time is at least 10 s, and the drawing rate is at least 7 mm/sec.

17 . The method of claim 15 further comprising, subsequent to the immersing, excess of liquid is allowed to drip off for at least 10 seconds and dried.

18 . The method of claim 12 , wherein applying the second liquid onto the first layer comprises immersing the substrate with first layer partly in an immersion bath of the second liquid.

19 . The method of claim 18 , wherein the immersion rate is at least 2 mm/s, the immersion time is at least 10 s, and the drawing rate is at least 7 mm/sec.

20 . The method of claim 18 further comprising, subsequent to the immersing, excess of liquid is allowed to drip off for at least 10 seconds and dried.

Assignees

• Heraeus Deutschland Gmbh & Co Kg

Inventors

• Asal Murad Abu
• Keitel Oliver
• Schibli Stefan
• Reisinger Andreas

Classifications

• C23C18/06 Primary

  Coating on selected surface areas, e.g. using masks · CPC title

• C23C2/26 Primary

  After-treatment (C23C2/14 takes precedence) · CPC title

• C23C18/1225

  Deposition of multilayers of inorganic material · CPC title

• C23C18/1241

  Metallic substrates · CPC title

• Y10T428/265

  1 mil or less · CPC title