Graphene and polymer-free method for transferring cvd grown graphene onto hydrophobic substrates

Patent metadata

Field	Value
Publication number	US-2016176162-A1
Application number	US-201514968264-A
Country	US
Kind code	A1
Filing date	Dec 14, 2015
Priority date	Dec 19, 2014
Publication date	Jun 23, 2016
Grant date	—

Abstract

Described herein are methods for improved transfer of graphene from formation substrates to target substrates. In particular, the methods described herein are useful in the transfer of high-quality chemical vapor deposition-grown monolayers of graphene from metal, e.g., copper, formation substrates via non-polymeric methods. The improved processes provide graphene materials with less defects in the structure.

First claim

What is claimed is:

1 . A process comprising:
a. forming a graphene layer having a pristine surface and a non-pristine surface on a formation substrate, wherein the pristine surface is the surface in contact with the formation substrate; b. transferring a graphene layer formed on a formation substrate to a target substrate by:
i. contacting the non-pristine surface of the graphene layer with the target substrate with sufficient force to adhere the graphene to the target substrate, and
ii. separating the formation substrate and target substrate,
wherein the target substrate comprises a material having a hydrophobic surface having a contact angle of from about 90° to about 150°; and wherein, after transferring, the pristine surface of the graphene layer has less than 5 atom % organic impurities.

2 . The process of claim 1 , wherein the target substrate comprises an inorganic material.

3 . The process of claim 1 , wherein the inorganic material comprises a thermally or chemically tempered glass, or a flexible glass substrate having a thickness less than or equal to about 0.5 mm.

4 . The process of claim 1 , wherein the contacting step comprises pressing the formation substrate and the target substrates together at a pressure greater than 100 psi.

5 . The process of claim 1 , wherein the separating step comprises etching the formation substrate.

6 . The process of claim 1 , wherein the hydrophobic surface of the target substrate is created via a chemical, thermal, physical, or electrical method.

7 . The process of claim 1 , wherein the hydrophobic surface comprises a organic coating on the target substrate.

8 . The process of claim 7 , wherein the organic coating comprises a silane.

9 . The process of claim 1 , the process further comprising the step of chemically modifying the target substrate.

10 . The process of claim 9 , wherein the target substrate comprises an inorganic material.

11 . The process of claim 10 , wherein the inorganic material comprises a glass, glass ceramic, or ceramic.

12 . The process of claim 11 , wherein the inorganic material comprises a thermally or chemically tempered glass, or a flexible glass substrate having a thickness less than or equal to about 0.5 mm.

13 . The process of claim 9 , wherein the hydrophobic surface comprises a polymer coating on the target substrate.

14 . The process of claim 13 , wherein the polymer coating comprises a silane.

15 . The process of claim 9 , further comprising the step of cleaning the target substrate prior to chemically modifying the target substrate.

16 . The process of claim 15 , wherein cleaning comprises one or more of the following:
a. cleaning with an O 2 plasma treatment; b. cleaning with an aqueous H 2 O 2 and NH 4 OH solution; or c. cleaning with an aqueous H 2 O 2 and HCl solution.

17 . An article comprising:
a. a glass, glass ceramic, or ceramic substrate comprising at least one chemically-modified, hydrophobic surface having a contact angle of from about 90° to about 150°; b. a graphene layer comprising a pristine surface having less than 5 atom % organic impurities and a non-pristine surface; and wherein the hydrophobic surface and the non-pristine surface contact each other.

18 . The article of claim 17 , wherein the hydrophobic surface comprises an organic coating.

19 . The article of claim 17 , wherein the substrate is a glass.

20 . The article of claim 17 , wherein the graphene layer has a coverage level of about 10% or greater.

Assignees

• Corning Inc

Inventors

• Johnson Benedict Yorke
• Mazumder Prantik
• Soni Kamal Kishore

Classifications

• B32B17/06 Primary

  comprising glass as the main or only constituent of a layer, next to another layer of a specific {material} · CPC title

• B32B9/007

  comprising carbon, e.g. graphite, composite carbon · CPC title

• B32B37/18

  involving the assembly of discrete sheets or panels only · CPC title

• B32B18/00

  Layered products essentially comprising ceramics, e.g. refractory products · CPC title

• C01B32/194

  After-treatment · CPC title