Components for a chemical mechanical polishing tool

Patent metadata

Field	Value
Publication number	US-2016176016-A1
Application number	US-201514947802-A
Country	US
Kind code	A1
Filing date	Nov 20, 2015
Priority date	Dec 19, 2014
Publication date	Jun 23, 2016
Grant date	—

Abstract

A component in a CMP tool disclosed herein having a surface and a hydrophobic layer deposited on the surface. In one example, the component is a component for delivering a fluid in a CMP tool. The component for delivering a fluid in a CMP tool includes an elongated member having a first end and a second end, and an elongated upper surface extending between the two ends. A hydrophobic layer is deposited on the elongated upper surface. In another example, the component is a ring shaped body having an upper side and a lower side. A hydrophobic layer is deposited on the inner surfaces of both the upper and lower sides. In another example, the component is a disk shaped body having a top surface, bottom surface, and ledge defined by the top and bottom surfaces. A hydrophobic layer is deposited on the surfaces and the ledge.

First claim

What is claimed is:

1 . A component for a CMP tool, the component comprising:
a body having a surface that will be exposed to a polishing fluid when the CMP tool is polishing a substrate; and a hydrophobic layer disposed on the surface of the body, the hydrophobic layer having a fluid contact angle of at least 90°.

2 . The component of claim 1 , wherein the hydrophobic layer has a thickness of at least 400 nm.

3 . The component of claim 1 , wherein the component is a component for delivering a fluid in a CMP tool, the component for delivering a fluid in a CMP tool comprising:
an elongated member, wherein the elongated member further comprises:
a first end;
a second end;
an elongated upper surface extending between the first end and the second end; and
a hydrophobic layer disposed on the elongated upper surface of the elongated member, the hydrophobic layer having a contact angle of at least 90° when a fluid contacts a portion of the elongated member.

4 . The component of claim 3 , wherein the elongated member is a fluid delivery arm.

5 . The component of claim 3 , wherein the elongated member is a pad conditioning arm.

6 . The component of claim 3 , wherein the elongated member is an arm cover.

7 . The component of claim 6 , wherein the thickness of the hydrophobic layer is at least 1600 nm.

8 . The component of the claim 3 , wherein the contact angle is 140°.

9 . A component for a CMP tool, the component comprising:
a ring shaped body, wherein the ring shaped body is defined by a lower side and an upper side, the lower side further comprising:
a lower edge;
an upper edge, wherein the upper edge extends towards the upper side;
an outer surface having an outer diameter;
an inner surface having an inner diameter, wherein the inner diameter is less than the outer diameter, the outer surface and the inner surface concentric about a central axis; and
a first hydrophobic layer disposed on the inner surface of the lower side, the first hydrophobic layer having a contact angle of at least 90° when a fluid contacts a portion of the inner surface of the lower side;
the upper side further comprising:
a lower edge, wherein the lower edge is integral with the upper edge of the lower side;
an upper edge, wherein the upper edge extends radially inward from the inner edge of the upper surface in an upwards direction;
an outer surface having an outer diameter, wherein the outer diameter of the upper side is less than the outer diameter of the lower side;
an inner surface having an inner diameter, wherein the inner diameter of the upper side is less than the inner diameter of the lower side; and
a second hydrophobic layer disposed on the inner surface of the upper side, the second hydrophobic layer having a contact angle of at least 90° when a fluid contacts a portion of the inner surface of the upper side.

10 . The component of claim 9 wherein the second hydrophobic layer has a contact angle of 140°.

11 . The component of claim 9 wherein the second hydrophobic layer has a thickness of at least 400 nm.

12 . The component of claim 11 , wherein the thickness of the second hydrophobic layer is 1600 nm.

13 . The component of claim 9 wherein the first hydrophobic layer has a contact angle of 140°.

14 . The component of claim 9 wherein the first hydrophobic layer has a thickness of at least 400 nm.

15 . The component of claim 14 wherein the thickness of the first hydrophobic layer is 1600 nm.

16 . A component in a CMP tool, the component comprising:
a disk shaped body, the disk shaped body further comprising:
a top surface;
a bottom surface, wherein the bottom surface is substantially parallel to the top surface;
an outer wall, the outer wall perpendicular to the bottom surface, wherein the outer wall further comprises:
an outer diameter;
a first end, the first end of the outer wall integral with the bottom surface; and
a second end opposite the first end;

an inner wall, the inner wall perpendicular to the top surface, wherein the inner wall further comprises:
an inner diameter, wherein the inner diameter is less than the outer diameter;
a first end; and
a second end, the second end of the inner wall integral with the top surface;

a ledge defined by the outer wall and the inner wall, the ledge perpendicular to the outer wall and the inner wall, wherein the ledge has a first end and a second end, the first end of the ledge integral to the second end of the outer wall, the second end of the ledge radially inward from the first end of the ledge, the second end of the ledge integrally connected with the first end of the outer wall, the second end of the outer wall radially inward from the first end of the outer wall, towards the top surface; and
a hydrophobic layer deposited on the disk shaped body, the hydrophobic layer having a contact angle of at least 90° when a fluid contacts a portion of disk shaped body.

17 . The component of claim 16 wherein the hydrophobic layer has a contact angle of 140°.

18 . The component of claim 16 wherein the hydrophobic layer has a thickness of at least 400 nm.

19 . The component of claim 18 wherein the thickness of the hydrophobic layer is 1600 nm.

20 . The component of claim 16 , wherein the hydrophobic layer has a contact angle between 90° and 140°.

Assignees

• Applied Materials Inc

Inventors

• Attur Sreenidhi

Classifications

• B24B53/017 Primary

  Devices or means for dressing, cleaning or otherwise conditioning lapping tools · CPC title

• B24B37/34

  Accessories · CPC title

• B24B37/32 Primary

  Retaining rings · CPC title

• B24B57/02

  for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents · CPC title

• H10P52/00

  Grinding, lapping or polishing of wafers, substrates or parts of devices · CPC title