Process for making pmr writer with non-conformal side gaps

Patent metadata

Field	Value
Publication number	US-2016171992-A1
Application number	US-201615053211-A
Country	US
Kind code	A1
Filing date	Feb 25, 2016
Priority date	Aug 14, 2013
Publication date	Jun 16, 2016
Grant date	—

Abstract

A process for manufacturing a PMR writer main pole with non-conformal side gaps is provided. The process may include depositing a stitch layer comprising a magnetic material and a second stich layer material over a substrate, forming an air-bearing surface (ABS) region in a first damascene material, and forming a yoke region in a second damascene material. The first damascene material may include Aluminium Oxide (Al2O3). The second damascene material may include Silicon Dioxide (SiO2). Side gap regions may include SiO2.

First claim

What is claimed is:

1 . A hard disk drive, comprising:
at least one rotatable disk having a disk surface; a disk drive base; a spindle motor attached to the disk drive base and configured to support the disk for rotating the disk with respect to the disk drive base surface; and a PMR writer main pole configured to magnetically record data on the rotatable disk surface, the PMR writer main pole comprising:
an air-bearing surface (ABS) region;
a yoke region comprising Silicon Dioxide (SiO2); and
non-conformal side gaps comprising SiO2.

2 . The hard disk drive of claim 1 , wherein the air bearing surface comprises Aluminium Dioxide (Al2O3).

3 . The hard disk drive of claim 2 , wherein the yoke region is between 100 nm and 600 nm behind the ABS.

4 . The hard disk drive of claim 2 , wherein the PMR writer main pole further comprises side shields.

5 . The hard disk drive of claim 4 , wherein the side shields comprise Cobalt-Iron (CoFe) or Cobalt-Nickle-Iron (CoNiFe).

6 . The hard disk drive of claim 4 , wherein the side gap increases with the side shield throat height.

7 . The hard disk of claim 6 , wherein a non-conformal side gap varies in width between 10 nm and 80 nm from the ABS region to the yoke region.

8 . The hard disk drive of claim 7 , wherein the PMR writer main pole comprises a plurality of throat regions, and wherein the non-conformal side gap width has a different width variation in each of the throat regions.

9 . The hard disk drive of claim 6 wherein the side shields are plated over a seed layer comprising Ruthenium

10 . The hard disk drive of claim 2 , wherein the PMR writer main pole further comprises a PMR pole layer comprising Cobalt-Iron (CoFe) or Cobalt-Nickle-Iron (CoNiFe).

11 . A PMR writer main pole configured to magnetically record data on a rotatable disk surface, the PMR writer main pole comprising:
an air-bearing surface (ABS) region; a yoke region comprising Silicon Dioxide (SiO2); and non-conformal side gaps comprising SiO2.

12 . The PMR writer main pole of claim 11 , wherein the air bearing surface comprises Aluminium Dioxide (Al2O3).

13 . The PMR writer main pole of claim 12 , wherein the yoke region is between 100 nm and 600 nm behind the ABS.

14 . The PMR writer main pole of claim 12 , wherein the PMR writer main pole further comprises side shields.

15 . The PMR writer main pole of claim 14 , wherein the side shields comprise Cobalt-Iron (CoFe) or Cobalt-Nickle-Iron (CoNiFe).

16 . The PMR writer main pole of claim 14 , wherein the side gap increases with the side shield throat height.

17 . The PMR writer main pole of claim 16 , wherein a non-conformal side gap varies in width between 10 nm and 80 nm from the ABS region to the yoke region.

18 . The PMR writer main pole of claim 17 , wherein the PMR writer main pole comprises a plurality of throat regions, and wherein the non-conformal side gap width has a different width variation in each of the throat regions.

19 . The PMR writer main pole of claim 16 wherein the side shields are plated over a seed layer comprising Ruthenium.

20 . The PMR writer main pole of claim 12 , wherein the PMR writer main pole further comprises a PMR pole layer comprising Cobalt-Iron (CoFe) or Cobalt-Nickle-Iron (CoNiFe).

Assignees

• Western Digital Fremont Llc

Inventors

• Zhang Jinqiu
• Liu Feng
• Yang Xiaoyu
• Jiang Ming
• Zhou Xiaotian
• Ma Zeyu
• Sun Hai

Classifications

• G11B5/6082

  Design of the air bearing surface · CPC title

• H10P76/202

  for lift-off processes · CPC title

• H10P50/667

  by liquid etching only · CPC title

• H10P50/71

  using masks for conductive or resistive materials · CPC title

• G11B5/3116

  Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks (G11B5/3113, G11B5/245 take precedence) · CPC title