Capacitive pressure sensor

Patent metadata

Field	Value
Publication number	US-2016169759-A1
Application number	US-201414892355-A
Country	US
Kind code	A1
Filing date	Nov 25, 2014
Priority date	Nov 25, 2013
Publication date	Jun 16, 2016
Grant date	—

Abstract

Provided is a capacitive pressure sensor that prevents the position of an electrode face in the direction parallel to a diaphragm from deviating from the position of the diaphragm, and accurately measures pressure. The capacitive pressure sensor includes: the diaphragm that deforms under pressure; an electrode member having the electrode face opposed to the diaphragm with a gap between the diaphragm and the electrode face; a body having one end to which the diaphragm is joined, and accommodating at least a portion of the electrode member; an insulating positioning member that is provided in the body and positions at least the portion of the electrode member in the body; and a pressing mechanism that holds and presses the insulating positioning member or the electrode member in the direction parallel to the diaphragm.

First claim

1 . A capacitive pressure sensor comprising:
a diaphragm that deforms under pressure; an electrode member having an electrode face opposed to the diaphragm with a gap between the diaphragm and the electrode face; a body having one end to which the diaphragm is joined, and accommodating at least a portion of the electrode member; an insulating positioning member that is provided in the body, and positions at least the portion of the electrode member in the body; and a pressing mechanism that is configured to hold and press the insulating positioning member or the electrode member in a direction parallel to the diaphragm.

2 . The capacitive pressure sensor according to claim 1 ,
wherein the pressing mechanism includes a position adjuster that has a pressed surface to which a force is to be applied in a direction vertical to the diaphragm, and a contact surface that is in contact with the insulating positioning member, and with which the insulating positioning member is to be pressed in a direction oblique to the diaphragm.

3 . The capacitive pressure sensor according to claim 2 ,
wherein the contact surface is an inclined face inclined relative to the pressed surface.

4 . The capacitive pressure sensor according to claim 2 ,
wherein the position adjuster is substantially ring-shaped, and has a top surface that is the pressed surface and an inner peripheral surface that is the contact surface.

5 . The capacitive pressure sensor according to claim 2 ,
wherein the pressing mechanism further includes a pressing plate that is in contact with the pressed surface and screwed to the body in the direction vertical to the diaphragm.

6 . The capacitive pressure sensor according to claim 1 ,
wherein the electrode member includes: a fixed electrode fixed to the insulating positioning member, and having the electrode face; a signal extraction electrode fixed with an insulating seal sealing the other end of the body; and a flexible connection member that electrically connects the fixed electrode and the signal extraction electrode.

Assignees

• Horiba Stec Co Ltd

Inventors

• Kishida Sotaro
• Hataita Takehisa
• Kuwahara Akira

Classifications

• G01L9/0072 Primary

  using variations in capacitance · CPC title

• G01L19/04

  Means for compensating for effects of changes of temperature {, i.e. other than electric compensation} · CPC title

• G01L19/147

  Details about the mounting of the sensor to support or covering means · CPC title

• G01L19/0084

  to the outside of the housing (other details about the housing see G01L19/14) · CPC title