Method for producing mold for minute pattern transfer, method for producing diffraction grating using the same, and method for producing organic el element including the diffraction grating

Patent metadata

Field	Value
Publication number	US-2016161647-A1
Application number	US-201615041764-A
Country	US
Kind code	A1
Filing date	Feb 11, 2016
Priority date	Jan 14, 2011
Publication date	Jun 9, 2016
Grant date	—

Abstract

A method for producing a mold includes: applying a block copolymer solution made of first and second polymers on a base member; performing a first annealing process at a temperature higher than Tg of the block copolymer after drying the coating film; forming a concavity and convexity structure on the base member by removing the second polymer by an etching process; performing a second annealing process of the concavity and convexity structure at a temperature higher than Tg of the first polymer; forming a seed layer on the structure; laminating or stacking a metal layer on the seed layer by an electroforming; and peeling off the metal layer from the base member. The second annealing process enables satisfactory transfer of a concavity and convexity structure on the base member onto the metal layer.

First claim

What is claimed is:

1 . A mold for minute pattern transfer produced by a producing method, the producing method comprising
a step of applying a block copolymer solution made of at least a first polymer and a second polymer on a surface of a base member; a step of drying a coating film on the base member; a first heating step for heating the coating film after the drying at a temperature higher than a glass transition temperature of a block copolymer of the block copolymer solution; an etching step for etching the coating film after the first heating step to remove the second polymer so that a concavity and convexity structure is formed on the base member; a second heating step for heating the concavity and convexity structure at a temperature higher than a glass transition temperature of the first polymer; a step of forming a seed layer on the concavity and convexity structure after the second heating step; a step of or stacking a metal layer on the seed layer by an electroforming; and a step of peeling off the base member having the concavity and convexity structure from the metal layer and the seed layer.

2 . A diffraction grating comprising a concavity and convexity structure on a surface thereof,
wherein the diffraction grating is produced by a method comprising: pressing the mold obtained by the method for producing the mold as defined in claim 1 to a transparent substrate to which a curable resin has been applied; curing the curable resin; and detaching the mold from the transparent substrate to obtain a structure having a concavity and convexity structure on the transparent substrate.

3 . The diffraction grating of claim 2 ,
wherein the diffraction grating is produced by pressing the structure to a substrate to which a sol-gel material has been applied; curing the sol-gel material; and detaching the structure from the substrate to obtain the diffraction grating having a concavity and convexity structure made of the sol-gel material.

4 . The diffraction grating according to claim 2 , wherein a cross-section shape of the concavity and convexity structure has a chevron shape; and in a case that a Fourier-transformed image is obtained by performing a two-dimensional fast Fourier-transform processing on an concavity and convexity analysis image obtained by an analyzing a planar shape of the concavity and convexity structure with an atomic force microscope, the Fourier-transformed image shows an annular pattern substantially centered at an origin at which an absolute value of wavenumber is 0 μm −1 , and the annular pattern is present within a region where the absolute value of wavenumber is within a range of 10 μm −1 or less.

5 . The diffraction grating according to claim 3 , wherein a cross-section shape of the concavity and convexity structure has a chevron shape; and in a case that a Fourier-transformed image is obtained by performing a two-dimensional fast Fourier-transform processing on an concavity and convexity analysis image obtained by an analyzing a planar shape of the concavity and convexity structure with an atomic force microscope, the Fourier-transformed image shows an annular pattern substantially centered at an origin at which an absolute value of wavenumber is 0 μm −1 , and the annular pattern is present within a region where the absolute value of wavenumber is within a range of 10 μm −1 or less.

6 . The diffraction grating according to claim 2 , wherein a kurtosis of the cross-section shape of the concavity and convexity structure is −1.2 or more.

7 . The diffraction grating according to claim 6 , wherein the kurtosis of the cross-section shape of the concavity and convexity structure is −1.2 to 1.2.

8 . The diffraction grating according to claim 2 , wherein an average pitch of a cross-section of the concavity and convexity structure is 10 to 600 nm.

9 . An organic EL element produced by stacking a transparent electrode, an organic layer, a metal electrode in this order on the concavity and convexity structure of the diffraction grating produced by the method for producing the diffraction grating as defined in claim 2 .

Assignees

• Jx Nippon Oil & Energy Corp
• Tokyo Inst Tech

Inventors

• Masuyama Satoshi
• Takahashi Madoka
• Nishimura Suzushi
• Fukuda Maki
• Seki Takashi

Classifications

• G02B5/1852 Primary

  using mechanical means, e.g. ruling with diamond tool, moulding · CPC title

• B29C33/3857 Primary

  by making impressions of one or more parts of models, e.g. shaped articles and including possible subsequent assembly of the parts · CPC title

• G02B5/1809

  with pitch less than or comparable to the wavelength · CPC title

• B29C2043/023

  having a plurality of grooves · CPC title

• C25D1/10

  Moulds; Masks; Masterforms · CPC title