Method for manufacturing ink jet head and ink jet head

Patent metadata

Field	Value
Publication number	US-2016159096-A1
Application number	US-201615046361-A
Country	US
Kind code	A1
Filing date	Feb 17, 2016
Priority date	Sep 17, 2013
Publication date	Jun 9, 2016
Grant date	—

Abstract

The present invention provides a method for manufacturing an ink jet head and an ink jet head. The method includes: arranging a vibrating plate on lower surface of a substrate; arranging a piezoelectric actuator on surface of the vibrating plate; arranging a protective film on surface of the piezoelectric actuator for sealing the piezoelectric actuator along with the vibrating plate, thus preventing the piezoelectric actuator from corrosion; etching the substrate and the vibrating plate to form a groove on the substrate at a position corresponding to the piezoelectric actuator, and form a liquid feeding hole on the substrate and vibrating plate; forming a pressure chamber and a nozzle orifice on lower surface of the vibrating plate, allowing the pressure chamber to cover the position where the piezoelectric actuator is arranged in the vibrating plate, enabling communication of the pressure chamber with the nozzle orifice and the liquid feeding hole.

First claim

What is claimed is:

1 . A method for manufacturing an ink jet head, comprising:
arranging a vibrating plate on a lower surface of a substrate; arranging a piezoelectric actuator on a surface of the vibrating plate; arranging a protective film on a surface of the piezoelectric actuator for sealing the piezoelectric actuator along with the vibrating plate, so as to prevent the piezoelectric actuator from corrosion; etching the substrate and the vibrating plate, so as to form a groove on the substrate at a position corresponding to the piezoelectric actuator, and to form a liquid feeding hole on both the substrate and the vibrating plate; and forming a pressure chamber and a nozzle orifice on a lower surface of the vibrating plate, allowing the pressure chamber to cover a position at which the piezoelectric actuator is arranged in the vibrating plate and enabling communication of the pressure chamber with the nozzle orifice and the liquid feeding hole.

2 . The method for manufacturing an ink jet head according to claim 1 , wherein the arranging the piezoelectric actuator on the surface of the vibrating plate comprises:
arranging the piezoelectric actuator on the lower surface of the vibrating plate.

3 . The method for manufacturing an ink jet head according to claim 1 , wherein the protective film is made of silicon nitride or silicon oxide material.

4 . The method for manufacturing an ink jet head according to claim 1 , wherein the vibrating plate is made of silicon nitride.

5 . The method for manufacturing an ink jet head according to claim 1 , wherein the forming a pressure chamber and a nozzle orifice on the lower surface of the vibrating plate, allowing the pressure chamber to cover the position at which the piezoelectric actuator is arranged in the vibrating plate and enabling communication of the pressure chamber with the liquid feeding hole and the liquid feed hole comprises:
forming a pressure chamber layer on the lower surface of the vibrating plate; exposing via a first mask to cure side walls of the pressure chamber layer; arranging a nozzle plate layer on a lower surface of the pressure chamber; exposing via a second mask to cure the nozzle plate layer except for the position of the nozzle orifice; and developing to form the pressure chamber and the nozzle orifice, allowing the pressure chamber to be communicated with the nozzle orifice and the liquid feeding hole.

6 . The method for manufacturing an ink jet head according to claim 5 , wherein the pressure chamber layer and the nozzle plate layer are made of SU8 photoresist.

7 . The method for manufacturing an ink jet head according to claim 1 , further comprising:
arranging a cover plate on an upper surface of the substrate after forming the pressure chamber and the nozzle orifice on the lower surface of the vibration plate, wherein the cover plate is provided with an opening which is communicated with the liquid feeding hole.

8 . The method for manufacturing an ink jet head according to claim 2 , wherein the protective film is made of silicon nitride or silicon oxide material.

9 . The method for manufacturing an ink jet head according to claim 2 , wherein the vibrating plate is made of silicon nitride.

10 . The method for manufacturing an ink jet head according to claim 2 , wherein the forming a pressure chamber and a nozzle orifice on the lower surface of the vibrating plate, allowing the pressure chamber to cover the position at which the piezoelectric actuator is arranged in the vibrating plate and enabling communication of the pressure chamber with the liquid feeding hole and the liquid feed hole comprises:
forming a pressure chamber layer on the lower surface of the vibrating plate; exposing via a first mask to cure side walls of the pressure chamber layer; arranging a nozzle plate layer on a lower surface of the pressure chamber; exposing via a second mask to cure the nozzle plate layer except for the position of the nozzle orifice; and developing to form the pressure chamber and the nozzle orifice, allowing the pressure chamber to be communicated with the nozzle orifice and the liquid feeding hole.

11 . The method for manufacturing an ink jet head according to claim 10 , wherein the pressure chamber layer and the nozzle plate layer are made of SU8 photoresist.

12 . The method for manufacturing an ink jet head according to claim 2 , further comprising:
arranging a cover plate on an upper surface of the substrate after forming the pressure chamber and the nozzle orifice on the lower surface of the vibration plate, wherein the cover plate is provided with an opening which is communicated with the liquid feeding hole.

13 . An ink jet head manufactured by the method for manufacturing an ink jet head according to claim 1 , comprising:
a vibrating plate, wherein a piezoelectric actuator is arranged on the surface of the vibrating plate, a protective film is arranged on the surface of the piezoelectric actuator for sealing the piezoelectric actuator along with the vibrating plate, so as to prevent the piezoelectric actuator from corrosion; a pressure chamber, arranged on the lower surface of the vibrating plate and covers the position wherein the piezoelectric actuator in the vibrating plate is placed, a nozzle orifice in communication with the pressure chamber is formed on the lower surface of the pressure chamber; and a substrate, located on the upper surface of the vibrating plate and is provided with a groove at the position corresponding to the piezoelectric actuator, a liquid feeding hole is formed on both the substrate and the vibrating plate and is communicated with the pressure chamber.

14 . The ink jet head according to claim 13 , further comprising a cover plate arranged on the upper surface of the substrate, wherein the cover plate is provided with an opening which is communicated with the liquid feeding hole.

15 . The ink jet head according to claim 13 , wherein the piezoelectric actuator is arranged on the lower surface of the vibrating plate.

16 . The ink jet head according to claim 13 , wherein the protective film is made of silicon nitride or silicon oxide material.

17 . The ink jet head according to claim 13 , wherein the vibrating plate is made of silicon nitride.

18 . An ink jet head manufactured by the method for manufacturing an ink jet head according to claim 2 , comprising:
a vibrating plate, wherein a piezoelectric actuator is arranged on the surface of the vibrating plate, a protective film is arranged on the surface of the piezoelectric actuator for sealing the piezoelectric actuator along with the vibrating plate, so as to prevent the piezoelectric actuator from corrosion; a pressure chamber, arranged on the lower surface of the vibrating plate and covers the position wherein the piezoelectric actuator in the vibrating plate is placed, a nozzle orifice in communication with the pressure chamber is formed on the lower surface of the pressure chamber; and a substrate, located on the upper surface of the vibrating plate and is provided with a groove at the position corresponding to the piezoelectric actuator, a liquid feeding hole is formed on both the substrate and the vibrating plate and is communicated with the pressure chamber.

19 . The ink jet head according to claim 18 , further comprising a cover plate arranged on the upper surface of the substrate, wherein the cover plate is provided with an opening which is communicated with the liquid feeding hole.

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Assignees

• Univ Dalian Tech
• Zhuhai Seine Technology Co Ltd

Inventors

• Zou Helin
• Sun sha
• Zhou Yi

Classifications

• B41J2/1646

  thin film formation by sputtering · CPC title

• Y10T29/42

  Piezoelectric device making · CPC title

• B41J2/1631

  photolithography · CPC title

• B41J2/1642

  thin film formation by CVD [chemical vapor deposition] · CPC title

• B41J2/1623

  bonding and adhesion · CPC title