Vertical gate-all-around tfet
US-2016293739-A1 · Oct 6, 2016 · US
US2016155751A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016155751-A1 |
| Application number | US-201615018477-A |
| Country | US |
| Kind code | A1 |
| Filing date | Feb 8, 2016 |
| Priority date | Nov 8, 2013 |
| Publication date | Jun 2, 2016 |
| Grant date | — |
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Official abstract text for this publication.
A semiconductor device includes a peripheral circuit region on a substrate, a polysilicon layer on the peripheral circuit region, a memory cell array region on the polysilicon layer and overlapping the peripheral circuit region, the peripheral circuit region being under the memory cell array region, an upper interconnection layer on the memory cell array region, and a vertical contact through the memory cell array region and the polysilicon layer, the vertical contact connecting the upper interconnection layer to the peripheral circuit region.
Opening claim text (preview).
1 .- 20 . (canceled) 21 . A semiconductor device, comprising: a substrate including a memory cell array region; a memory cell array formed on the memory cell array region, the memory cell array including: a channel layer extending in a vertical direction on the substrate, and at least one ground selection line, at least one word line, and at least one string selection line spaced apart in the vertical direction along a sidewall of the channel layer; and at least o…
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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