Mirror device

Patent metadata

Field	Value
Publication number	US-2016154233-A1
Application number	US-201314904213-A
Country	US
Kind code	A1
Filing date	Dec 12, 2013
Priority date	Aug 1, 2013
Publication date	Jun 2, 2016
Grant date	—

Abstract

A mirror device includes a mirror structure including a first movable portion and a second movable portion coupled to a support portion so as to be swingable, and, a mirror, a first coil, and a second coil disposed on the movable portions; a first magnetic portion and a second magnetic portion disposed on a same side as a back surface of the mirror structure to be opposed to the mirror structure, and having a magnetic pole of a first polarity and a magnetic pole of a second polarity, respectively; and a cap structure disposed on a same side as a surface of the mirror structure. The cap structure includes a first region having a magnetic pole of the first polarity, a second region having a magnetic pole of the second polarity, and an unmagnetized third region located between the first region and the second region.

First claim

1 . A mirror device comprising:
a mirror structure including a support portion, a movable portion coupled to the support portion so as to be swingable, and, a mirror and a coil disposed on the movable portion; a first magnetic portion having a magnetic pole of a first polarity and disposed on a back side of the mirror structure with respect to a surface where the mirror thereof is disposed, so that the magnetic pole of the first polarity is opposed to the mirror structure; a second magnetic portion having a magnetic pole of a second polarity different from the first polarity and disposed on the back side of the mirror structure so that the magnetic pole of the second polarity is opposed to the mirror structure; and a cap structure disposed on a same side as the surface where the mirror of the mirror structure is disposed, wherein the cap structure includes: a first region having a magnetic pole of the first polarity located to be opposed to the magnetic pole of the first polarity of the first magnetic portion; a second region having a magnetic pole of the second polarity located to be opposed to the magnetic pole of the second polarity of the second magnetic portion; and an unmagnetized third region located between the first region and the second region.

2 . The mirror device according to claim 1 , further comprising:
a housing including an opening portion and housing the mirror structure, the first magnetic portion, and the second magnetic portion, wherein the cap structure is disposed to cover the opening portion.

3 . The mirror device according to claim 1 ,
wherein a through hole is formed at a position corresponding to the mirror in the third region and the through hole is defined by a tapered inner surface with its diameter increasing from a same side as a surface of the cap structure opposed to the mirror structure, to a back side of the cap structure.

4 . The mirror device according to claim 1 , further comprising:
a third magnetic portion disposed between the first magnetic portion and the second magnetic portion, wherein the first magnetic portion, the third magnetic portion, and the second magnetic portion constitute a Halbach array.

5 . The mirror device according to claim 1 ,
wherein the cap structure comprises a single member and includes the first region and the second region obtained by magnetizing respective corresponding regions in the single member.

6 . The mirror device according to claim 1 ,
wherein the first magnetic portion and the second magnetic portion are configured by magnetizing respective corresponding regions in a single member.

7 . The mirror device according to claim 1 ,
wherein the coil has a substantially rectangular shape, and wherein the first magnetic portion and the second magnetic portion are disposed in a direction intersecting with extending directions of respective sides of the coil.

8 . The mirror device according to claim 1 ,
wherein the coil is disposed on a same side as the first magnetic portion and the second magnetic portion with respect to the mirror and disposed to overlap the mirror when viewed from a direction normal to the mirror.

Assignees

• Hamamatsu Photonics Kk

Inventors

• Takimoto Sadaharu
• Kimoto Masakuni
• ADACHI Norihide

Classifications

• G02B26/0816 Primary

  by means of one or more reflecting elements · CPC title

• G02B26/085 Primary

  the reflecting means being moved or deformed by electromagnetic means · CPC title

• B81B2201/042

  Micromirrors, not used as optical switches · CPC title

• G02B26/101

  with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129) · CPC title

• B81B3/0021

  Transducers for transforming electrical into mechanical energy or vice versa (dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00) · CPC title