Method for measuring refractive index, refractive index measuring device, and method for producing optical element

Patent metadata

Field	Value
Publication number	US-2016153901-A1
Application number	US-201414900595-A
Country	US
Kind code	A1
Filing date	Jun 18, 2014
Priority date	Jun 28, 2013
Publication date	Jun 2, 2016
Grant date	—

Abstract

The refractive index of a test object is measured with high precision.
The present invention relates to a method for measuring a refractive index of a test object by splitting light from a light source into test light and reference light and measuring interference light resulting from interference between the reference light and the test light transmitted through the test object. In the method, the test object is arranged in a medium whose group refractive index is equal to a group refractive index of the test object at a particular wavelength, interference light is measured, the particular wavelength is determined based on a wavelength dependence of a phase difference between the test light and the reference light, and the group refractive index of the medium corresponding to the particular wavelength is calculated as the group refractive index of the test object corresponding to the particular wavelength.

First claim

1 . A method for measuring a refractive index of a test object by splitting light from a light source into test light and reference light, introducing the test light into the test object, and measuring interference light resulting from interference between the reference light and the test light transmitted through the test object, the method comprising steps of:
measuring, by arranging the test object in a medium whose group refractive index is equal to a group refractive index of the test object at a particular wavelength, interference light resulting from interference between test light transmitted through the test object and the medium and reference light transmitted through the medium; determining the particular wavelength based on a wavelength dependence of a phase difference between the test light and the reference light; and calculating the group refractive index of the medium corresponding to the particular wavelength as the group refractive index of the test object corresponding to the particular wavelength.

2 . The method according to claim 1 , wherein a wavelength corresponding to an extreme value of the phase difference between the test light and the reference light is determined as the particular wavelength.

3 . The method according to claim 1 , wherein the group refractive index of the medium is calculated by measuring a temperature of the medium and converting the measured temperature of the medium into a refractive index of the medium.

4 . The method according to claim 1 , wherein a reference test object whose refractive index and shape are known is arranged in the medium, light is introduced into the reference test object, a transmitted wavefront of the reference test object is measured, and the group refractive index of the medium is calculated based on the refractive index and shape of the reference test object and the transmitted wavefront of the reference test object.

5 . The method according to claim 1 , wherein the light from the light source is split into medium test light and medium reference light, the medium test light is introduced into the medium, interference light resulting from interference between the medium reference light and the medium test light transmitted through the medium is measured, and the group refractive index of the medium is calculated based on a phase difference between the medium reference light and the medium test light.

6 . The method according to claim 1 , further comprising a step of measuring a refractive index distribution of the medium.

7 . The method according to claim 1 , further comprising a step of controlling a temperature distribution of the medium.

8 . A method for producing an optical element, the method comprising steps of:
molding the optical element, and evaluating the molded optical element by measuring a refractive index of the optical element using the method according to claim 1 .

9 . A refractive index measuring device comprising:
a light source; an interference optical system configured to split light from the light source into test light and reference light, introduce the test light into a test object, and cause the reference light and the test light transmitted through the test object to interfere with each other; a detecting unit configured to detect interference light resulting from the interference between the test light and the reference light; and a computing unit configured to compute a refractive index of the test object using an interference signal that is output from the detecting unit, wherein the test object is arranged in a medium whose group refractive index is equal to a group refractive index of the test object at a particular wavelength, wherein the interference optical system is an optical system that causes test light transmitted through the test object and the medium and reference light transmitted through the medium to interfere with each other, and wherein the computing unit determines the particular wavelength based on a wavelength dependence of a phase difference between the test light and the reference light and calculates the group refractive index of the medium corresponding to the particular wavelength as the group refractive index of the test object corresponding to the particular wavelength.

10 . The refractive index measuring device according to claim 9 , wherein the computing unit determines a wavelength corresponding to an extreme value of the phase difference between the test light and the reference light as the particular wavelength.

11 . The refractive index measuring device according to claim 9 , further comprising a temperature measuring unit configured to measure a temperature of the medium,
wherein the computing unit calculates the group refractive index of the medium by converting the temperature of the medium measured by the temperature measuring unit into a refractive index of the medium.

12 . The refractive index measuring device according to claim 9 , further comprising:
a reference test object whose refractive index and shape are known; and a wavefront measuring unit configured to measure a transmitted wavefront of light that is introduced into the reference test object arranged in the medium, wherein the computing unit calculates the group refractive index of the medium based on the refractive index and shape of the reference test object and the transmitted wavefront of the reference test object.

13 . The refractive index measuring device according to claim 9 , further comprising:
an interference optical system configured to split the light from the light source into medium test light and medium reference light, introduce the medium test light into the medium, and cause the medium reference light and the medium test light transmitted through the medium to interfere with each other; a detecting unit configured to detect interference light resulting from the interference between the medium reference light and the medium test light; and a computing unit configured to calculate the group refractive index of the medium based on a phase difference between the medium reference light and the medium test light.

14 . The refractive index measuring device according to claim 9 , further comprising:
a wavefront measuring unit configured to measure a refractive index distribution of the medium.

15 . The refractive index measuring device according to claim 9 , further comprising:
a temperature controlling unit configured to control a temperature distribution of the medium.

Assignees

• Canon Kk

Inventors

• Sugimoto Tomohiro

Classifications

• G01N21/45 Primary

  using interferometric methods; using Schlieren methods · CPC title

• G01N2201/13

  Standards, constitution · CPC title

• G01M11/0228

  by measuring refractive power · CPC title