Phase-change memory cell with mixed-material switchable region
US-2024196766-A1 · Jun 13, 2024 · US
US2016149127A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016149127-A1 |
| Application number | US-201615013517-A |
| Country | US |
| Kind code | A1 |
| Filing date | Feb 2, 2016 |
| Priority date | Sep 14, 2011 |
| Publication date | May 26, 2016 |
| Grant date | — |
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Embodiments of the present disclosure describe techniques and configurations for increasing thermal insulation in a resistance change memory device, also known as a phase change memory (PCM) device. In one embodiment, an apparatus includes a storage structure of a PCM device, the storage structure having a chalcogenide material, an electrode having an electrically conductive material, the electrode having a first surface that is directly coupled with the storage structure, and a dielectric film having a dielectric material, the dielectric film being directly coupled with a second surface of the electrode that is disposed opposite to the first surface. Other embodiments may be described and/or claimed.
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What is claimed is: 1 . A method comprising: forming a storage structure of a phase change memory (PCM) device, the storage structure having a chalcogenide material; forming an electrode having an electrically conductive material, the electrode having a first surface that is directly coupled with the storage structure; and forming a dielectric film having a dielectric material, the dielectric film being directly coupled with a second surface of the electrode that is disposed opposite to the first surface. 2 . The method of claim 1 , wherein the electrode is a first electrode having a first electrically conductive material and the storage structure includes a first surface that is directly coupled with the first electrode, the method further comprising: forming a second electrode having a second electrically conductive material, the second electrode being directly coupled with a second surface of the storage structure that is disposed opposite to the first surface of the storage structure. 3 . The method of claim 2 , further comprising: forming a third electrode having a third electrically conductive material, the third electrode being directly coupled with the dielectric film such that the dielectric film is disposed between the first electrode and the third electrode. 4 . The method of claim 1 , wherein the dielectric film is a first dielectric film having a first dielectric material and the storage structure includes a first surface that is directly coupled with the first electrode, the method further comprising: forming a second dielectric film having a second dielectric material, the second dielectric film being directly coupled with a second surface of the storage structure that is disposed opposite to the first surface of the storage structure. 5 . The method of claim 1 , wherein forming the dielectric film comprises: depositing a ceramic or a polymer to form the dielectric film, the dielectric film having a thickness of 2 nanometers or less. 6 . The method of claim 1 , further comprising: forming a word-line or a bit-line, wherein the electrode is an intervening structure between the storage structure and the word-line or the bit-line and the dielectric film is part of an electrical pathway between the word-line or the bit-line and the storage structure.
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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