Cryopump

Patent metadata

Field	Value
Publication number	US-2016146200-A1
Application number	US-201615012399-A
Country	US
Kind code	A1
Filing date	Feb 1, 2016
Priority date	Feb 9, 2011
Publication date	May 26, 2016
Grant date	—

Abstract

A cryopump has a simple-to-manufacture frontal baffle plate with improved gas distribution and has a large-area second-stage array plate to capture Type II gases. The cryopump has a first-stage frontal baffle plate having orifices and flaps bent from and attached to the orifices. The cryopump has a second-stage top plate that is larger in area than cooling baffles of the second stage array.

First claim

What is claimed is:

1 . A cryopump comprising:
a second stage having:
a plurality of cooling baffles, the plurality of cooling baffles thermally coupled to the second stage of a refrigerator, at least a portion of at least one cooling surface coated with an adsorbent material; and
a top plate thermally coupled to the second stage of the refrigerator and arranged between a first stage array and the plurality of cooling baffles, the top plate extending beyond the plurality of cooling baffles as viewed from the frontal baffle.

2 . The cryopump of claim 1 wherein the top plate extends beyond the plurality of cooling baffles to cover between 50% and 98% of a cross-sectional area of a radiation shield of the cryopump.

3 . The cryopump of claim 1 wherein the plurality of cooling baffles are arranged as an array of cooling baffles.

4 . The cyropump of claim 1 further comprising a first stage frontal shield arranged across an opening of a radiation shield that shields the second stage from radiation, the frontal shield comprising angled baffles.

5 . The cryopump as claimed in claim 4 wherein the baffles comprise rings supported by the radiation shield.

6 . The cryopump as claimed in claim 5 wherein the rings angle radially outward from the front of the shield.

7 . The cryopump as claimed in claim 6 wherein the rings are angled in the range of about 10-60° from a frontal plane of the frontal shield.

8 . The cryopump as claimed in claim 6 wherein the rings are angled in the range of about 25-35° from a frontal plane of the frontal shield.

9 . The cryopump as claimed in claim 6 wherein the rings are angled in the range of about 35-45° from a frontal plane of the frontal shield.

10 . A second stage array for a cryopump, comprising:
a plurality of cooling baffles, the plurality of cooling baffles configured to be thermally coupled to a second stage of a refrigerator, at least a portion of at least one cooling surface coated with an adsorbent material; and a top plate configured to be thermally coupled to the second stage of the refrigerator and arranged between a frontal baffle and the plurality of cooling baffles, the top plate extending beyond the plurality of cooling baffles as viewed from the frontal baffle.

11 . The second stage for a cryopump of claim 10 wherein the top plate extends beyond the cooling baffles to cover between 50% and 98% of a cross-sectional area of a radiation shield of the cryopump.

12 . The second stage for a cryopump of claim 10 wherein the plurality of cooling baffles are arranged as an array of cooling baffles.

Assignees

• Brooks Automation Inc

Inventors

• Syssoev Sergei
• Bartlett Allen J
• Casello John J
• Wells Jeffrey A
• Eacobacci Jr Michael J

Classifications

• F04B37/08 Primary

  by condensing or freezing, e.g. cryogenic pumps · CPC title

• Y10T29/49236

  Fluid pump or compressor making · CPC title

• B01D8/00

  Cold traps; Cold baffles (pumps for evacuating by condensing or freezing F04B37/08) · CPC title