Evaporation unit and method for evaporating an object with said type of evaporation unit

Patent metadata

Field	Value
Publication number	US-2016138152-A1
Application number	US-201414897535-A
Country	US
Kind code	A1
Filing date	Jun 13, 2014
Priority date	Jun 13, 2013
Publication date	May 19, 2016
Grant date	—

Abstract

In order to ensure that metal is homogeneously vaporized, in particular in a vacuum-strip vaporizer plant, a vaporization unit ( 2 ) is provided which has an inner cavity ( 6 ) which is defined by a circumferential web ( 10 ) to which an outer cavity ( 8 ) is connected.

First claim

1 . Vaporizing unit with a top side wherein
an inner cavity is incorporated in the top side, the inner cavity being defined by a surrounding web to which in turn an outer cavity is connected.

2 . The vaporizing unit according to claim 1 , wherein
the outer cavity is designed as a surrounding channel.

3 . The vaporizing unit according to claim 1 , wherein
that the outer cavity and the web are designed along the peripheral edge of the top side, and the inner cavity completely covers the area enclosed by the web.

4 . The vaporizing unit according to claim 1 , wherein
the inner cavity has an inner vaporizing surface which is between 25% and 85% and in particular between 10% and 65% of the total surface area of the top side.

5 . The vaporizing unit according to claim 1 , wherein
the inner cavity has a width ranging between 30% and 60% of a total width of the top side and a length ranging between 60% and 80% of a total length of the top side.

6 . The vaporizing unit according to claim 1 , wherein
the web has a web width of between 0.5 mm and 5 mm, and in particular between 1 mm and 4 mm.

7 . The vaporizing unit according to claim 1 , wherein
the inner cavity and the outer cavity both have a depth of between 0.1 mm and 5 mm, and in particular between 0.3 mm and 3 mm.

8 . The vaporizing unit according to claim 1 , wherein
the outer cavity is deeper than the inner cavity.

9 . The vaporizing unit according to claim 1 , wherein
the outer cavity has an outer vaporizing surface area ranging between 15% and 35% of an inner vaporizing surface area of the inner cavity.

10 . The vaporizing unit according to claim 1 , wherein
the inner cavity is of rectangular form.

11 . Method for vacuum-coating an object with the aid of the vaporizing unit according to claim 1 , wherein the vaporizing unit is heated and a metal to be vaporized is fed into the inner cavity, where it melts and vaporizes, wherein a heat output for heating the vaporizing unit and a metal feed rate are coordinated such that the inner cavity is completely covered with molten metal.

12 . The vaporizing unit according to claim 1 , wherein the inner cavity has an inner vaporizing surface which is between 40% and 65% of the total surface area of the top side.

13 . The vaporizing unit according to claim 1 , wherein the inner cavity and the outer cavity both have a depth of between 0.3 mm and 3 mm.

Assignees

• Kennametal Inc

Inventors

• Draken Alexander
• Grau Rudolf Karl
• Ngoumeni Yappi Rodrigue
• Schweiger Hubert Josef

Classifications

• H05B3/141

  Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds · CPC title

• C23C14/26

  by resistance or inductive heating of the source · CPC title

• C23C14/243 Primary

  Crucibles for source material (C23C14/28, C23C14/30 take precedence) · CPC title