Light-transmitting conductive film, display device, electronic device, and manufacturing method of light-transmitting conductive film

Patent metadata

Field	Value
Publication number	US-2016125969-A1
Application number	US-201614993395-A
Country	US
Kind code	A1
Filing date	Jan 12, 2016
Priority date	May 21, 2009
Publication date	May 5, 2016
Grant date	—

Abstract

An object is to provide a transparent conductive film having favorable transparency and conductivity at low cost. Another object is to reduce the resistivity of a transparent conductive film formed using conductive oxynitride including zinc and aluminum. Another object is to provide a transparent conductive film that is formed using conductive oxynitride including zinc and aluminum. When aluminum and nitrogen are made to be included in a transparent conductive film formed using oxide including zinc to form a transparent conductive film that is formed using conductive oxynitride including zinc and aluminum, the transparent conductive film can have reduced resistivity. Heat treatment after the formation of the transparent conductive film that is formed using conductive oxynitride including zinc and aluminum enables reduction in resistivity of the transparent conductive film.

First claim

What is claimed is:

1 . A light-transmitting conductive film comprising conductive oxynitride including zinc and aluminum,
wherein a ratio of the zinc in the oxynitride is lower than or equal to 47 atomic %, wherein a ratio of the aluminum in the conductive oxynitride is lower than a ratio of the zinc and higher than a ratio of nitrogen, and wherein a concentration of the nitrogen in the conductive oxynitride is higher than or equal to 5.0×10 20 atoms/cm 3 .

2 . The light-transmitting conductive film according to claim 1 ,
wherein the oxynitride including the zinc and the aluminum has at least a polycrystalline structure.

3 . A display device comprising the light-transmitting conductive film according to claim 1 .

4 . An electronic device comprising the light-transmitting conductive film according to claim 1 .

5 . A light-transmitting conductive film comprising oxynitride including zinc and aluminum,
wherein a ratio of the aluminum in the oxynitride is higher than a ratio of nitrogen in the oxynitride, and wherein a carrier density is higher than or equal to 2.2×10 20 cm −3 and lower than 4.2×10 20 cm −3 .

6 . The light-transmitting conductive film according to claim 5 ,
wherein a ratio of the zinc in the oxynitride is lower than or equal to 47 atomic %.

7 . The light-transmitting conductive film according to claim 5 ,
wherein a concentration of the nitrogen in the oxynitride is higher than or equal to 5.0×10 20 atoms/cm 3 .

8 . The light-transmitting conductive film according to claim 5 ,
wherein the oxynitride including the zinc and the aluminum has at least a polycrystalline structure.

9 . A display device comprising the light-transmitting conductive film according to claim 5 .

10 . An electronic device comprising the light-transmitting conductive film according to claim 5 .

11 . A light-transmitting conductive film comprising oxynitride including zinc and aluminum,
wherein a ratio of the aluminum in the oxynitride is higher than a ratio of nitrogen in the oxynitride, and wherein a mobility is higher than or equal to 4.7 cm 2 /V·sec and lower than 36.0 cm 2 /V·sec.

12 . The light-transmitting conductive film according to claim 11 ,
wherein a ratio of the zinc in the oxynitride is lower than or equal to 47 atomic %.

13 . The light-transmitting conductive film according to claim 11 ,
wherein a concentration of the nitrogen in the oxynitride is higher than or equal to 5.0×10 20 atoms/cm 3 .

14 . The light-transmitting conductive film according to claim 11 ,
wherein the oxynitride including the zinc and the aluminum has at least a polycrystalline structure.

15 . A display device comprising the light-transmitting conductive film according to claim 11 .

16 . An electronic device comprising the light-transmitting conductive film according to claim 11 .

17 . A light-transmitting conductive film comprising oxynitride including zinc and aluminum,
wherein a ratio of the aluminum in the oxynitride is higher than a ratio of nitrogen in the oxynitride, and wherein a resistivity is higher than 4.1×10 −4 Ω·cm and lower than or equal to 6.1×10 −3 Ω·cm.

18 . The light-transmitting conductive film according to claim 17 ,
wherein a ratio of the zinc in the oxynitride is lower than or equal to 47 atomic %.

19 . The light-transmitting conductive film according to claim 17 ,
wherein a concentration of the nitrogen in the oxynitride is higher than or equal to 5.0×10 20 atoms/cm 3 .

20 . The light-transmitting conductive film according to claim 17 ,
wherein the oxynitride including the zinc and the aluminum has at least a polycrystalline structure.

21 . A display device comprising the light-transmitting conductive film according to claim 17 .

22 . An electronic device comprising the light-transmitting conductive film according to claim 17 .

23 . The light-transmitting conductive film according to claim 17 ,
wherein a transmissivity with respect to light having a wavelength of 470 nm is higher than or equal to 0.70.

24 . The light-transmitting conductive film according to claim 17 ,
wherein a transmissivity with respect to light having a wavelength of 530 nm is higher than or equal to 0.70.

25 . The light-transmitting conductive film according to claim 17 ,
wherein a transmissivity with respect to light having a wavelength of 680 nm is higher than or equal to 0.70.

Assignees

• Semiconductor Energy Lab

Inventors

• Koezuka Junichi
• Maruyama Tetsunori
• Saito Takayuki
• Imoto Yuki
• Uto Noriaki
• Endo Yuta
• Shionoya Hitomi
• Hirohashi Takuya
• Yamazaki Shunpei

Classifications

• C23C14/541

  Heating or cooling of the substrates · CPC title

• C23C14/5806

  Thermal treatment · CPC title

• C23C14/0676

  Oxynitrides · CPC title

• H01B1/02 Primary

  mainly consisting of metals or alloys · CPC title

• C23C14/3414

  Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy · CPC title