Physical Quantity Detecting Vibration Element, Physical Quantity Sensor, Electronic Apparatus, and Moving Object

Patent metadata

Field	Value
Publication number	US-2016116285-A1
Application number	US-201514886681-A
Country	US
Kind code	A1
Filing date	Oct 19, 2015
Priority date	Oct 28, 2014
Publication date	Apr 28, 2016
Grant date	—

Abstract

A vibration element includes a detection signal electrode provided in a detection vibrating arm, a detection signal terminal which is provided in a support portion and electrically connected to the detection signal electrode, and a detection ground terminal provided in the support portion, and the detection ground terminal is disposed between a first connection portion which is a connection portion with a beam portion of the support portion and a second connection portion which is a connection portion with a beam portion, and is provided to extend to the outside of the first connection portion, and the detection signal terminal is provided between the detection ground terminal and an end portion of the support portion.

First claim

What is claimed is:

1 . A physical quantity detecting vibration element comprising:
a vibration body having a detection vibration portion; a support portion which supports the vibration body and includes a first end portion and a second end portion; a beam portion which connects the vibration body and a portion between the first end portion and the second end portion of the support portion; a detection signal electrode provided in the detection vibration portion; a detection signal terminal which is provided on a principal surface on one side of the support portion and electrically connected to the detection signal electrode; and a constant potential terminal which is provided on the principal surface on one side of the support portion and electrically connected to a constant potential, wherein a portion of the constant potential terminal is disposed so as to be positioned further toward the first end portion side than a connection portion with the beam portion of the support portion, and the detection signal terminal is disposed further toward the first end portion side than the constant potential terminal of the support portion.

2 . The physical quantity detecting vibration element according to claim 1 , further comprising:
a detection ground electrode provided in the detection vibration portion, wherein the detection ground electrode and the constant potential terminal are electrically connected.

3 . The physical quantity detecting vibration element according to claim 1 ,
wherein the constant potential terminal is further disposed between the detection signal terminal and the first end portion of the support portion.

4 . The physical quantity detecting vibration element according to claim 1 ,
wherein the constant potential terminal is further disposed at a portion overlapping the detection signal terminal on a principal surface on the other side of the support portion.

5 . The physical quantity detecting vibration element according to claim 1 , comprising:
a pair of the beam portions, wherein the constant potential terminal is disposed between a first connection portion which is a connection portion with the beam portion on one side of the support portion, and a second connection portion which is a connection portion with the beam portion on the other side, and is disposed to extend further to the first end portion side than the first connection portion.

6 . The physical quantity detecting vibration element according to claim 5 ,
wherein the constant potential terminal is further disposed to extend further to the second end portion side than the second connection portion.

7 . The physical quantity detecting vibration element according to claim 6 ,
wherein the vibration body includes a drive vibration portion, and the physical quantity detecting vibration element further comprises:
a drive signal electrode provided in the drive vibration portion; and
a drive signal terminal which is provided between the constant potential terminal on the principal surface on one side of the support portion and the second end portion and electrically connected to the drive signal electrode.

8 . The physical quantity detecting vibration element according to claim 7 ,
wherein the constant potential terminal is further disposed between the drive signal terminal and the second end portion of the support portion.

9 . The physical quantity detecting vibration element according to claim 8 ,
wherein the constant potential terminal is further disposed at a portion overlapping the drive signal terminal on the principal surface on the other side of the support portion.

10 . A physical quantity detecting vibration element comprising:
a vibration body having a detection vibration portion; a support portion which supports the vibration body; a detection signal electrode provided in the detection vibration portion; a detection signal terminal which is provided on a principal surface on one side of the support portion and electrically connected to the detection signal electrode; and a constant potential electrode which is provided on a principal surface on the other side of the support portion, is positioned so as to overlap the detection signal terminal when viewed in a plan view, and is electrically connected to a constant potential.

11 . The physical quantity detecting vibration element according to claim 10 , further comprising:
a detection ground electrode which is provided in the detection vibration portion and electrically separated from the detection signal electrode; and a detection ground terminal which is provided on the principal surface on one side of the support portion and electrically connected to the detection ground electrode, wherein the detection ground terminal and the constant potential electrode are electrically connected.

12 . The physical quantity detecting vibration element according to claim 11 ,
wherein the constant potential electrode includes a first continuous portion which is continuously provided on the principal surface on one side through a side surface of the support portion, and the detection signal terminal is positioned between the detection ground terminal and the first continuous portion.

13 . The physical quantity detecting vibration element according to claim 11 ,
wherein the vibration body includes a drive vibration portion, the physical quantity detecting vibration element further comprises:
a drive signal electrode provided in the drive vibration portion; and
a drive signal terminal which is provided on the principal surface on one side of the support portion and electrically connected to the drive signal electrode, and
the constant potential electrode is positioned so as to overlap the drive signal terminal when viewed in a plan view.

14 . The physical quantity detecting vibration element according to claim 13 ,
wherein the constant potential electrode includes a second continuous portion which is continuously provided on the principal surface on one side through a side surface of the support portion, and the drive signal terminal is positioned between the detection ground terminal and the second continuous portion.

15 . The physical quantity detecting vibration element according to claim 14 ,
wherein the detection ground terminal is positioned between the detection signal terminal and the drive signal terminal.

16 . A physical quantity sensor comprising: the physical detecting vibration element according to claim 1 .

17 . A physical quantity sensor comprising: the physical quantity detecting vibration element according to claim 10 .

18 . An electronic apparatus comprising: the physical detecting vibration element according to claim 1 .

19 . An electronic apparatus comprising: the physical quantity detecting vibration element according to claim 10 .

20 . A moving object comprising: the physical quantity detecting vibration element according to claim 1 .

Assignees

• Seiko Epson Corp

Inventors

• Ogura Seiichiro
• Nishizawa Ryuta

Classifications

• G01C19/5705 Primary

  using masses driven in reciprocating rotary motion about an axis · CPC title