Liquid dispenser with improved drip prevention

Patent metadata

Field	Value
Publication number	US-2016114359-A1
Application number	US-201414526301-A
Country	US
Kind code	A1
Filing date	Oct 28, 2014
Priority date	Oct 28, 2014
Publication date	Apr 28, 2016
Grant date	—

Abstract

In an apparatus for treating a wafer-shaped article, a spin chuck is provided for holding and rotating a wafer-shaped article. A liquid dispenser comprises a supply conduit that divides to form a first branch extending toward a dispensing outlet of the liquid dispenser and a second branch communicating with a vent opening of the liquid dispenser. The second branch extends upwardly relative to the first branch over at least a portion of its length.

First claim

What is claimed is:

1 . Apparatus for treating a wafer-shaped article, comprising:
a spin chuck for holding and rotating a wafer-shaped article; a liquid dispenser connected to a supply of a process liquid and positioned or positionable so as to dispense the process liquid onto a surface of a wafer-shaped article when positioned on the spin chuck; wherein the liquid dispenser comprises a supply conduit that divides to form a first branch extending toward a dispensing outlet of said liquid dispenser and a second branch communicating with a vent opening of said liquid dispenser, said second branch extending upwardly relative to said first branch over at least a portion of its length.

2 . The apparatus according to claim 1 , wherein said second branch is dimensioned and positioned relative to said first branch so as to maintain a fixed volume of process liquid therein during dispensing of said process liquid through said dispensing opening.

3 . The apparatus according to claim 1 , wherein said supply conduit and said first and second branches define a T-junction.

4 . The apparatus according to claim 1 , wherein said first branch extends downwardly from said supply conduit to said dispensing opening.

5 . The apparatus according to claim 1 , wherein said second branch extends upwardly from said supply conduit to said vent opening.

6 . The apparatus according to claim 1 , wherein said second branch extends upwardly from said supply conduit to a U-shaped curve, thence downwardly from said U-shaped curve to said vent opening.

7 . The apparatus according to claim 1 , wherein neither the first branch nor the second branch is equipped with a valve.

8 . The apparatus according to claim 1 , wherein said first and second branches are dimensioned and positioned relative to one another such that said second branch does not admit air to the first branch though the vent opening, and such that no liquid is discharged through said vent opening.

9 . The apparatus according to claim 1 , wherein said first branch extends downwardly from said supply conduit to a first U-shaped curve, thence upwardly from said first U-shaped curve to a second U-shaped curve, thence downwardly from said second U-shaped curve to said dispensing opening.

10 . The apparatus according to claim 1 , further comprising a stopper configured so as to at least partially block said dispensing opening, thereby to promote flushing of said second branch with liquid supplied through said supply conduit.

11 . A liquid dispenser for use in an apparatus for treating a wafer-shaped article, comprising:
a supply conduit that divides to form a first branch extending toward a dispensing outlet of said liquid dispenser and a second branch communicating with a vent opening of said liquid dispenser, said second branch extending upwardly relative to said first branch over at least a portion of its length.

12 . The liquid dispenser according to claim 11 , wherein said second branch is dimensioned and positioned relative to said first branch so as to maintain a fixed volume of process liquid therein during dispensing of said process liquid through said dispensing opening.

13 . The liquid dispenser according to claim 11 , wherein said supply conduit and said first and second branches define a T-junction.

14 . The liquid dispenser according to claim 11 , wherein said first branch extends downwardly from said supply conduit to said dispensing opening.

15 . The liquid dispenser according to claim 11 , wherein said second branch extends upwardly from said supply conduit to said vent opening.

16 . The liquid dispenser according to claim 11 , wherein said second branch extends upwardly from said supply conduit to a U-shaped curve, thence downwardly from said U-shaped curve to said vent opening.

17 . The liquid dispenser according to claim 11 , wherein neither the first branch nor the second branch is equipped with a valve.

18 . The liquid dispenser according to claim 11 , wherein said first and second branches are dimensioned and positioned relative to one another such that said second branch does not admit air to the first branch though the vent opening, and such that no liquid is discharged through said vent opening.

19 . The liquid dispenser according to claim 11 , wherein said first branch extends downwardly from said supply conduit to a first U-shaped curve, thence upwardly from said first U-shaped curve to a second U-shaped curve, thence downwardly from said second U-shaped curve to said dispensing opening.

20 . The liquid dispenser according to claim 11 , further comprising a stopper configured so as to at least partially block said dispensing opening, thereby to promote flushing of said second branch with liquid supplied through said supply conduit.

Assignees

• Lam Res Ag

Inventors

• Bjork Anders Joel
• Henriks David
• Eder Alex

Classifications

• H10P72/0414

  using mainly spraying means, e.g. nozzles · CPC title

• B08B3/08

  the liquid having chemical or dissolving effect · CPC title

• B08B3/04 Primary

  Cleaning involving contact with liquid · CPC title