Photonics grating coupler and method of manufacture

Patent metadata

Field	Value
Publication number	US-2016109658-A1
Application number	US-201514976677-A
Country	US
Kind code	A1
Filing date	Dec 21, 2015
Priority date	Mar 14, 2013
Publication date	Apr 21, 2016
Grant date	—

Abstract

A structure for coupling an optical signal between an integrated circuit photonic structure and an external optical fiber is disclosed as in a method of formation. The coupling structure is sloped relative to a horizontal surface of the photonic structure such that light entering or leaving the photonic structure is substantially normal to its upper surface.

First claim

What is claimed as new and desired to be protected by Letters Patent of the United States is:

1 . A method of forming a photonic structure, the method comprising:
forming a lower cladding material over an upper surface of a supporting substrate; forming a waveguide core having a horizontal portion and a contiguous sloped portion over the lower cladding material; and forming an optical grating in the sloped portion of the waveguide core, the sloped portion and the optical grating configured such that light emitted by the grating is in a direction substantially normal to a surface of the horizontal portion of the waveguide core.

2 . A method as in claim 1 wherein the optical grating emits a light wave in a first direction which is substantially normal to the direction of light travel in the horizontal portion.

3 . A method as in claim 1 wherein the sloped portion of the waveguide core has a sloped angle relative to the horizontal portion which causes light emitted by the grating to be in a direction substantially normal to an upper surface of the horizontal portion of the waveguide core.

4 . A method as in claim 3 wherein forming the optical grating comprises forming a plurality of spaced grooves in an upper surface of the sloped portion of the waveguide core.

5 . A method as in claim 4 wherein the plurality of spaced grooves in the upper surface of the waveguide core each have a depth in the range of about 270 nm to about 280 nm.

6 . A method as in claim 5 , wherein the plurality of spaced grooves have a period of about 498 nm.

7 . A method as in claim 6 , wherein the waveguide core comprises a material selected from the group consisting of Si, Si 3 N 4 , SiO x N 4 , SiC, Si x Ge y , GaAs, AlGaAs, InGaAs, and InP, where x and y are positive integers.

8 . A method as in claim 1 , further comprising forming an upper cladding material on the sides and over the waveguide core;
forming grooves in the upper cladding material which extend into the sloped portion of the waveguide core to form the optical grating; and filling the grooves with an additional upper cladding material;

9 . A method as in claim 8 wherein the additional upper cladding material is also provided over the upper cladding material and provides an upper surface of the photonic structure, wherein light emitted by the optical grating is substantially normal to the upper surface of the additional upper cladding material.

10 . A method as in claim 8 , wherein the additional upper cladding material is planarized down to the upper surface of the upper cladding material.

11 . A method of forming a photonic coupler, the method comprising:
forming a lower cladding material over an upper surface of a supporting substrate, the lower cladding material having a horizontal portion and a sloped portion coupled to the horizontal portion; forming a waveguide core material over the lower cladding material such that the waveguide core material has a horizontal portion and a sloped portion coupled to the horizontal portion; and forming a grating coupler in the sloped portion of the waveguide core such that the grating coupler is configured to transmit or receive light passing through the waveguide core.

12 . The method of claim 11 , further comprising forming an upper cladding material over the waveguide core such that the upper cladding material has a flat upper surface substantially parallel to the horizontal portion of the waveguide core.

13 . The method of claim 12 wherein the upper cladding material comprises an anti-reflective coating material.

14 . The method of claim 12 wherein forming the grating coupler comprises forming spaced grooves extending through the upper cladding material and into the sloped portion of the waveguide core.

15 . The method of claim 14 , further comprising forming an additional cladding material within the grooves of the upper cladding material and grooves of the sloped portion of the waveguide core.

16 . A photonic structure comprising:
a substrate; a photonic element supported by the substrate and having a horizontal portion and a sloped portion coupled to the horizontal portion; and a grating formed at the sloped portion for directing light into or out of the photonic element, wherein the direction of light travel out of the grating is substantially normal to the direction of travel of light in the horizontal portion of the photonic element.

17 . The photonic structure of claim 16 wherein the photonic element is a waveguide core.

18 . The photonic structure of claim 17 wherein the waveguide core is formed of silicon.

19 . The photonic structure of claim 17 wherein the material of the waveguide core comprises silicon nitride.

20 . The photonic structure of claim 16 wherein the material of the waveguide core comprises silicon oxynitride.

21 . The photonic structure of claim 16 wherein the sloped portion of the waveguide core is in the range of about 8 to about 12 degrees with respect to the horizontal portion of the waveguide core.

Assignees

• Micron Technology Inc

Inventors

• Frish Harel

Classifications

• G02B6/34

  utilising prism or grating {(G02B6/293 takes precedence)} · CPC title

• G02B2006/12092

  Stepped · CPC title

• G02B6/13

  Integrated optical circuits characterised by the manufacturing method · CPC title

• G03F7/0005

  Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor · CPC title

• G02B6/124

  Geodesic lenses or integrated gratings · CPC title