Measurement device and measurement system
US-2021251547-A1 · Aug 19, 2021 · US
US2016100768A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016100768-A1 |
| Application number | US-201414892485-A |
| Country | US |
| Kind code | A1 |
| Filing date | May 21, 2014 |
| Priority date | May 21, 2013 |
| Publication date | Apr 14, 2016 |
| Grant date | — |
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Provided is a multi-point probe which is formed of a tubular laminate which is configured by winding an electronic contact sheet including a sheet-shaped insulating base material, a plurality of electronic contacts which are arranged to be separated from each other in a column shape on the sheet-shaped insulating base material, and a plurality of wirings which are connected to each of the electronic contacts on the sheet-shaped insulating base material from a first end towards a second end and laminating the electronic contact sheet to have multiple layers, in which the electronic contacts are not covered with the sheet-shaped insulating base material and are exposed, and the wiringsther than a wiring on the uppermost layer are laminated so that at least some parts thereof are covered with the sheet-shaped insulating base material.
Opening claim text (preview).
1 . A multi-point probe which is formed of a tubular laminate which is configured by winding an electronic contact sheet including a sheet-shaped insulating base material, a plurality of electronic contacts which are arranged to be separated from each other in a column shape on the sheet-shaped insulating base material, and a plurality of wirings which are connected to each of the electronic contacts on the sheet-shaped insulating base material from a first end towards a second end and laminating the electronic contact sheet to have multiple layers, wherein the electronic contacts are not covered with the sheet-shaped insulating base material and are exposed, and the wirings other than a wiring on the uppermost layer are laminated so that at least some parts thereof are covered with the sheet-shaped insulating base material. 2 . The multi-point probe according to claim 1 , wherein the multi-point probe includes a shaft-shaped core and the electronic contact sheet is wound around an outer peripheral surface of the core. 3 . The multi-point probe according to claim 1 or 2 , wherein the plurality of electronic contacts are arranged on one surface of the sheet-shaped insulating base material along an edge portion on the first end side of the electronic contact sheet. 4 . The multi-point probe according to claim 1 , wherein the sheet-shaped insulating base material is formed so that the edge portion recedes from the first end towards the second end of the tubular laminate. 5 . The multi-point probe according to claim 1 , wherein the plurality of electronic contacts are arranged spirally in an axial direction of the tubular laminate. 6 . The multi-point probe according to claim 1 , wherein the plurality of wirings are extended along an axis line direction of the tubular laminate over a predetermined range using the plurality of electronic contacts as a starting point. 7 . The multi-point probe according to claim 1 , wherein a plurality of pads which are connected to each of the wirings and connected to an external circuit are arranged in the vicinity of the second end of the electronic contact sheet along the second end. 8 . The multi-point probe according to claim 1 , wherein the electronic contact sheet is covered with a first insulating material so that the plurality of electronic contacts and the plurality of pads are exposed. 9 . The multi-point probe according to claim 8 , wherein a first shielding conductive layer is formed on a surface other than the surface of the sheet-shaped insulating base material where the wirings are arranged. 10 . The multi-point probe according to claim 1 , wherein a second shielding conductive layer is formed on the surface of the sheet-shaped insulating base material where the wirings are arranged. 11 . The multi-point probe according to claim 1 , wherein an amplifier connected to the plurality of electronic contacts is provided on the sheet-shaped insulating base material. 12 . A multi-point probe array, wherein the plurality of multi-point probes according to claim 1 are provided on a base substrate to stand apart from each other. 13 . An electronic contact sheet configuring the multi-point probe according to claim 1 . 14 . A manufacturing method of the multi-point probe according to claim 1 , wherein the electronic contact sheet is wound from the first end towards the second end so that the plurality of electronic contacts are exposed, a second insulating material covers the entire electronic contact sheet, and the second insulating material on the plurality of electronic contacts and the plurality of pads is removed.
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