Physical quantity sensor, electronic apparatus, and moving body

Patent metadata

Field	Value
Publication number	US-2016047837-A1
Application number	US-201514817324-A
Country	US
Kind code	A1
Filing date	Aug 4, 2015
Priority date	Aug 13, 2014
Publication date	Feb 18, 2016
Grant date	—

Abstract

A physical quantity sensor includes: a base substrate; a movable portion; a plurality of movable electrode fingers which are provided in the movable portion; a fixed electrode finger which is provided on the base substrate; and a fixing portion which fixes the movable portion to the base substrate. In the movable electrode fingers, a movable electrode finger which opposes the fixing portion in the first direction is included. A clearance between the movable electrode finger and the fixing portion is smaller than a clearance between the movable electrode finger and the fixed electrode finger. The width of the movable electrode finger is greater than the width of other movable electrode finger.

First claim

What is claimed is:

1 . A physical quantity sensor comprising:
a base substrate; a movable portion which is displaceable in a first direction with respect to the base substrate; a plurality of movable electrode fingers which are provided in the movable portion, and disposed along the first direction; a fixed electrode finger which is provided on the base substrate, and disposed to oppose the movable electrode finger in the first direction; and a fixing portion which fixes the movable portion to the base substrate that is displaceable in the first direction, wherein, in the plurality of movable electrode fingers, a movable electrode finger which opposes the fixing portion in the first direction is included, wherein a clearance between the opposing movable electrode finger and the fixing portion in the first direction is smaller than a clearance between the movable electrode finger and the fixed electrode finger in the first direction, and wherein the width of the opposing movable electrode finger among the plurality of movable electrode fingers is greater than the width of other movable electrode finger.

2 . The physical quantity sensor according to claim 1 ,
wherein, at least partially at a part which opposes the movable electrode finger of the fixing portion in the first direction, a decreasing portion in which a sectional area decreases toward the movable electrode finger is provided.

3 . The physical quantity sensor according to claim 1 ,
wherein the width of the plurality of movable electrode fingers becomes smaller as being apart from a portion connected with the fixing portion of the movable portion.

4 . The physical quantity sensor according to claim 1 ,
wherein one pair of fixing portions are provided to oppose each other in the first direction via the movable portion, and wherein the movable portion is fixed to the one pair of fixing portions in both end portions in the first direction.

5 . The physical quantity sensor according to claim 4 ,
wherein, among the plurality of movable electrode fingers, a movable electrode finger which is positioned on the most end portion side of the movable portion in the first direction is the opposing movable electrode finger.

6 . The physical quantity sensor according to claim 1 ,
wherein the width of the fixed electrode finger is smaller than the width of the movable electrode finger.

7 . The physical quantity sensor according to claim 1 ,
wherein, at least partially at a part which opposes the movable electrode finger in a longitudinal direction of the fixing portion, a decreasing portion in which a sectional area decreases toward the movable electrode finger is provided.

8 . An electronic apparatus comprising:
the physical quantity sensor according to claim 1 .

9 . An electronic apparatus comprising:
the physical quantity sensor according to claim 2 .

10 . An electronic apparatus comprising:
the physical quantity sensor according to claim 3 .

11 . An electronic apparatus comprising:
the physical quantity sensor according to claim 4 .

12 . An electronic apparatus comprising:
the physical quantity sensor according to claim 5 .

13 . An electronic apparatus comprising:
the physical quantity sensor according to claim 6 .

14 . An electronic apparatus comprising:
the physical quantity sensor according to claim 7 .

15 . A moving body comprising:
the physical quantity sensor according to claim 1 .

16 . A moving body comprising:
the physical quantity sensor according to claim 2 .

17 . A moving body comprising:
the physical quantity sensor according to claim 3 .

18 . A moving body comprising:
the physical quantity sensor according to claim 4 .

19 . A moving body comprising:
the physical quantity sensor according to claim 5 .

20 . A moving body comprising:
the physical quantity sensor according to claim 6 .

Assignees

• Seiko Epson Corp

Inventors

• Tanaka Satoru

Classifications

• G01P15/125 Primary

  by capacitive pick-up · CPC title

• B81C2203/0109

  Bonding an individual cap on the substrate · CPC title

• B81B3/0013

  Structures dimensioned for mechanical prevention of stiction, e.g. spring with increased stiffness · CPC title

• G01P2015/0814

  for translational movement of the mass, e.g. shuttle type · CPC title

• G01C19/5719

  using planar vibrating masses driven in a translation vibration along an axis · CPC title