Organic light-emitting display apparatus and method of manufacturing the same
US-9343699-B2 · May 17, 2016 · US
US2016043340A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016043340-A1 |
| Application number | US-201514818390-A |
| Country | US |
| Kind code | A1 |
| Filing date | Aug 5, 2015 |
| Priority date | Aug 8, 2014 |
| Publication date | Feb 11, 2016 |
| Grant date | — |
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Provide is a display device that prevents adverse effects on pixel circuits, resulting from a process related to a sealing film, and a manufacturing method of the display device. A display device includes pixel circuits on a substrate and a sealing film having a multilayer structure on the pixel circuits. The sealing film includes a first layer being formed in contact with the pixel circuits and being made of a silicon-containing inorganic material. The first layer is a mixed film containing at least one component changing seamlessly in a stacking direction.
Opening claim text (preview).
What is claimed is: 1 . A display device comprising: pixel circuits on a substrate; and a sealing film having a multilayer structure on the pixel circuits, the sealing film comprising a first layer being formed in contact with the pixel circuits and being made of a silicon-containing inorganic material, wherein the first layer is a mixed film containing at least one component changing seamlessly in a stacking direction. 2 . The display device according to claim 1 , the sealing film further comprising a second layer being formed on at least part of a top of the first layer and being made of a resin material. 3 . The display device according to claim 2 , wherein composition of the top of the first layer has higher adhesion to a bottom of the second layer than composition of a bottom of the first layer. 4 . The display device according to claim 1 , wherein composition of a bottom of the first layer is one component selected from the group consisting of silicon nitride, silicon oxynitride, and silicon oxide. 5 . The display device according to claim 1 , wherein composition of a bottom of the first layer is silicon nitride, and composition of a top of the first layer is one component selected from the group consisting of silicon oxide and amorphous silicon. 6 . The display device according to claim 2 , wherein the resin material of the second layer is an organic resin. 7 . The display device according to claim 1 , wherein the pixel circuits include an organic electroluminescence layer. 8 . A manufacturing method of a display device, the method comprising: forming pixel circuits on a substrate; and forming a sealing film having a multilayer structure on the pixel circuits, the sealing film comprising a first layer being formed in contact with the pixel circuits and being made of a silicon-containing inorganic material, wherein the first layer is sequentially formed by changing at least one component of the first layer seamlessly in a stacking direction. 9 . The manufacturing method of the display device according to claim 8 , wherein, in a process for forming the first layer by chemical vapor deposition, types and flow rates of process gases flowing in are changed seamlessly. 10 . The manufacturing method of the display device according to claim 9 , wherein the sealing film further includes a second layer made of a resin material, and the second layer is formed on at least part of a top of the first layer.
Encapsulations · CPC title
multilayered coatings having a repetitive structure, e.g. having multiple organic-inorganic bilayers · CPC title
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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