Photonic article, process for making and using same

Patent metadata

Field	Value
Publication number	US-2016018280-A1
Application number	US-201514664247-A
Country	US
Kind code	A1
Filing date	Mar 20, 2015
Priority date	Jan 16, 2015
Publication date	Jan 21, 2016
Grant date	—

Abstract

An article to determine a sample condition includes a substrate; a reference optical cavity disposed on the substrate and comprising a reference cavity, the reference optical cavity being configured to support a reference optical resonance and to maintain an axial length of the reference cavity; and a sample optical cavity disposed on the substrate and comprising a sample cavity, the sample optical cavity being configured to support a sample optical resonance and to maintain an axial length of the sample cavity.

First claim

What is claimed is:

1 . An article comprising:
a substrate; a reference optical cavity disposed on the substrate and comprising a reference cavity, the reference optical cavity being configured to support a reference optical resonance and to maintain an axial length of the reference cavity; and a sample optical cavity disposed on the substrate and comprising a sample cavity, the sample optical cavity being configured to support a sample optical resonance and to maintain an axial length of the sample cavity.

2 . The article of claim 1 , wherein the reference optical cavity further comprises:
a first reference cavity mirror disposed at a first end of the reference cavity; and a second reference cavity mirror disposed at a second end of the reference cavity and opposing the first reference cavity mirror, wherein the reference optical cavity is configured to receive a reference gas disposed in the reference cavity and interposed between the first reference cavity mirror and the second reference cavity mirror.

3 . The article of claim 2 , wherein the sample optical cavity further comprises:
a first sample cavity mirror disposed at a first end of the sample cavity; and a second sample cavity mirror disposed at a second end of the sample cavity and opposing the first sample cavity mirror, wherein the sample optical cavity is configured to receive a sample gas disposed in the sample cavity and interposed between the first sample cavity mirror and the second sample cavity mirror.

4 . The article of claim 3 , further comprising a reference gas path in gas communication with the reference cavity and configured to provide the reference gas to the reference optical cavity.

5 . The article of claim 3 , further comprising a sample gas path in gas communication with the sample cavity and configured to provide the sample gas to the sample optical cavity.

6 . The article of claim 3 , further comprising a secondary sample optical cavity disposed on the substrate.

7 . The article of claim 6 , wherein the secondary sample optical cavity comprises:
a secondary sample cavity disposed on the substrate; and a primary mirror disposed at a first end of the secondary sample cavity; and a secondary mirror disposed at a second end of the secondary sample cavity and opposing the primary mirror, wherein the secondary sample optical cavity is configured to receive a secondary sample gas disposed in the secondary sample cavity and interposed between the primary mirror and the secondary mirror.

8 . An article comprising:
a first substrate; a second substrate spaced apart from the first substrate and opposingly disposed to the first substrate; a plurality of first mirrors disposed on the first substrate; a plurality of second mirrors disposed on the second substrate; a variable length member interposed between the first substrate and the second substrate and comprising an internal hollow portion; a reference optical cavity configured to support a reference optical resonance and comprising:
a reference cavity; and
a first pair of mirrors comprising:
one of the first mirrors; and
one of the second mirrors, such that the first pair of mirrors is opposingly arranged to one another, and the reference cavity is interposed between the first pair of mirrors and comprises the internal hollow portion; and

a sample optical cavity configured to support a sample optical resonance and comprising:
a sample cavity; and
a second pair of mirrors, different from the first pair of mirrors, and comprising:
one of the first mirrors; and
one of the second mirrors, such that the second pair of mirrors is opposingly arranged to one another, and the sample cavity is interposed between the second pair of mirrors.

9 . The article of claim 8 , wherein a length of the sample cavity is selectively adjustable, and a length of the reference cavity is selectively adjustable.

10 . The article of claim 9 , wherein the reference optical cavity is configured to receive a reference gas disposed in the reference cavity and interposed between first pair of mirrors.

11 . The article of claim 10 , wherein the sample optical cavity is configured to receive a sample gas disposed in the sample cavity and interposed between the second pair of mirrors.

12 . The article of claim 11 , further comprising a reference gas path in gas communication with the reference cavity and configured to provide the reference gas to the reference optical cavity.

13 . The article of claim 12 , further comprising a sample gas path in gas communication with the sample cavity and configured to provide the sample gas to the sample optical cavity.

14 . The article of claim 13 , further comprising a secondary sample optical cavity comprising:
a secondary sample cavity; and a third pair of mirrors comprising:
one of the first mirrors; and
one of the second mirrors, such that the third pair of mirrors is opposingly arranged to one another, and the secondary sample cavity is interposed between the third pair of mirrors,
wherein the secondary sample optical cavity is configured to receive a secondary sample gas disposed in the secondary sample cavity and interposed between the third pair of mirrors.

15 . A system to determine a pressure of an analyte gas, the system comprising:
an article comprising:
a substrate;
a reference optical cavity disposed on the substrate and comprising a reference cavity interposed between a first pair of mirrors, the reference optical cavity being configured to support a reference optical resonance and to receive a reference gas disposed in the reference cavity; and
a sample optical cavity disposed on the substrate and comprising a sample cavity interposed between a second pair of mirrors, the sample optical cavity being configured to support a sample optical resonance and to receive a sample gas disposed in the sample cavity;
a sample gas source in gas communication with the sample optical cavity to provide the sample gas; and a null detector in gas communication with an analyte gas source and the sample gas source, the null detector configured to produce a response to a difference in pressure between the analyte gas and sample gas.

16 . The system of claim 15 , further comprising an analyzer configured:
to receive the response from the null detector; and to determine a pressure of the analyte gas based on the response from the null detector.

17 . A process for determining a sample condition, the process comprising:
introducing a reference light to a reference cavity; adjusting the reference light to the reference cavity; transmitting the reference light from the reference cavity; introducing a sample light to a sample cavity; adjusting the sample light to the sample cavity; transmitting the sample light from the sample cavity; detecting the sample light; providing feedback for locking the reference light to the reference cavity; providing feedback for locking the sample light to the sample cavity; combining the reference light with the sample light; detecting a beat frequency, based on the reference light and the sample light; and determining a sample condition, based on the beat frequency.

18 . The process of claim 17 , wherein the sample condition comprises pressure, temperature, or refractive index.

19 . A process for determining a sample condition, the process comprising:
introducing a reference light to a reference cavity; adjusting the reference light to the reference cavity; transm

Assignees

• Nat Inst Of Standards & Tech

Inventors

• Hendricks Jay H
• Strouse Gregory F
• Ricker Jacob E
• Olson Douglas A
• Scace Gregory E
• Stone Jack A
• Egan Patrick F

Classifications

• G01N21/45

  using interferometric methods; using Schlieren methods · CPC title

• G01K11/00

  Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 · CPC title

• G01L11/02 Primary

  by optical means · CPC title

• G01M11/0228

  by measuring refractive power · CPC title