Spherical shape measurement method and apparatus

Patent metadata

Field	Value
Publication number	US-2016018216-A1
Application number	US-201514800230-A
Country	US
Kind code	A1
Filing date	Jul 15, 2015
Priority date	Jul 17, 2014
Publication date	Jan 21, 2016
Grant date	—

Abstract

A partial spherical shape of each measurement area of a sphere to be measured, which is established so as to have an area overlapping with another measurement area adjacent to each other, is measured at each rotation position, and the surface shape is measured by joining the partial spherical shapes of the measurement areas by a stitching operation based on the shape of the overlapping area. The position at which the sphere is measured is changed and re-held. A positional displacement between half parts of the sphere before and after re-holding, which is caused by an effect of an error owing to the re-holding, is separated into three rotational components. Magnitudes of the three rotational components are quantified by image correlation and the positional displacement corrected. Then, the stitching operation is performed to measure the entire part of the sphere surface.

First claim

1 . A spherical shape measurement method for measuring a surface shape, the method including:
freely rotating a sphere to be measured; measuring a partial spherical shape of each measurement area, which is established so as to have an area overlapping with another measurement area adjacent to each other, at each rotation position; and joining the partial spherical shapes of the measurement areas by a stitching operation based on a shape of the overlapping area, thereby measuring the surface shape, the method comprising the steps of: enabling the sphere to be re-held at a different position; and separating a positional displacement between half parts of the sphere before and after re-holding, which is caused by an effect of an error owing to the re-holding of the sphere, into three rotational components, performing quantification of magnitudes of the three rotational components by image correlation, correcting the positional displacement, and thereafter performing the stitching operation to measure entire part of sphere surface.

2 . The spherical shape measurement method according to claim 1 , wherein the image correlation is image correlation of only translation.

3 . The spherical shape measurement method according to claim 2 , wherein the three rotational components are displacements about three axes including a polar axis of the half parts of the sphere before and after the re-holding, respectively.

4 . The spherical shape measurement method according to claim 1 , wherein the image correlation includes image correlation for correcting rotation.

5 . A spherical shape measurement apparatus comprising:
surface shape measurement unit for measuring a partial shape of a spherical surface; and measurement position change mechanism for freely rotating a sphere to be measured relative to the surface shape measurement unit, the surface shape measurement unit measuring a partial spherical shape of each measurement area, which is established so as to have an area overlapping with another measurement area adjacent so each other, at each rotation position, the surface shape being measured by joining the partial spherical shapes of the measurement areas by a stitching operation based on a shape of an overlapping area, wherein the spherical shape measurement apparatus further comprises: a sphere hold mechanism to which the sphere is freely attachable and detachable; a sphere support table for holding the sphere detached from the sphere hold mechanism; a controller for chancing a position at which the sphere is re-held; and a computer for separating a positional displacement between half parts of the sphere before and after re-holding, which is caused by an effect of an error owing to the re-holding of the sphere, into three rotational components, performing quantification of magnitudes of the three rotational components by image correlation, correcting the positional displacement, and thereafter performing the stitching operation to measure entre part of sphere surface.

6 . The spherical shape measurement apparatus according to claim 5 , wherein
the surface shape measurement unit is a laser interferometer, and the measurement position chance mechanism rotates the sphere about a first rotation axis and a second rotation axis orthogonal to the first rotation axis.

7 . The spherical shape measurement apparatus according to claim 5 , wherein the sphere support table has a recess at a top surface thereof to receive and support the sphere detached from the sphere hold mechanism therein.

8 . The spherical shape measurement apparatus according to claim 5 , further comprising a mechanism for moving up and down the sphere support table.

9 . The spherical shape measurement apparatus according to claim 5 , further comprising a mechanism for retracting the sphere hold mechanism, while the sphere is detached.

10 . The spherical shape measurement apparatus according to claim 5 , further comprising a mechanism for rotating the sphere support table.

11 . The spherical shape measurement apparatus according to claim 10 , wherein a rotation axis of the mechanism for rotating the sphere support table and the second rotation axis of the measurement position change mechanism are coaxial with each other.

12 . The spherical shape measurement apparatus according to claim 5 , further comprising a movement mechanism in three axes directions to adjust a relative position between the sphere and the surface shape measurement unit.

Assignees

• Mitutoyo Corp

Inventors

• Hagino Takeshi
• Yokoyama Yuichiro

Classifications

• G01B2210/52

  Combining or merging partially overlapping images to an overall image · CPC title

• G01B9/02039

  by matching the wavefront with a particular object surface shape · CPC title

• G01B5/0004

  Supports (G01B5/025 takes precedence) · CPC title

• G01B11/2441 Primary

  using interferometry · CPC title

• G01B9/02041

  characterised by particular imaging or detection techniques · CPC title