Method for fabricating a liquid-crystal-based electro-optical light modulator using surface mems techniques for flat panel display inspection
US-2024085728-A1 · Mar 14, 2024 · US
US2016018080A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016018080-A1 |
| Application number | US-201414336156-A |
| Country | US |
| Kind code | A1 |
| Filing date | Jul 21, 2014 |
| Priority date | Jul 21, 2014 |
| Publication date | Jan 21, 2016 |
| Grant date | — |
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
What the patent document calls the invention.
A short plain-language summary of the technical disclosure.
Who owns or filed the patent and who is credited as inventor.
Filing, priority, publication, and grant dates set the timeline.
The legal scope of protection — read this for what is actually claimed.
Technology tags used to group this patent with similar filings.
Prior art links and similar publications in this corpus.
Official abstract text for this publication.
Provided is a method including depositing a reflecting layer on a base layer. The method further includes depositing a first oxide layer on the reflecting layer. The method further includes depositing a second oxide layer on the first oxide layer. The method further includes depositing an alternating plurality of a relatively low refractive index oxide layer material and a relatively high refractive index oxide layer material on the second oxide layer.
Opening claim text (preview).
We claim: 1 . A method, comprising: depositing a reflecting layer on a substrate; depositing a first oxide layer on the reflecting layer; depositing a second oxide layer on the first oxide layer; and depositing an alternating plurality of a relatively low refractive index oxide layer material and a relatively high refractive index oxide layer material on the second oxide layer. 2 . The method of claim 1 , wherein the first oxide layer includes a relatively low refractive index oxide layer material and the second oxide layer includes relatively high refractive index oxide layer material. 3 . The method of claim 2 , wherein the alternating plurality of a relatively low refractive index oxide layer material and a relatively high refractive index oxide layer material includes a third oxide layer. 4 . The method of claim 3 , wherein the third oxide layer is a relatively low refractive index oxide layer material. 5 . The method of claim 1 , wherein the first oxide layer is a relatively high refractive index oxide layer material and the second oxide layer is relatively low refractive index oxide layer material. 6 . The method of claim 5 , wherein the alternating plurality of a relatively low refractive index oxide layer material and a relatively high refractive index oxide layer material includes a third oxide layer. 7 . The method of claim 6 , wherein the third oxide layer is a relatively high refractive index oxide layer material. 8 . The method of claim 1 , wherein the reflecting layer is aluminum. 9 . The method of claim 8 , wherein the relatively low refractive index layer material is SiO 2 . 10 . The method of claim 9 , wherein the relatively high refractive index layer material is at least one of TiO 2 and Nb 2 O 5 . 11 . A multi-reflector lighting apparatus, comprising: a reflector having a reflecting layer deposited on a base layer; a first oxide layer deposited on the reflecting layer; a second oxide layer deposited on the first oxide layer; and an alternating plurality of a relatively low refractive index oxide layer material and a relatively high refractive index oxide layer material deposited on the second oxide layer. 12 . The apparatus of claim 11 , wherein the first oxide layer includes a relatively low refractive index oxide layer material and the second oxide layer includes relatively high refractive index oxide layer material. 13 . The apparatus of claim 12 , wherein the alternating plurality of a relatively low refractive index oxide layer material and a relatively high refractive index oxide layer material includes a third oxide layer. 14 . The apparatus of claim 13 , wherein the third oxide layer includes a relatively low refractive index oxide layer material. 15 . The apparatus of claim 11 , wherein the first oxide layer includes a relatively high refractive index oxide layer material and the second oxide layer includes relatively low refractive index oxide layer material. 16 . The apparatus of claim 15 , wherein the alternating plurality of a relatively low refractive index oxide layer material and a relatively high refractive index oxide layer material includes a third oxide layer. 17 . The apparatus of claim 16 , wherein the third oxide layer includes a relatively high refractive index oxide layer material. 18 . The apparatus of claim 11 , wherein the reflecting layer includes aluminum. 19 . The apparatus of claim 18 , wherein the relatively low refractive index layer material includes SiO 2 . 20 . The apparatus of claim 19 , wherein the relatively high refractive index layer material includes at least one of TiO 2 and Nb 2 O 5 .
Light-emitting diodes [LED] · CPC title
comprising inorganic materials only · CPC title
Mirrors {(vehicle mirrors involving special optical features B60R1/08)} · CPC title
specially adapted for generating a spot light distribution, e.g. for substitution of reflector lamps · CPC title
characterised by coatings · CPC title
Related publications grouped by family.
Answers are generated from the same data shown on this page.