Deposition apparatus with gas supply and method for depositing material
US-2015368783-A1 · Dec 24, 2015 · US
Hard film for machining tools and hard film-coated metal machining tool
US2016017478A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016017478-A1 |
| Application number | US-201314775419-A |
| Country | US |
| Kind code | A1 |
| Filing date | Mar 28, 2013 |
| Priority date | Mar 28, 2013 |
| Publication date | Jan 21, 2016 |
| Grant date | — |
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Abstract
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A tool hard film that is to be disposed as coating on a surface of a tool, the tool hard film being a TiCrMoWV oxycarbide, oxynitride, or oxycarbonitride having a phase with a NaCl-type crystal structure as a main phase, the oxycarbide, oxynitride, or oxycarbonitride having fine crystals due to introduction of oxygen.
First claim
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1 . A tool hard film that is to be disposed as coating on a surface of a tool, the tool hard film being a TiCrMoWV oxycarbide, oxynitride, or oxycarbonitride having a phase with a NaCl-type crystal structure as a main phase, the oxycarbide, oxynitride, or oxycarbonitride having fine crystals due to introduction of oxygen. 2 . The tool hard film of claim 1 , wherein the TiCrMoWV oxycarbide is represented by (Ti a Cr b Mo c W d V e ) 1-x-y C x O y , and wherein atom ratios thereof are 0.2≦a≦0.7, 0.01≦b≦0.4, 0.05≦c≦0.5, 0<d≦0.05, 0<e=1-a-b-c-d≦0.05, 0.3≦x+y≦0.6, and 0<y≦0.15. 3 . The tool hard film of claim 1 , wherein the TiCrMoWV oxycarbonitride is represented by (Ti a Cr b Mo c W d V e ) 1-x-y-z C x N y O z , and wherein atom ratios thereof are 0.2≦a≦0.7, 0.01≦b≦0.4, 0.05≦c≦0.5, 0<d≦0.05, 0<e=1-a-b-c-d≦0.05, 0.3≦x+y+z≦0.6, 0<y≦0.5, and 0<z≦0.15. 4 . The tool hard film of claim 1 , wherein the TiCrMoWV oxynitride is represented by (Ti a Cr b Mo c W d V e ) 1-x-y N x O y , and wherein atom ratios thereof are 0.2≦a≦0.7, 0.01≦b≦0.4, 0.05≦c≦0.5, 0<d≦0.05, 0<e=1-a-b-c-d≦0.05, 0.3≦x+y≦0.6, and 0<y≦0.15. 5 . The tool hard film of claim 1 , wherein the tool hard film has a crystal grain diameter of 100 nm or less. 6 . The tool hard film of claim 1 , wherein the tool hard film is a 0.2 to 10.0 μm thick single layer coating the surface of the tool. 7 . A hard-film-coated metal machining tool having the tool hard film of claim 1 disposed as coating on a surface of the tool.
Assignees
Inventors
Classifications
characterised by the coating material ({C23C14/0021} , C23C14/04 take precedence) · CPC title
Carbides · CPC title
Nitrides (C23C14/0617 takes precedence) · CPC title
- C23C14/0676Primary
Oxynitrides · CPC title
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- What does patent US2016017478A1 cover?
- A tool hard film that is to be disposed as coating on a surface of a tool, the tool hard film being a TiCrMoWV oxycarbide, oxynitride, or oxycarbonitride having a phase with a NaCl-type crystal structure as a main phase, the oxycarbide, oxynitride, or oxycarbonitride having fine crystals due to introduction of oxygen.
- Who is the assignee on this patent?
- Sakurai Masatoshi, Wang Mei, OHCHI Toshihiro, and 5 more
- What technology area does this patent fall under?
- Primary CPC classification C23C14/0676. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Thu Jan 21 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).