Resins for underlayers

Patent metadata

Field	Value
Publication number	US-2016016872-A1
Application number	US-201514792968-A
Country	US
Kind code	A1
Filing date	Jul 7, 2015
Priority date	Jul 15, 2014
Publication date	Jan 21, 2016
Grant date	—

Abstract

Polymeric reaction products of certain substituted tetraarylmethane monomers are useful as underlayers in semiconductor manufacturing processes.

First claim

What is claimed is:

1 . A polymeric reaction product comprising polymerized units of one or more tetraaryl monomers of formula (1)

wherein AG represents an activating group chosen from OR, NR 2 , and SR; Ar 1 , Ar 2 , Ar 3 and Ar 4 independently represent an aryl moiety; R is independently chosen from H, an optionally substituted C 1-30 alkyl, an optionally substituted C 2-30 alkenyl moiety, an optionally substituted C 2-30 alkynyl moiety, an optionally substituted C 7-30 aralkyl moiety, or an optionally substituted C 6-20 aryl moiety; R 1 , R 2 , R 3 , and R 4 are independently chosen from an optionally substituted C 1-30 alkyl, an optionally substituted C 2-30 alkenyl moiety, an optionally substituted C 2-30 alkynyl moiety, an optionally substituted C 7-30 aralkyl moiety, or an optionally substituted C 6-20 aryl moiety; any 2 of Ar 1 , Ar 2 , Ar 3 and Ar 4 may be taken together along with the carbon to which they are attached to form a 5 or 6-membered fused alicyclic ring; a is an integer from 0 to 4; and b, c, and d are independently integers from 0 to 5.

2 . The polymeric reaction product of claim 1 wherein AG is OR.

3 . The polymeric reaction product of claim 1 wherein the tetraaryl monomer has the general formula (1-1) or (1-2):

wherein AG, Ar 1 , Ar 2 Ar 3 , Ar 4 , R 1 , R 2 , R 3 , R 4 , a, and b are as defined above; a′ is an integer from 0 to 3; and c′ and d′ are independently integers from 0 to 4.

4 . The polymeric reaction product of claim 1 wherein the tetraaryl monomer has the general formula (1-2):

wherein AG, Ar 1 , Ar 2 , Ar 3 , Ar 4 , R 1 , R 2 , R 3 , R 4 , a, and b are as defined above; and c″ and d″ are independently integers from 0 to 4.

5 . The polymeric reaction product of claim 1 wherein Ar 1 , Ar 2 , Ar 3 and Ar 4 are independently chosen from phenyl, biphenyl, naphthalenyl, anthracenyl, phenanthrenyl, pyrenyl, tetracenyl, triphenylenyl, tetraphenyl, benzo[f]tetraphenyl, benzo[m]tetraphenyl, benzo[k]tetraphenyl, pentacenyl, perylenyl, benzo[a]pyrenyl, benzo[e]pyrenyl, benzo[ghi]perylenyl, coronenyl, quinolonyl, 7,8-benzoquinolinyl, fluorenyl, chrysenyl, triphenylenyl, and 12H-dibenzo[b,h]fluorenyl.

6 . A composition comprising the polymeric reaction product of claim 1 , an organic solvent, and optionally one or more additives chosen from curing agents and surfactants.

7 . The composition of claim 6 wherein the curing agent is an acid or a thermal acid generator.

8 . A method of forming a patterned layer comprising disposing a layer of the composition of claim 6 on a substrate; removing organic solvent to form a polymeric underlayer; disposing a layer of a photoresist on the polymeric underlayer; exposing the photoresist layer to actinic radiation through a mask; developing the exposed photoresist layer to form a resist pattern; and transferring the pattern to the polymeric underlayer to expose portions of the substrate.

9 . A tetraaryl methane monomer having the formula (1)

wherein AG represents an activating group chosen from OR, NR 2 , and SR; Ar 1 , Ar 2 , Ar 3 and Ar 4 independently represent an aryl moiety; R is independently chosen from H, an optionally substituted C 1-30 alkyl, an optionally substituted C 2-30 alkenyl moiety, an optionally substituted C 2-30 alkynyl moiety, an optionally substituted C 7-30 aralkyl moiety, or an optionally substituted C 6-20 aryl moiety; R 1 , R 2 , R 3 , and R 4 are independently chosen from an optionally substituted C 1-30 alkyl, an optionally substituted C 2-30 alkenyl moiety, an optionally substituted C 2-30 alkynyl moiety, an optionally substituted C 7-30 aralkyl moiety, or an optionally substituted C 6-20 aryl moiety; any 2 of Ar 1 , Ar 2 , Ar 3 and Ar 4 may be taken together along with the carbon to which they are attached to form a 5 or 6-membered fused alicyclic ring; a is an integer from 0 to 4; and b, c, and d are independently integers from 0 to 5; wherein at least one of Ar 1 , Ar 2 , Ar 3 and Ar 4 is an aryl moiety having 2 or more fused aromatic rings when none of Ar 1 , Ar 2 , Ar 3 and Ar 4 are joined to form a 5 or 6-membered fused alicyclic ring.

Assignees

• Rohm & Haas Elect Mat
• Rohm & Haas Elect Mat

Inventors

• Aqad Emad
• Li Mingqi
• Yamada Shintaro
• Cho Sung Wook

Classifications

• G03F7/20

  Exposure; Apparatus therefor (photographic printing apparatus for making copies G03B27/00) · CPC title

• C07C2103/50

  Chemistry & Metallurgy · mapped topic

• C09D161/06

  of aldehydes with phenols · CPC title

• C07C2103/12

  Chemistry & Metallurgy · mapped topic

• G03F7/32

  Liquid compositions therefor, e.g. developers · CPC title