Processing apparatus

Patent metadata

Field	Value
Publication number	US-2016016331-A1
Application number	US-201514800904-A
Country	US
Kind code	A1
Filing date	Jul 16, 2015
Priority date	Jul 18, 2014
Publication date	Jan 21, 2016
Grant date	—

Abstract

A processing apparatus includes a chuck table for holding a plate-like workpiece under suction. A suction unit is connected to the chuck table, and a processing unit is configured to process the workpiece while supplying processing water to the workpiece. The suction unit includes a first suction source, a first pipe providing fluid communication between the first suction source and the chuck table, a separator arranged in the first pipe, for separating a gas and a liquid drawn in from the chuck table, and a water discharging unit configured to discharge the liquid separated by the separator. The water discharging unit includes a second suction source, a second pipe providing fluid communication between the second suction source and a water discharge port of the separator, and a check valve arranged in the second pipe, for preventing a fluid from flowing from the second suction source to the separator.

First claim

What is claimed is:

1 . A processing apparatus comprising:
a chuck table for holding a plate-like workpiece under suction; suction means connected to said chuck table, for causing said chuck table to generate a suction force; and processing means for processing the plate-like workpiece held by said chuck table while supplying processing water to the plate-like workpiece; wherein said suction means includes:
a first suction source;
a first pipe providing fluid communicat…

Assignees

• Disco Corp

Inventors

• Nagao Ryosuke

Classifications

• H10P72/0604

  Electricity · mapped topic

• H10P72/0402

  Electricity · mapped topic

• H10P72/78

  Electricity · mapped topic

• B24B55/02

  Operations & Transport · mapped topic

• B24B49/08

  Operations & Transport · mapped topic