Void-arranged structure and measurement method using the same

Patent metadata

Field	Value
Publication number	US-2016011104-A1
Application number	US-201514862340-A
Country	US
Kind code	A1
Filing date	Sep 23, 2015
Priority date	Mar 25, 2013
Publication date	Jan 14, 2016
Grant date	—

Abstract

A void-arranged structure that includes a pair of principal surfaces opposing each other and a plurality of void sections that penetrate through the pair of principal surfaces. The void-arranged structure is configured of a plurality of unit structures each of which includes a first void section and a second void section having a different shape from a shape of the first void section, and the overall shape of the unit structure, when the principal surface is viewed from above, is not mirror-symmetric with respect to a predetermined imaginary plane orthogonal to the principal surface of the void-arranged structure.

First claim

1 . A void-arranged structure comprising:
a pair of principal surfaces opposing each other; and a plurality of unit structures each of which has a same shape and includes at least two void sections aligned at a predetermined interval, which are connected two-dimensionally and periodically along a direction of a first principal surface of the pair of principal surfaces, and wherein the void sections penetrate through the pair of principal surfaces, wherein each unit structure of the plurality of unit structures includes a first void section and a second void section having a different shape from a shape of the first void section, and an overall shape of each unit structure, when viewed from the first principal surface, is not mirror-symmetric with respect to a predetermined imaginary plane orthogonal to the first principal surface of the void-arranged structure.

2 . The void-arranged structure according to claim 1 , wherein the imaginary plane is a plane perpendicular to a polarizing direction of electromagnetic waves irradiated on the void-arranged structure.

3 . The void-arranged structure according to claim 2 , wherein a shape of the first void section is not mirror-symmetric with respect to the imaginary plane.

4 . The void-arranged structure according to claim 1 , wherein a shape of the first void section is not mirror-symmetric with respect to the imaginary plane.

5 . The void-arranged structure according to claim 1 , wherein a ratio of a number of the first void sections to a total of the void sections included in the unit structure is greater than 50%.

6 . The void-arranged structure according to claim 1 , wherein a ratio of a number of the first void sections to a total of the void sections included in the unit structure is equal to or greater than 75%.

7 . A measurement method for measuring a measurement object comprising:
holding a measurement object on the void-arranged structure according to claim 1 ; irradiating the void-arranged structure on which the measurement object is held with electromagnetic waves and detecting characteristics of the electromagnetic waves having been scattered at the void-arranged structure; and calculating a presence/absence or quantity of the measurement object from the detected characteristics of the electromagnetic waves.

8 . The measurement method according to claim 7 , wherein the electromagnetic waves strike the void-arranged structure in a direction perpendicular to at least one of the pair of principal surfaces of the void-arranged structure.

9 . The measurement method according to claim 7 , wherein the imaginary plane is a plane perpendicular to a polarizing direction of electromagnetic waves irradiated on the void-arranged structure.

10 . The measurement method according to claim 9 , wherein a shape of the first void section is not mirror-symmetric with respect to the imaginary plane.

11 . The measurement method according to claim 7 , wherein a shape of the first void section is not mirror-symmetric with respect to the imaginary plane.

12 . The measurement method according to claim 7 , wherein a ratio of a number of the first void sections to a total of the void sections included in the unit structure is greater than 50%.

13 . The measurement method according to claim 7 , wherein a ratio of a number of the first void sections to a total of the void sections included in the unit structure is equal to or greater than 75%.

Assignees

• Murata Manufacturing Co

Inventors

• Kondo Takashi
• Kamba Seiji
• Takigawa Kazuhiro

Classifications

• G01N2201/02

  Mechanical · CPC title

• G01N2201/06113

  Coherent sources; lasers · CPC title

• G01J5/0831

  Masks; Aperture plates; Spatial light modulators · CPC title

• G01J1/0437

  using masks, aperture plates, spatial light modulators, spatial filters, e.g. reflective filters · CPC title

• G01J3/0216

  using light concentrators or collectors or condensers · CPC title