Component Comprising Stacked Functional Structures and Method for Producing Same
US-2015380634-A1 · Dec 31, 2015 · US
US2016007486A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016007486-A1 |
| Application number | US-201514754261-A |
| Country | US |
| Kind code | A1 |
| Filing date | Jun 29, 2015 |
| Priority date | Jul 2, 2014 |
| Publication date | Jan 7, 2016 |
| Grant date | — |
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There is provided a package substrate including: a substrate on which a circuit layer and an insulating layer are stacked; a metal post provided in an outside region of at least any one of an upper surface and a lower surface of the substrate; an electronic component mounted in a cavity formed by the metal post; and a metal lid bonded to an upper portion of the metal post.
Opening claim text (preview).
What is claimed is: 1 . A package substrate, comprising: a substrate configured by stacking a circuit layer and an insulating layer; a metal post provided in an outside region of at least any one of an upper surface and a lower surface of the substrate; an electronic component mounted in a cavity formed by the metal post; and a metal lid bonded to an upper portion of the metal post. 2 . The package substrate according to claim 1 , wherein the metal post and the metal lid are made of the same metal material. 3 . The package substrate according to claim 1 , wherein the metal post and the metal lid are made of at least one metal material selected from a group consisting of Kovar, alloy, nickel (Ni), cobalt (Co), and chromium (Cr). 4 . The package substrate according to claim 1 , wherein a height of the metal post is determined depending on a thickness of the electronic component. 5 . The package substrate according to claim 1 , wherein a width of the metal post is determined depending on a size of the electronic component. 6 . The package substrate according to claim 1 , wherein the electronic component is at least any one selected from a group consisting of an RF chip, an IC chip, a capacitor, an inductor, and a resistor. 7 . The package substrate according to claim 1 , further comprising: a sealing material provided in the cavity to seal the electronic component. 8 . The package substrate according to claim 1 , wherein the metal post is configured of a vertical part and a horizontal part which is bonded to an upper portion of the vertical part and formed to have a larger width than the vertical part. 9 . The package substrate according to claim 1 , further comprising: a metal layer provided between the metal post and the metal lid. 10 . A method for manufacturing a package substrate, comprising: forming a substrate configured by stacking a circuit layer and an insulating layer; attaching a resist to at least any one of an upper surface and a lower surface of the substrate; removing an outside portion of the resist; forming a metal post in an outside region of the substrate which is exposed to the outside by removing the outside portion of the resist; delaminating the resist; and mounting an electronic component in a cavity formed by the metal post and bonding a metal lid to an upper portion of the metal post. 11 . The method according to claim 10 , wherein in the removing of the outside portion of the resist, a mask is disposed in the remaining portion except for the outside portion of the resist and then is subjected to an exposure and developing process. 12 . The method according to claim 11 , wherein a size of the mask is changed depending on a size of the electronic component. 13 . The method according to claim 10 , wherein in the forming of the metal post, the outside region of the substrate is plated with a metal material. 14 . The method according to claim 13 , wherein a plated amount of the metal material is controlled depending on a thickness of the electronic component. 15 . The method according to claim 10 , wherein the bonding of the metal lid is performed using at least any one of seam welding, laser welding, and brazing welding. 16 . The method according to claim 10 , wherein prior to the bonding of the metal lid, a sealing material is filled in the cavity to seal the electronic component. 17 . A method for manufacturing a package substrate, comprising: forming a substrate configured by stacking a circuit layer and an insulating layer; bonding a first resist to at least any one of an upper surface and a lower surface of the substrate; removing an outside portion of the first resist; forming a vertical part of a metal post in an outside region of the substrate which is exposed to the outside by removing the outside portion of the first resist; stacking a second resist on an upper portion of the first resist including the vertical part; removing an outside portion of the second resist at a larger width than a width of the vertical part; forming a horizontal part of the metal post in a region which is exposed to the outside by removing the outside portion of the second resist; delaminating the first and second resists; and mounting an electronic component in a cavity formed by the vertical part and the horizontal part of the metal post and bonding a metal lid to an upper portion of the horizontal part.
Solid or gel fillings · CPC title
Encapsulations, e.g. protective coatings · CPC title
comprising multiple insulating layers · CPC title
Through-vias · CPC title
of vias therein · CPC title
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