Semiconductor device and method of manufacturing the same
US-2015371944-A1 · Dec 24, 2015 · US
Semiconductor device
US2016005752A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016005752-A1 |
| Application number | US-201514611929-A |
| Country | US |
| Kind code | A1 |
| Filing date | Feb 2, 2015 |
| Priority date | Jul 1, 2014 |
| Publication date | Jan 7, 2016 |
| Grant date | — |
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Abstract
Official abstract text for this publication.
According to an embodiment, a semiconductor device includes a semiconductor substrate, a first region that is provided on the semiconductor substrate and has a line-and-space pattern extending in a first direction, and a second region that is provided adjacent to the first region on the semiconductor substrate and has a dummy pattern. The surface area per unit area of the second region is greater than the surface area per unit area of the first region.
First claim
Opening claim text (preview).
What is claimed is: 1 . A semiconductor device, comprising: a semiconductor substrate including a first region and a second region adjacent to the first region, wherein a first line-and-space pattern extending along the semiconductor substrate in a first direction is disposed in the first region, and a dummy pattern is disposed in the second region and has a surface area per unit area that is greater than a surface area of per unit area of the first line-and-space pattern.…
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Inventors
Classifications
Electricity · mapped topic
- H01L27/11548Primary
Electricity · mapped topic
Electricity · mapped topic
- H10B41/10Primary
Electricity · mapped topic
Electricity · mapped topic
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- What does patent US2016005752A1 cover?
- According to an embodiment, a semiconductor device includes a semiconductor substrate, a first region that is provided on the semiconductor substrate and has a line-and-space pattern extending in a first direction, and a second region that is provided adjacent to the first region on the semiconductor substrate and has a dummy pattern. The surface area per unit area of the second region is great…
- Who is the assignee on this patent?
- Toshiba Kk
- What technology area does this patent fall under?
- Primary CPC classification H01L27/11548. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Thu Jan 07 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).