Semiconductor gas sensor device and manufacturing method thereof
US-2015377813-A1 · Dec 31, 2015 · US
US2016003757A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016003757-A1 |
| Application number | US-201514726823-A |
| Country | US |
| Kind code | A1 |
| Filing date | Jun 1, 2015 |
| Priority date | Jul 2, 2014 |
| Publication date | Jan 7, 2016 |
| Grant date | — |
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A gas measurement device measures gas using a gas sensor including a sense resistance exposed to the gas and a reference resistance not exposed to the gas. The gas measurement device applies a first current value and a second current value to the sensor. A detector functions to detect a first resistance variation and a second resistance variation of the sense resistance exposed to the gas with respect to the reference resistance as a function of the first current value and the second current value, respectively. The resistance variation dependent on relative humidity is then determined as a function of the first and second resistance variations and a first constant. The resistance variation dependent on gas content is then determined as a function of the first and second resistance variations and a second (different) constant.
Opening claim text (preview).
1 . A gas measurement device for measuring gas using a gas sensor comprising at least one resistance exposed to at least one gas and at least one reference resistance not exposed to the gas, said gas measurement device comprising: a managing device configured to manage the gas sensor so that the gas sensor receives at least a first current value Il and a second current value Ih, a detector configured to detect a first resistance variation ΔR(Il) and a second resistance variation ΔR(Ih) of the resistance exposed to the gas with respect to the reference resistance as a function of the first current value Il and the second current value Ih respectively, and a calculation circuit configured to calculate: a resistance variation dependent on relative humidity and a resistance variation dependent on gas concentration as a function of first resistance variation ΔR(Il) and the second resistance variation ΔR(Ih). 2 . The gas measurement device according to claim 1 , wherein the calculation circuit is configured to: calculate the resistance variation dependent on relative humidity as a function of a difference between the first ΔR(Il) resistance variation multiplied by a first constant K 1 and the second ΔR(Ih) resistance variation; and calculate the resistance variation dependent on gas concentration as a function of a difference between the first ΔR(Il) resistance variation multiplied by a second constant K 2 and the second resistance variation ΔR(Ih), wherein the first constant and the second constant have different values. 3 . The gas measurement device according to claim 1 , wherein the calculation of the resistance variation dependent relative humidity utilizes the following equation K 1 ×ΔR(Il)−ΔR(Ih) and the calculation of the resistance variation dependent on gas concentration utilizes the following equation K 2 ×ΔR(Il)−ΔR(Ih), wherein K 1 and K 2 are first and second, different, constants. 4 . The gas measurement device according to claim 3 , wherein the values of the first and second constants are 1.827 and 2.165. 5 . A measurement apparatus, comprising: a gas measurement device comprising: a managing device configured to manage the gas sensor so that the gas sensor receives at least a first current value Il and a second current value Ih, a detector configured to detecting a first resistance variation ΔR(Il) and a second resistance variation ΔR(Ih) of the resistance exposed to the gas with respect to the reference resistance as a function of the first current value Il and the second current value Ih respectively, a calculation circuit configured to calculate: a resistance variation dependent on relative humidity and a resistance variation dependent on gas concentration as a function of first resistance variation ΔR(Il) and the second resistance variation ΔR(Ih); and a gas sensor comprising at least one resistance exposed to the gas and at least one reference resistance not exposed to the gas. 6 . The measurement apparatus according to claim 5 , wherein the calculation circuit is configured to: calculate the resistance variation dependent on relative humidity as a function of a difference between the first ΔR(Il) resistance variation multiplied by a first constant K 1 and the second ΔR(Ih) resistance variation; and calculate the resistance variation dependent on gas concentration as a function of a difference between the first ΔR(Il) resistance variation multiplied by a second constant K 2 and the second resistance variation ΔR(Ih), wherein the first constant and the second constant have different values. 7 . The measurement apparatus according to claim 6 , wherein said gas sensor is a Wheatstone bridge. 8 . A method for measuring gas by means of a gas sensor comprising at least one resistance exposed to at least one gas and at least one reference resistance not exposed to the gas, said method comprising: sending a first current value Il to the gas sensor, detecting the first resistance variation ΔR(Il) of the resistance R 2 exposed to the gas with respect to the reference resistance R 1 , sending a second current value Ih to the gas sensor, detecting the second resistance variation ΔR(Ih) of the resistance R 2 exposed to the gas with respect to the reference resistance R 1 , and calculating a resistance variation dependent on relative humidity and calculating a resistance variation dependent on gas concentration as a function of the first resistance variation ΔR(Il) and the second resistance variation ΔR(Ih). 9 . The method according to claim 8 , wherein: calculating the resistance variation dependent on relative humidity comprises calculating a difference between the first ΔR(Il) resistance variation multiplied by a first constant K 1 and the second ΔR(Ih) resistance variation; and calculating the resistance variation dependent on gas concentration comprises calculating a difference between the first ΔR(Il) resistance variation multiplied by a second constant K 2 and the second resistance variation ΔR(Ih), wherein the first constant and the second constant have different values. 10 . The method according to claim 9 , wherein the calculation of the resistance variation dependent relative humidity utilizes the following equation K 1 ×ΔR(Il)−ΔR(Ih) and the calculation of the resistance variation dependent on gas concentration utilizes the following equation K 2 ×ΔR(Il)−ΔR(Ih), wherein K 1 and K 2 are first and second, different, constants. 11 . The method according to claim 10 , wherein the values of the first and second constants are 1.827 and 2.165.
caused by changes in the thermal conductivity of a surrounding material to be tested (G01N27/20 takes precedence) · CPC title
for determining moisture content, e.g. humidity, of the fluid (moisture content of the tested material G01N27/048) · CPC title
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