Coordinate measuring machine with carbon fiber air bearings
US-2015285608-A1 · Oct 8, 2015 · US
US2016003603A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016003603-A1 |
| Application number | US-201414324764-A |
| Country | US |
| Kind code | A1 |
| Filing date | Jul 7, 2014 |
| Priority date | Jul 7, 2014 |
| Publication date | Jan 7, 2016 |
| Grant date | — |
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A three-dimensional coordinate measuring machine includes a base, a moving mechanism provided on the base, and a probe moved by the moving mechanism, the three-dimensional coordinate measuring machine measures coordinates of a surface position of an object to be measured by using the probe, the moving mechanism includes: a linear guide using a mechanical bearing; and an air bearing mechanism provided in parallel to the linear guide, one of ends of the moving part is attached to a linear moving unit that moves by the linear guide and the other is attached to the air moving part so that the other end can swing with respect to the air moving part, and the air bearing mechanism absorbs a difference in the height change between the linear guide and the air bearing mechanism by the air bearing.
Opening claim text (preview).
What is claimed is: 1 . A three-dimensional coordinate measuring machine comprising: a base; a moving mechanism provided on the base; and a probe moved by the moving mechanism, wherein the three-dimensional coordinate measuring machine measures coordinates of a surface position of an object to be measured by using the probe, wherein the moving mechanism comprising: a linear guide using a mechanical bearing; and an air bearing mechanism provided in parallel to the linear guide. 2 . The three-dimensional coordinate measuring machine according to claim 1 , wherein a drive point of a moving part moved by the moving mechanism is provided at a side of the linear guide and is not provided at a side of the air bearing mechanism. 3 . The three-dimensional coordinate measuring machine according to claim 1 , wherein the air bearing mechanism is provided on the base. 4 . The three-dimensional coordinate measuring machine according to claim 2 , wherein the air bearing mechanism is provided on the base. 5 . The three-dimensional coordinate measuring machine according to claim 3 , further comprising a column provided on one of sides of the base and having a mount surface parallel to the base surface, wherein the linear guide is provided on the mount surface of the column. 6 . The three-dimensional coordinate measuring machine according to claim 4 , further comprising a column provided on one of sides of the base and having a mount surface parallel to the base surface, wherein the linear guide is provided on the mount surface of the column. 7 . The three-dimensional coordinate measuring machine according to claim 1 , wherein the air bearing mechanism includes: an air bearing slide guide part provided in parallel to the linear guide; and an air moving part that moves along the air bearing slide guide part, wherein one of ends of a moving part moved by the moving mechanism is attached to a linear moving unit that moves by the linear guide and the other is attached to the air moving part so that the other end can swing with respect to the air moving part. 8 . The three-dimensional coordinate measuring machine according to claim 2 , wherein the air bearing mechanism includes: an air bearing slide guide part provided in parallel to the linear guide; and an air moving part that moves along the air bearing slide guide part, wherein one of ends of the moving part is attached to a linear moving unit that moves by the linear guide and the other is attached to the air moving part so that the other end can swing with respect to the air moving part. 9 . The three-dimensional coordinate measuring machine according to claim 3 , wherein the air bearing mechanism includes: an air bearing slide guide part provided in parallel to the linear guide; and an air moving part that moves along the air bearing slide guide part, wherein one of ends of a moving part moved by the moving mechanism is attached to a linear moving unit that moves by the linear guide and the other is attached to the air moving part so that the other end can swing with respect to the air moving part. 10 . The three-dimensional coordinate measuring machine according to claim 4 , wherein the air bearing mechanism includes: an air bearing slide guide part provided in parallel to the linear guide; and an air moving part that moves along the air bearing slide guide part, wherein one of ends of the moving part is attached to a linear moving unit that moves by the linear guide and the other is attached to the air moving part so that the other end can swing with respect to the air moving part. 11 . The three-dimensional coordinate measuring machine according to claim 5 , wherein the air bearing mechanism includes: an air bearing slide guide part provided in parallel to the linear guide; and an air moving part that moves along the air bearing slide guide part, wherein one of ends of a moving part moved by the moving mechanism is attached to a linear moving unit that moves by the linear guide and the other is attached to the air moving part so that the other end can swing with respect to the air moving part. 12 . The three-dimensional coordinate measuring machine according to claim 6 , wherein the air bearing mechanism includes: an air bearing slide guide part provided in parallel to the linear guide; and an air moving part that moves along the air bearing slide guide part, wherein one of ends of the moving part is attached to a linear moving unit that moves by the linear guide and the other is attached to the air moving part so that the other end can swing with respect to the air moving part. 13 . The three-dimensional coordinate measuring machine according to claim 7 , wherein a link part between the moving part and the air moving part includes: a tip end part in a shape of a sphere; and a receiving part for receiving the tip end part, at least a part of the receiving part for receiving the tip end part is a conical surface. 14 . The three-dimensional coordinate measuring machine according to claim 8 , wherein a link part between the moving part and the air moving part includes: a tip end part in a shape of a sphere; and a receiving part for receiving the tip end part, at least a part of the receiving part for receiving the tip end part is a conical surface. 15 . The three-dimensional coordinate measuring machine according to claim 9 , wherein a link part between the moving part and the air moving part includes: a tip end part in a shape of a sphere; and a receiving part for receiving the tip end part, at least a part of the receiving part for receiving the tip end part is a conical surface. 16 . The three-dimensional coordinate measuring machine according to claim 10 , wherein a link part between the moving part and the air moving part includes: a tip end part in a shape of a sphere; and a receiving part for receiving the tip end part, at least a part of the receiving part for receiving the tip end part is a conical surface. 17 . The three-dimensional coordinate measuring machine according to claim 11 , wherein a link part between the moving part and the air moving part includes: a tip end part in a shape of a sphere; and a receiving part for receiving the tip end part, at least a part of the receiving part for receiving the tip end part is a conical surface. 18 . The three-dimensional coordinate measuring machine according to claim 12 , wherein a link part between the moving part and the air moving part includes: a tip end part in a shape of a sphere; and a receiving part for receiving the tip end part, at least a part of the receiving part for receiving the tip end part is a conical surface.
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