Ion group irradiation device, secondary ion mass spectrometer, and secondary ion mass spectrometry method

Patent metadata

Field	Value
Publication number	US-2015311057-A1
Application number	US-201514734692-A
Country	US
Kind code	A1
Filing date	Jun 9, 2015
Priority date	Jun 24, 2013
Publication date	Oct 29, 2015
Grant date	—

Abstract

The present invention provides an ion group irradiation device for irradiating a sample with an ion group. An ion group selecting unit is configured to select, from ions released from an ion source, at least two ion groups formed of ions having different average masses. A primary ion irradiation unit is configured to irradiate the sample with the at least two ion groups.

First claim

1 . An ion group irradiation device for irradiating a sample with an ion group, comprising:
an ion source for generating ions; an ion group selecting unit configured to select, from the ions released from the ion source, at least two ion groups formed of ions having different average masses; and a primary ion irradiation unit configured to irradiate the sample with the at least two ion groups, wherein an atom species and/or a molecule species of the ions forming the at least two ion groups is common between ion groups.

2 . The ion group irradiation device according to claim 1 ,
wherein the ion group selecting unit comprises a first chopper positioned on an ion source side, a second chopper, and an ion separator disposed between the first chopper and the second chopper, wherein the first chopper and the second chopper each perform a chopping operation of selecting an ion group by passing and blocking the ions in a traveling direction through opening and closing, wherein the second chopper performs one chopping operation in coordination with one chopping operation by the first chopper, and wherein, in a specified cycle in which the chopping operation by the first chopper and the chopping operation by the second chopper are repeated multiple times, there are multiple differences between an opening time of the first chopper and an opening time of the second chopper.

3 . The ion group irradiation device according to claim 2 , wherein the ion separator comprises a time-of-flight mass separator.

4 . The ion group irradiation device according to claim 1 , further comprising an intermittent valve for supplying an ion material.

5 . The ion group irradiation device according to claim 1 , wherein the same sample is irradiated with the at least two ion groups.

6 . The ion group irradiation device according to claim 1 , wherein the same region is irradiated with the at least two ion groups at different times.

7 . The ion group irradiation device according to claim 1 , wherein the sample is irradiated with the at least two ion groups in an order from an ion group formed of ions having a larger average mass in a certain period of time.

8 . The ion group irradiation device according to claim 1 , wherein the sample is irradiated with the at least two ion groups coaxially.

9 . The ion group irradiation device according to claim 1 , wherein the at least two ion groups comprise at least three ion groups in which ions forming the at least three ion groups have different average masses and an atom species and/or a molecule species forming the at least three ion groups is common between ion groups.

10 . The ion group irradiation device according to claim 1 , wherein at least one of the at least two ion groups is formed of a cluster ion.

11 . The ion group irradiation device according to claim 10 , wherein at least one of the at least two ion groups includes at least one kind of molecule of water, an acid, and an alcohol.

12 . The ion group irradiation device according to claim 1 , wherein one of the atom species and the molecule species of the ions forming the at least two ion groups is the same between the ion groups.

13 . The ion group irradiation device according to claim 2 , wherein at least one of the first chopper or the second chopper comprises a chopper formed of a combination of a deflection electrode and an aperture.

14 . A secondary ion mass spectrometer, comprising:
the ion group irradiation device according to claim 1 ; and a mass spectrometer for measuring a mass of a secondary ion generated from a sample irradiated with an ion group by the ion group irradiation device.

15 . The secondary ion mass spectrometer according to claim 14 , wherein the mass spectrometer comprises a time-of-flight mass spectrometer.

16 . The secondary ion mass spectrometer according to claim 14 , wherein the mass spectrometer comprises a detector having a two-dimensional ion detection function of detecting the secondary ion generated from a sample surface while keeping a positional relationship at a secondary ion generation position.

17 . The secondary ion mass spectrometer according to claim 14 , further comprising an analysis device for performing comparison analysis with respect to one of at least two secondary ion mass spectra and at least two mass distribution images.

18 . A secondary ion mass spectrometry method, comprising:
comparing secondary ion mass spectra for each ion group for irradiation; and obtaining one of a mass spectrum and a mass distribution image based on a difference between the secondary ion mass spectra, through use of the secondary ion mass spectrometer according to claim 14 .

19 . A secondary ion mass spectrometer for irradiating a sample with an ion group, comprising:
an ion source for generating ions; an ion group selecting unit configured to select at least two ion groups from the ions released from the ion source; and a primary ion irradiation unit configured to irradiate the sample with the at least two ion groups, wherein an atom species and/or a molecule species of the ions forming the at least two ion groups is common between ion groups, wherein the ion group selecting unit comprises a first chopper positioned on an ion source side, a second chopper, and an ion separator disposed between the first chopper and the second chopper, wherein the first chopper and the second chopper each perform a chopping operation of selecting an ion group by passing and blocking the ions in a traveling direction through opening and closing, wherein the second chopper performs one chopping operation in coordination with one chopping operation by the first chopper, and wherein, in a specified cycle in which the chopping operation by the first chopper and the chopping operation by the second chopper are repeated multiple times, there are multiple differences between an opening time of the first chopper and an opening time of the second chopper.

20 . A secondary ion mass spectrometer for irradiating a sample with an ion group, comprising:
an ion source for generating ions; an ion group selecting unit configured to select at least two ion groups from the ions released from the ion source; and a primary ion irradiation unit configured to irradiate the sample with the at least two ion groups, wherein an atom species and/or a molecule species of the ions forming the at least two ion groups is common between ion groups, wherein the ion source comprises an intermittent valve, wherein the ion group selecting unit comprises a first chopper positioned on an ion source side, a second chopper, and an ion separator disposed between the first chopper and the second chopper, wherein the intermittent valve performs a jetting operation of intermittently jetting an ion material, wherein the first chopper and the second chopper each perform a chopping operation of selecting an ion group by passing and blocking the ions in a traveling direction through opening and closing, wherein the secondary ion mass spectrometer is operated in: a first operation mode in which at least one of the first chopper or the second chopper performs the chopping operation multiple times in coordination with one jetting operation by the intermittent valve; a second operation mode in which the second chopper performs one chopping operation in coordination with one chopping operation by the first chopper, and in a specified cycle in which the chopping operation by the first chopper and the chopping operation by the second ch

Assignees

• Canon Kk

Inventors

• Murayama Yohei
• Kyogaku Masafumi
• Iwasaki Kota
• Aoki Naofumi

Classifications

• H01J49/10

  Ion sources; Ion guns · CPC title

• H01J49/0409

  Sample holders or containers (containers for retaining a material to be analyzed, B01L3/50, for DNA, C12Q1/6834, for biological materials, G01N33/543) · CPC title

• H01J49/40 Primary

  Time-of-flight spectrometers (H01J49/36 takes precedence) · CPC title

• G01N2223/506

  time-of-flight · CPC title

• G01N2223/0816

  incident ion beam and measuring secondary ion beam [SIMS] · CPC title