Showerhead assembly and substrate processing apparatus
US-2024042463-A1 · Feb 8, 2024 · US
US2015114999A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2015114999-A1 |
| Application number | US-201314068936-A |
| Country | US |
| Kind code | A1 |
| Filing date | Oct 31, 2013 |
| Priority date | Oct 31, 2013 |
| Publication date | Apr 30, 2015 |
| Grant date | — |
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Official abstract text for this publication.
A dispensing module and method of dispensing an adhesive includes a dispenser body assembly having a liquid supply passage, a nozzle member having a liquid passageway, a valve element, and a valve seat. The liquid passageway includes a discharge passageway defining an outlet, a first converging surface, a bore, and a shoulder positioned between the first converging surface and the bore. The valve element extends along an axis within the liquid passageway and has a bulbous end portion movable along the axis between an open position and a closed position. The bulbous end portion has a valve needle smaller than the bore to inhibit obstruction to the discharge passageway for adhesive flowing thereto. The valve seat seals against the bulbous end portion in the closed position such that a region of the valve needle projects into the discharge passageway for inhibiting clogging of the adhesive proximate to the outlet.
Opening claim text (preview).
What is claimed is: 1 . A dispensing module for dispensing an adhesive, comprising; a dispenser body assembly having a liquid supply passage extending therethrough; a nozzle member including a liquid passageway extending therethrough, the liquid passageway fluidly connected to the liquid supply passage and including a discharge passageway defining an outlet, a first converging surface tapering conically toward the outlet, a bore extending toward the outlet, and a shoulder posi…
Operations & Transport · mapped topic
Operations & Transport · mapped topic
Operations & Transport · mapped topic
Operations & Transport · mapped topic
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