Chunk polycrystalline silicon and process for cleaning polycrystalline silicon chunks
US-9209009-B2 · Dec 8, 2015 · US
US2015114285A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2015114285-A1 |
| Application number | US-201414519162-A |
| Country | US |
| Kind code | A1 |
| Filing date | Oct 21, 2014 |
| Priority date | Oct 30, 2013 |
| Publication date | Apr 30, 2015 |
| Grant date | — |
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A growth chamber or a Czochralski crystal growth station has one or more re-sealable caps that are inserted into the chamber body. An O-ring seals the cap within its mating portion of the chamber body. The re-sealable caps facilitate re-use of the chamber body for a future crystal growth cycle.
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What is claimed is: 1 . A growth chamber apparatus for a Czochralski crystal growth station, comprising: a hollow chamber body having open upper and lower ends; a base cap having a necked portion for slidable insertion into the chamber body lower end; a lid cap having a necked portion for slidable insertion into the chamber body upper end; and an O-ring interposed between the at least one of the chamber body ends and its corresponding necked portion of the base or lid, for…
Cross-Sectional Technologies · mapped topic
Cross-Sectional Technologies · mapped topic
Cross-Sectional Technologies · mapped topic
Chemistry & Metallurgy · mapped topic
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