Vibrator element, method of manufacturing vibrator element, vibrator, electronic device, electronic apparatus and moving body
US-9341643-B2 · May 17, 2016 · US
US2015114117A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2015114117-A1 |
| Application number | US-201414528460-A |
| Country | US |
| Kind code | A1 |
| Filing date | Oct 30, 2014 |
| Priority date | Oct 31, 2013 |
| Publication date | Apr 30, 2015 |
| Grant date | — |
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A vibrating element includes: drive vibrating arm supported to the base portion and extending in a direction of the second axis; and detection vibrating arm supported to the base portion at a position different from the drive vibrating arm and extending in the direction of the second axis. When the vibrating element is subjected to rotation about the second axis while the drive vibrating arm being reciprocally driven in a direction of the first axis, an amount of displacement of the detection vibrating arm in a direction of the third axis at a position distant from the base portion by a distance y1 along the direction of the second axis is greater than an amount of displacement of the drive vibrating arm in the direction of the third axis at a position distant from the base portion by the distance y1 along the direction of the second axis.
Opening claim text (preview).
What is claimed is: 1 . A vibrating element whose normal is, when assuming a first axis, a second axis, and a third axis intersecting each other, the third axis, the vibrating element comprising: a base portion; at least one drive vibrating arm supported to the base portion and extending in a direction of the second axis; and at least one detection vibrating arm supported to the base portion at a position different from the drive vibrating arm and extending in the direction…
Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
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