Reducing formation of oxide on solder

US2015076216A1 · US · A1

Patent metadata
FieldValue
Publication numberUS-2015076216-A1
Application numberUS-201414468660-A
CountryUS
Kind codeA1
Filing dateAug 26, 2014
Priority dateNov 5, 2010
Publication dateMar 19, 2015
Grant date

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  1. Title

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  2. Abstract

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  5. First independent claim

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Abstract

Official abstract text for this publication.

In certain embodiments, a system includes a deposition system and a plasma/bonding system. The deposition system deposits a solder outwardly from a substrate of a number of substrates. The plasma/bonding system comprises a plasma system configured to plasma clean the substrate and a bonding system configured to bond the substrates. The plasma/bonding system at least reduces reoxidation of the solder. In certain embodiments, a method comprises depositing solder outwardly from a substrate, removing metal oxide from the substrate, and depositing a capping layer outwardly from the substrate to at least reduce reoxidation of the solder.

First claim

Opening claim text (preview).

What is claimed is: 1 . A method, comprising: receiving a first substrate into a first chamber having an interior space substantially sealed from an environment external to the first chamber, wherein the first substrate comprises a portion of solder formed therein; and performing all of the following actions while the first substrate is disposed within the first chamber: plasma cleaning the first substrate under substantial vacuum conditions, a first time; depositing a cap…

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What does patent US2015076216A1 cover?
In certain embodiments, a system includes a deposition system and a plasma/bonding system. The deposition system deposits a solder outwardly from a substrate of a number of substrates. The plasma/bonding system comprises a plasma system configured to plasma clean the substrate and a bonding system configured to bond the substrates. The plasma/bonding system at least reduces reoxidation of the s…
Who is the assignee on this patent?
Raytheon Co
What technology area does this patent fall under?
Primary CPC classification B23K1/206. Mapped technology areas include Operations & Transport.
When was this patent published?
Publication date Thu Mar 19 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).