Hardmask composition, hardmask layer, and method of forming patterns
US-2024377746-A1 · Nov 14, 2024 · US
US12595334B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12595334-B2 |
| Application number | US-202017777705-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 16, 2020 |
| Priority date | Nov 19, 2019 |
| Publication date | Apr 7, 2026 |
| Grant date | Apr 7, 2026 |
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A compound of formula 1: where X and Y are each a different optional organic group. When there is a plurality of X, each X in the plurality of X may be the same as or different from each other. When there is a plurality of Y, each Y in the plurality of Y may be the same as or different from each other. R represents a hydrocarbon group having 1 to 10 carbon atoms or a halogenated alkyl group. When there is a plurality of R, each R in the plurality of R may be the same as or different from each other. Variable m is an integer of 0 to 3, n is a repeating unit and satisfies 1≤n≤20, and p is a repeating unit and satisfies 0≤p≤20.
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The invention claimed is: 1 . A compound of formula (1): wherein: X and Y are each a different organic group; when there is a plurality of X, each X in the plurality of X may be the same as or different from each other; when there is a plurality of Y, each Y in the plurality of Y may be the same as or different from each other; R is a hydrocarbon group having 1 to 10 carbon atoms or a halogenated alkyl group; when there is a plurality of R, each R in the plurality of R may be the same as or different from each other; m is an integer of 0 to 3; n is a repeating unit and satisfies 1.1≤n≤20; and p is a repeating unit and satisfies 0≤p≤20. 2 . The compound according to claim 1 , wherein in the formula (1): X is any one or more of (A) to (D): wherein: S is a hydrocarbon group having 1 to 3 carbon atoms; a is an integer of 0 to 4; when there is a plurality of S, each S in the plurality of S may be the same as or different from each other; and the symbol * indicates a bonding position, and Y is any one or more of (E) to (K): wherein: T is a hydrocarbon group having 1 to 3 carbon atoms; b is an integer of 0 to 4; when there is a plurality of T, each T in the plurality of T may be the same as or different from each other; and the symbol * indicates a bonding position. 3 . The compound according to claim 2 , wherein in the formula (1), X is (A) or (C), and Y is (E) or (F) described in the formula (3). 4 . The compound according to claim 3 , wherein in the formula (1), p=0. 5 . A mixture comprising the compound according to claim 1 and a polymerization inhibitor. 6 . A curable resin composition comprising the compound according to claim 1 . 7 . The curable resin composition according to claim 6 , further comprising one or more compounds selected from the group consisting of a polyphenylene ether compound, a styrene-butadiene copolymer, a butadiene-based thermoplastic elastomer, and a styrene-based thermoplastic elastomer. 8 . The curable resin composition according to claim 6 , further comprising a radical polymerization initiator. 9 . A cured product obtained by curing the compound according to claim 1 . 10 . A method for producing the compound according to claim 1 , comprising subjecting a compound of formula (4) to a dehydrohalogenation reaction in the presence of a basic catalyst: wherein: X and Y are each a different organic group; when there is a plurality of X, each X in the plurality of X may be the same as or different from each other; when there is a plurality of Y, each Y in the plurality of Y may be the same as or different from each other; Z is a halogen element; each Z in a plurality of Z may be the same as or different from each other; R is a hydrocarbon group having 1 to 10 carbon atoms or a halogenated alkyl group; when there is a plurality of R, each R in the plurality of R may be the same as or different from each other; m is an integer of 0 to 3; n is a repeating unit and satisfies 1.1≤n≤20; and p is a repeating unit and satisfies 0≤p≤20.
Non-condensed aromatic systems, e.g. benzene · CPC title
Side-chains containing halogens · CPC title
Non-ladder-type, e.g. polyphenylenes, PPVs or polythiophenes · CPC title
from unsaturated polycondensates · CPC title
on to polyphenylene oxides · CPC title
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