Metal overhang for advanced patterning

Patent metadata

Field	Value
Publication number	US-12593568-B2
Application number	US-202118040161-A
Country	US
Kind code	B2
Filing date	Jul 27, 2021
Priority date	Aug 21, 2020
Publication date	Mar 31, 2026
Grant date	Mar 31, 2026

Abstract

Sub-pixel circuits and methods of forming sub-pixel circuits that may be utilized in an organic light-emitting diode (OLED) display are described herein. The adjacent metal-containing overhang structures defining each sub-pixel of the sub-pixel circuit of the display provide for formation of the sub-pixel circuit using evaporation deposition and provide for the metal-containing overhang structures to remain in place after the sub-pixel circuit is formed (e.g., utilizing the methods of the fifth, sixth, or seventh exemplary embodiments). Evaporation deposition may be utilized for deposition of an OLED material and cathode. The metal-containing overhang structures define deposition angles, i.e., provide for a shadowing effect during evaporation deposition. The encapsulation layer of a respective sub-pixel is disposed over the cathode with the encapsulation layer extending under at least a portion of each of the adjacent metal-containing overhang structures and along a sidewall of each of the adjacent metal-containing overhang structures.

First claim

What is claimed is:

1 . A device, comprising:
a substrate; adjacent pixel-defining layer (PDL) structures disposed over the substrate; metal-containing overhang structures disposed over an upper surface of the PDL structures, each metal-containing overhang structure comprising a body and an extension, the body and the extension formed of the same metal-containing material, the extension extending beyond a sidewall of the body to form an overhang; and a plurality of sub-pixels, each sub-pixel comprising: adjacent metal-containing overhang structures disposed over the upper surface of the adjacent PDL structures; an anode; an organic light-emitting diode (OLED) material disposed over the anode; a cathode disposed over the OLED material and contacting the sidewall of the body of the adjacent metal-containing overhang structures, wherein the extension of the adjacent metal-containing overhang structures is disposed over the upper surface of the PDL structure and over the OLED material and the cathode on the upper surface under the overhang, such that the OLED material does not contact the body and the cathode contacts the body; and an encapsulation layer disposed over the cathode and extending under each adjacent metal-containing overhang structure, along a sidewall of each adjacent metal-containing overhang structure, and over an upper surface of each adjacent metal-containing overhang structure, the encapsulation layer of each sub-pixel being discontinuous from the encapsulation layer of an adjacent sub-pixel.

2 . The device of claim 1 , further comprising an encapsulation layer disposed over the cathode.

3 . The device of claim 2 , wherein each sub-pixel further comprises a plug disposed over the encapsulation layer, the plug having a plug transmittance that is matched or substantially matched to an OLED transmittance of the OLED material.

4 . The device of claim 3 , wherein the plug comprises a photoresist, a color filter, or a photosensitive monomer material.

5 . The device of claim 2 , further comprising a global passivation layer disposed over the metal-containing overhang structures and the encapsulation layer.

6 . The device of claim 1 , wherein adjacent overhangs of the metal-containing overhang structures are each overhang defined by:
an overhang width from a sidewall of a PDL structure and an exterior edge of an underside of a metal-containing overhang structure; and an overhang depth from the anode to the underside of the metal-containing overhang structure.

7 . The device of claim 6 , wherein an aspect ratio of the overhang width to the overhang depth is about 1:1 or greater.

8 . The device of claim 1 , wherein the metal-containing overhang structures comprise copper, titanium, aluminum, molybdenum, silver, indium tin oxide, indium zinc oxide, or combinations thereof.

9 . The device of claim 1 , wherein the device comprises a dot-type architecture or a line-type architecture.

10 . The device of claim 1 , wherein the substrate is a pre-patterned indium tin oxide (ITO) glass substrate.

11 . The device of claim 1 , wherein the OLED material comprises a hole injection layer (HIL), a hole transport layer (HTL), an emissive layer (EML), and an electron transport layer (ETL).

12 . The device of claim 1 , wherein the encapsulation layer extends under the extension and along the sidewall of the body.

13 . A device comprising a plurality of sub-pixels, each sub-pixel of the plurality of sub-pixels defined by adjacent pixel-defining layer (PDL) structures and adjacent metal-containing overhang structures disposed over the adjacent PDL structures, each sub-pixel having an anode, organic light-emitting diode (OLED) material disposed over the anode, a cathode disposed over the OLED material, and an encapsulation layer disposed over the cathode, wherein the device is made by a process comprising:
depositing the OLED material using deposition over a substrate, the OLED material disposed over the anode, the OLED material having an OLED edge defined by defined by adjacent overhangs of the metal-containing overhang structures, each metal-containing overhang structure comprising a body and an extension, the body and extension formed of the same metal-containing material, the extension extending beyond a sidewall of the body to form an overhang; depositing the cathode using deposition, wherein the cathode contacts the sidewall of the body of the adjacent metal-containing overhang structures of a respective sub-pixel and the extension extends over a portion of the OLED material and the cathode, such that the OLED material does not contact the body and the cathode contacts the body; and depositing the encapsulation layer using deposition, the encapsulation layer disposed over the cathode and extending under each adjacent metal-containing overhang structure, along a sidewall of each adjacent metal-containing overhang structure, and over an upper surface of each adjacent metal-containing overhang structure, the encapsulation layer of each sub-pixel being discontinuous from the encapsulation layer of an adjacent sub-pixel.

14 . The device of claim 13 , wherein adjacent overhangs of the metal-containing overhang structures are each overhang defined by:
an overhang width from a sidewall of a PDL structure and an exterior edge of an underside of a metal-containing overhang structure; and an overhang depth from the anode to the underside of the metal-containing overhang structure.

15 . The device of claim 14 , wherein an aspect ratio of the overhang width to the overhang depth is about 1:1 or greater.

16 . The device of claim 13 , wherein the metal-containing overhang structures comprise copper, titanium, aluminum, molybdenum, silver, indium tin oxide, indium zinc oxide, or combinations thereof.

17 . A method, comprising:
disposing a first resist in a pixel opening and over exterior portions of adjacent PDL structures, the adjacent PDL structures disposed over a substrate; disposing a second resist on the first resist between the exterior portions of the adjacent PDL structures; plating a metal-containing material over an area defined by the first resist and the second resist; and removing the second resist and the first resist to form metal-containing overhang structures disposed over the adjacent PDL structure.

18 . The method of claim 17 , further comprising sputtering a metal-containing bonding layer over the first resist and exposed portions of the adjacent PDL structures.

19 . The method of claim 18 , wherein the metal-containing bonding layer disposed over the first resist is removed.

20 . The method of claim 17 , further comprising:
depositing an OLED material using evaporation deposition over the substrate, the OLED material disposed over an anode of the substrate; and depositing a cathode over the OLED material, wherein the metal-containing overhang structures define deposition angles such that both the OLED material and the cathode extend under the metal-containing overhang structures.

Assignees

• Applied Materials Inc

Inventors

• Lee Jungmin
• Yoo Seong Ho
• Haas Dieter
• Kim Si Kyoung
• Lin Yu-Hsin
• Choung Ji Young

Classifications

• H10K59/873

  Encapsulations · CPC title

• H10K59/1201

  Manufacture or treatment · CPC title

• H10K71/60

  Forming conductive regions or layers, e.g. electrodes · CPC title

• H10K71/233

  by photolithographic etching · CPC title

• H10K71/10

  Deposition of organic active material · CPC title