Pre-tilted MEMS mirrors
US-9664896-B1 · May 30, 2017 · US
Low voltage electrostatic mems actuators for large angle tip, tilt, and piston beamsteering
US12589986B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12589986-B2 |
| Application number | US-202418421596-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 24, 2024 |
| Priority date | Aug 2, 2017 |
| Publication date | Mar 31, 2026 |
| Grant date | Mar 31, 2026 |
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- Title
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Abstract
Official abstract text for this publication.
An actuator element of a MEMS device on a substrate able to create large, out-of-plane deflection includes two separated metallic layers contacting the substrate. The second metallic layer has a first portion contacting the substrate and a second portion having cantilevered over the substrate and first metallic layer. A first insulating layer contacts the cantilevered metallic layer on a bottom contacting surface and a second insulating layer contacting the cantilevered metallic layer on a portion of a top contacting surface. The second, cantilevered portion of the metallic layer is prestressed causing the distal end to deform away from the substrate. Applying a voltage potential between the first and second metallic layers creates an electrostatic field drawing the distal end toward the substrate.
First claim
Opening claim text (preview).
What is claimed is: 1 . An actuator element of a MEMS device on a substrate to create large, out-of-plane deflection, the actuator element comprising: a first metallic layer contacting the substrate; a second metallic layer having a first portion contacting the substrate separated from the first metallic layer and a second portion having an end proximal to the first portion and distal end cantilevered over the substrate and first metallic layer; a first insulating layer cont…
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Operations & Transport · mapped topic
Operations & Transport · mapped topic
Operations & Transport · mapped topic
Operations & Transport · mapped topic
Physics · mapped topic
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Frequently asked questions
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- What does patent US12589986B2 cover?
- An actuator element of a MEMS device on a substrate able to create large, out-of-plane deflection includes two separated metallic layers contacting the substrate. The second metallic layer has a first portion contacting the substrate and a second portion having cantilevered over the substrate and first metallic layer. A first insulating layer contacts the cantilevered metallic layer on a bottom…
- Who is the assignee on this patent?
- Us Gov Air Force, Us Air Force
- What technology area does this patent fall under?
- Primary CPC classification G02B26/0833. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Mar 31 2026 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 1 related publication on this page (citations in our corpus or others sharing the same primary CPC).