Top notch slit profile for mems device
US-2024381034-A1 · Nov 14, 2024 · US
US12588416B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12588416-B2 |
| Application number | US-202218071238-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 29, 2022 |
| Priority date | Jan 26, 2022 |
| Publication date | Mar 24, 2026 |
| Grant date | Mar 24, 2026 |
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A piezoelectric actuator includes a piezoelectric element having a rectangular shape, a first supporter, and a second supporter. The piezoelectric element includes a pair of main surfaces opposing each other, a first end surface and a second end surface opposing each other in a long side direction of the pair of main surfaces, and a first side surface and a second side surface opposing each other in a short side direction of the pair of main surfaces. The first supporter is provided to be movable according to deformation of the first end surface. The second supporter is provided to be movable according to deformation of the first side surface. The first supporter includes an opposing portion and a protruding portion. The opposing portion opposes the second supporter in the long side direction. The protruding portion protrudes from the opposing portion and abuts on the second supporter.
Opening claim text (preview).
The invention claimed is: 1 . A piezoelectric actuator for driving an object, comprising: a piezoelectric element having a rectangular shape and including a pair of main surfaces opposing each other, a first end surface and a second end surface opposing each other in a long side direction of the pair of main surfaces, and a first side surface and a second side surface opposing each other in a short side direction of the pair of main surfaces; a first supporter opposing the object in the long side direction via the piezoelectric element and supporting the first end surface; and a second supporter opposing a disposition surface of a housing in which the piezoelectric element is disposed in the short side direction via the piezoelectric element and supporting the first side surface, wherein the first supporter is provided to be movable according to deformation of the first end surface, the second supporter is provided to be movable according to deformation of the first side surface, and the first supporter includes an opposing portion opposing the second supporter in the long side direction, and a protruding portion protruding from the opposing portion in the long side direction and abutting on the second supporter. 2 . The piezoelectric actuator according to claim 1 , wherein a distance at which an abutting portion of the protruding portion with the second supporter is spaced apart from the piezoelectric element in the short side direction is 0.3 times or more and 0.7 times or less of a length of the piezoelectric element in the short side direction. 3 . The piezoelectric actuator according to claim 1 , further comprising: a first biasing member biasing the first supporter in the long side direction to bring the first supporter into contact with the piezoelectric element; and a second biasing member biasing the second supporter in the short side direction to bring the second supporter into contact with the piezoelectric element. 4 . The piezoelectric actuator according to claim 1 , further comprising: a first biasing member biasing the first supporter in the long side direction to bring the first supporter into contact with the piezoelectric element; and a second biasing member biasing the second supporter in the short side direction to bring the second supporter into contact with the piezoelectric element, wherein the second supporter includes a pair of support portions spaced apart from each other in the long side direction and supporting the first side surface, and the second biasing member is located between the pair of support portions in the long side direction. 5 . The piezoelectric actuator according to claim 1 , wherein the second supporter includes a pair of support portions spaced apart from each other in the long side direction and supporting the first side surface. 6 . The piezoelectric actuator according to claim 4 , wherein each of the pair of support portions includes a curved surface that abuts on the piezoelectric element. 7 . The piezoelectric actuator according to claim 1 , wherein the protruding portion includes a curved surface. 8 . The piezoelectric actuator according to claim 1 , wherein the first supporter includes a positioning portion that defines a position of the piezoelectric element in the short side direction. 9 . The piezoelectric actuator according to claim 1 , wherein the first supporter is rotatably connected to the second supporter by a coupling shaft provided on the protruding portion.
Mounts; Supports; Enclosures; Casings · CPC title
Electrodes or interconnections, e.g. leads or terminals · CPC title
having a stacked or multilayer structure · CPC title
Supports for driving or driven bodies; Means for pressing driving body against driven body · CPC title
by pressing one or more vibrators against the driven body · CPC title
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