Structure for particle acceleration and charged particle beam apparatus

Patent metadata

Field	Value
Publication number	US-12586748-B2
Application number	US-202118559160-A
Country	US
Kind code	B2
Filing date	May 21, 2021
Priority date	May 21, 2021
Publication date	Mar 24, 2026
Grant date	Mar 24, 2026

Abstract

Provided are a structure for particle acceleration and a charged particle beam apparatus, which enable the suppression of electric field concentration occurring near a negative electrode part. The structure for particle acceleration includes: a ceramic body 1 having a through hole 10 formed by an inner wall surface; and a negative electrode 2 and a positive electrode 3 which are arranged, respectively, on one end and the other end of the through hole 10 in the ceramic body. The inner wall surface of the ceramic body 1 is configured such that a first region 22 , which is electrically connected with the negative electrode 2 , and a second region 23 , which is electrically connected with the positive electrode 3 , are electrically connected to each other. The surface resistivity of the first region 22 is lower than the surface resistivity of the second region 23.

First claim

The invention claimed is:

1 . A structure for particle acceleration comprising:
a ceramic body having a through hole formed by an inner wall surface; a cathode provided on one end of the through hole in contact with the ceramic body; and an anode provided on the other end of the through hole in contact with the ceramic body, wherein the inner wall surface of the ceramic body is electrically connected to a first region electrically connected to the cathode and a second region electrically connected to the anode, and a surface resistivity of the first region is lower than a surface resistivity of the second region.

2 . A charged particle beam apparatus comprising the structure for particle acceleration according to claim 1 .

3 . The charged particle beam apparatus according to claim 2 , wherein
a beam emitter is provided in a space inside the through hole of the ceramic body, and the beam emitter emits a charged particle beam by applying a voltage lower than a voltage applied to the anode and equal to or lower than a voltage applied to the cathode.

4 . The charged particle beam apparatus according to claim 3 , wherein
the beam emitter is an electron gun structure that emits an electron beam, and the first region is set on an inner wall of the ceramic body from a position in contact with the cathode to a position at a distance from the structure by a predetermined value.

5 . The charged particle beam apparatus according to claim 3 , wherein
the beam emitter is an ion gun structure that emits an ion beam, a region on the inner wall of the ceramic body from a position in contact with the anode to a predetermined height position or to a position separated from the structure by a predetermined distance forms a third region, and a surface resistivity of the third region is lower than the surface resistivity of the second region.

6 . The charged particle beam apparatus according to claim 4 , wherein
the inner wall of the ceramic body includes a small diameter portion with a relatively smaller inner diameter and a large diameter portion with a relatively larger inner diameter, and the first region is set in the small diameter portion, and the second region is set in the large diameter portion.

7 . The charged particle beam apparatus according to claim 4 , wherein
the inner wall of the ceramic body includes a large diameter portion with a relatively larger inner diameter and a small diameter portion with a relatively smaller inner diameter, the first region is set from a position in contact with the cathode to a midway position of the large diameter portion, a region in the small diameter portion formed from a position in contact with the anode to a position at a distance from the structure by a predetermined value forms a fourth region, and a surface resistivity of the fourth region is lower than the surface resistivity of the second region.

8 . The charged particle beam apparatus according to claim 5 , wherein
the inner wall of the ceramic body includes a small diameter portion with a relatively smaller inner diameter and a large diameter portion with a relatively larger inner diameter, and a portion from a position in contact with the cathode to a midway height position of the large diameter portion is set in the first region, the rest of the large diameter portion is set in the second region, and the small diameter portion is set in the third region.

9 . The charged particle beam apparatus according to claim 5 , wherein
the inner wall of the ceramic body includes a large diameter portion with a relatively larger inner diameter and a small diameter portion with a relatively smaller inner diameter, and the first region is disposed in the small diameter portion and the second region is disposed in the large diameter portion.

10 . The charged particle beam apparatus according to claim 2 , wherein the second region has a surface resistivity (Ω/□) of 1×10 9 to 1×10 12 , and the first region has a surface resistivity (Ω/□) of 1×10 6 or more and less than 1×10 9 .

11 . The charged particle beam apparatus according to claim 2 , wherein
an inner wall of the ceramic body includes a fifth region electrically connecting the first region and the second region, and the fifth region is an electric field relaxation region that continuously changes a surface resistivity from the surface resistivity of the first region to the surface resistivity of the second region.

12 . The charged particle beam apparatus according to claim 11 , wherein the electric field relaxation region is set at a position where the inner wall of the ceramic body is bent in a convex shape.

13 . The charged particle beam apparatus according to claim 5 , wherein the first surface resistivity (Ω/□) is 1×10 6 or more and less than 1×10 9 , the second surface resistivity (Ω/□) is 1×10 9 to 1×10 12 , and the third surface resistivity (Ω/□) is 1×10 6 or more and less than 1×10 9 .

14 . The charged particle beam apparatus according to claim 7 , wherein the first surface resistivity (Ω/□) is 1×10 6 or more and less than 1×10 9 , the second surface resistivity (Ω/□) is 1×10 9 to 1×10 12 , the third surface resistivity (Ω/□) is 1×10 6 or more and less than 1×10 9 , and the fourth surface resistivity (Ω/□) is 1×10 6 or more and less than 1×10 9 .

Assignees

• Hitachi High Tech Corp

Inventors

• Sugiyama Ryo
• Tanimoto Kenji
• Ishikawa Shuhei

Classifications

• H01J2237/061

  Construction · CPC title

• H01J2237/04735

  with electrostatic means · CPC title

• H01J2237/038

  Insulating · CPC title

• H01J37/08 Primary

  Ion sources; Ion guns · CPC title

• H01J37/063

  Geometrical arrangement of electrodes for beam-forming · CPC title